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US008778849B2

(12) United States Patent

(10) Patent N0.: (45) Date of Patent:

Bowen et al. (54)

MICROARRAY FABRICATION SYSTEM AND

(58)

CPC ........... .. 130112219/00529; 130112219/00608;

C40B 40/06; C40B 50/00; C40B 50/14;

(71) Applicant: Illumina, Inc., San Diego, CA (US)

C4013 50/18 USPC ........................................ .. 506/16, 23,30, 32

(72) Inventors: M. Shane Bowen, La Jolla, CA (US); Kevin L. Gunderson, Encinitas, CA

(US); Shengrong Lin, Fremont, CA (US); Maria Candelaria Rogert Bacigalupo, Cardiff by the Sea, CA

See application ?le for complete search history. (56)

5,324,633 A 5,429,807 A

Albany, CA (US); Bala Murali Venkatesan, San Diego, CA (US); James Tsay, San Diego, CA (US); John

M. Beierle, Laguna Niguel, CA (US); Lorenzo Berti, San Diego, CA (US);

Sang Ryul Park, San Diego, CA (US)

References Cited U.S. PATENT DOCUMENTS

(US); Kandaswamy Vijayan, San Diego, CA (US); Yir-Shyuan Wu,

FOREIGN PATENT DOCUMENTS EP EP

0868530 Bl 2302028 Al

(Continued) Barbee et al., “Fabrication of DNA Polymer Brush Arrays by

Destructive Micropatterning and Rolling-Circle Ampli?cation,” Macromol. Biosci. 2011, 11:607-617, published online on Feb. 8, 2011*

Oct. 26, 2012

(Continued)

Prior Publication Data

US 2013/0116153 A1

Primary Examiner * Samuel WoolWine

Assistant Examiner * Kaijiang Zhang

May 9, 2013

(74) Attorney, Agent, or Firm * Fletcher, Yoder, PC.

Related US. Application Data

(51)

(52)

OTHER PUBLICATIONS

U.S.C. 154(b) by 0 days.

(65)

(60)

4/2003 3/2011

Subject to any disclaimer, the term of this patent is extended or adjusted under 35

(21) App1.No.: 13/661,524 (22) Filed:

6/1994 Fodor et a1. 7/1995 Matson et al.

(Continued)

(73) Assignee: Illumina, Inc., San Diego, CA (US) Notice:

Jul. 15, 2014

Field of Classi?cation Search

METHOD

(*)

US 8,778,849 B2

Provisional application No. 61/552,712, ?led on Oct. 28, 2011.

Int. Cl. C403 50/18 C403 40/06 C403 50/00 C403 50/14 US. Cl.

(57)

ABSTRACT

A microarray is designed capture one or more molecules of interest at each of a plurality of sites on a substrate. The sites

comprise base pads, such as polymer base pads, that promote (2006.01) (2006.01) (2006.01) (2006.01)

the attachment of the molecules at the sites. The microarray may be made by one or more patterning techniques to create

a layout of base pads in a desired pattern. Further, the microar rays may include features to encourage clonality at the sites.

USPC .................. .. 506/32; 506/16; 506/23; 506/30

72 74

7O

18 Claims, 29 Drawing Sheets

76 68

US 8,778,849 B2 Page 2 (56)

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A1 A1 A1 A1 A1 A1 A1 A1

7/2000 9/2000 10/2000 4/2001 7/2001 7/2001 8/2001 9/2001 9/2001 9/2001 9/2001

Fiekowsky et a1, Lizardi Winkler et al‘ Nyren et al‘ Nyren Walt et al‘ Rothberg et a1, Chenchik et al‘ Kambara et 31‘ Pin.qu et 31' Khodadoust

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A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1

6,297,006 B1

10/2001 Dnmmac et 31‘

6,309,831 6,355,431 B1

10/2001 3/2002 Goldberg Chee et al‘et al‘

6,416,949 B1 6,428,752 B1 6,432,360 B1

7/2002 Dower et al‘ 8/2002 Montagu 8/2002 Church

2011/0059865 A1

9/2005 10/2005 1/2006 2/2006 4/2006 5/2006 6/2006 5/2007 6/2007 1/2008 2/2008

5/2008 1/2009 4/2009

5/2009 7/2009 5/2010

Chee et 31. Moon et a1. Donaldson et 31. Putnam et 31. Moon et a1. Maurer et 31. Moon Drmanac et a1.

Gormley et a1. Schroth et 31. Fischer Rank 6[ 31. Rothberg et 31. Kim et 31. Rothberg et a1. Gunderson et 31. Banerjee et 31. Rothberg et a1. Rothberg et a1.

6/2010 11/2010 3/2011 Smith et 31.

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5/2011 N3k3t3nl Leb1 et 6t 31.

2011/0220775 A1 2012/0020537 A1

9/2011 Triener et 31. 1/2012 Garcia et 31.

2012/0152742 A1 *

6/2012

Gor?nkel et a1. ........... .. 204/452

6,465,178 B2

10/2002 Chappa et al‘

2012/0270305 A1

10/2012 Reed et 31.

6,482,591 6,489,606 6,514,751 6,737,236 6,770,441 6,859,570

B2 B1 B2 B1 B2 B2

11/2002 12/2002 2/ 2003 5/2004 8/2004 2/2005

2012/0316086 A1

12/2012 L111

6,890,741 6,913,884 6,932,934 6,986,989 7,001,792 7,019,835 7,057,026 7,106,513 7,115,400 7,122,482 7,126,755 7,140,861 7,164,533

B2 B2 B2 B2 B2 B2 B2 B2 B1 B2 B2 B2 B2

5/2005 7/2005 8/2005 1/2006 2/2006 3/2006 6/2006 9/2006 10/2006 10/2006 10/2006 11/2006 1/2007

7,186,656 B2

7,205,244 7,211,414 7,244,559 7,259,258 7,279,113 7,315,019 7,329,492 7,329,860

B2 B2 B2 B2 B2 B2 B2 B2

Lockhart et al. Kersey et a1. Johann et a1. Pieken et a1. Dickinson et a1. Walt et a1.

Fan et a1. Stuelpnagel et a1. Choi et a1. Mirkin et 31. Sauer et a1. McMackin et a1. Barnes et a1. Moon et a1. Adessi et a1. Xu et a1. Moon et a1. Warts et 31. Moon er a1. 3/2007 Sreenivasan

4/2007 5/ 2007 7/2007 8/2007 10/2007 1/2008 2/2008 2/2008

Stacey et al. Hardin et a1. Rothberg et al. Kozlov et al, Watts et al.

Turner et al. Hardin et al. Feng et al.

FOREIGN PATENT DOCUMENTS W0 W0 W0 W0 W0 W0 W0 WO WO W0 WO W0 W0 W0 W0 W0

WO WO WO WO WO WO WO WO

39/10977 91/06678 93/17126 95/35505 00/31148 00/53812 00/63437 01/01143 0162982 A2 W0 03/014392 03049677 A2 W0 2004/018497 WO 2004/024323 W0 2005/033681 W0 2007/123744 W0 2008157640 A2 *

11/1939 5/1991 9/1993 12/1995 6/2000 9/2000 10/2000 1/2001 55/2001 2/2003 6/2003 3/2004 3/2004 4/2005 11/2007 12/2008

OTHER PUBLICATIONS

US. Appl. No. 61/438,486, ?led Feb. 1, 2011, Mark Reed. US Appl. No. 13/267,565, ?led Oct. 6, 2011, Jason Harris. US. Appl. No. 61/657,508, ?led Jun. 8, 2012, Wayne N. George. US. Appl. No. 61/660,487, ?led Jun. 15, 2012, Min-Jui Richard Shen.

US 8,778,849 B2 Page 3 (56)

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Pyrophosphate Release”, Analytical Biochemistry 242(1), 84-9 OTHER PUBLICATIONS

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(2008). Levene et al., “Zero -Mode Waveguides for Single-Molecule Analysis at High Concentrations,” Science 299, 682-686 (2003). Lizardi et al., “Mutation detection and single-molecule counting using isothermal rolling-circle ampli?cation,” Nat. Genet. 19:225 232 (1998). Lundquist et al., “Parallel confocal detection of single molecules in real time”, Opt. Lett. 33, 1026-1028 (2008).

Pyrophosphate”, Science 281(5375), 363 (1998). Ronaghi, “Pyrosequencing Sheds Light on DNA Sequencing”, Genome Res. 11(1), 3-11 (2001). Shendure et al., “Accurate Multiplex Polony Sequencing of an Evolved Bacterial Genome,” Science 309: 1728-1732 (2005). Soni & Meller, “Progress toward Ultrafast DNA Sequencing Using Solid-State Nanopores”, Clin. Chem. 53, 1996-2001 (2007). Thornton, “High Rate Thick Film Growth”, Ann. Rev. Mater. Sci.

7:239-60 (1977). Reed et al., File History US. Appl. No. 61/438,486, ?led Feb. 1, 2011, Systems and Methods and Apparatuses to Image a Sample for Biological or Chemical Analysis. Harris et al., File History US. Appl. No. 13/267,565, ?led Oct. 6, 2011, Array Domains Having Rotated Patterns. George et al., File History US. Appl. No. 61/657,508, ?led Jun. 8,

2012, Polymer Coatings. Shen et al., File History US. Appl. No. 61/660,487 ?led Jun. 15, 2012, Kinetic Exclusion Ampli?cation of Nucleic Acid Libraries. Shen et al., File History US. Appl. No. 61/715,478, ?led Oct. 18, 2012, Kinetic Exclusion Ampli?cation of Nucleic Acid Libraries. Lin et al., US. Appl. No. 13/492,661, ?led Jun. 8, 2012, Patterned Flow Cells Useful for Nucleic Acid Analysis. Partial International Search Report for application No. PCT/US2012/ 062105 mailed May 6, 2013.

* cited by examiner

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