Another breakthrough from Veeco. This time it's EPIK. TurboDisc ...
Another breakthrough from Veeco. This time it’s EPIK. Introducing the new
TurboDisc EPIK700 MOCVD System September 4, 2014 1
| Introducing TurboDisc EPIK700 GaN MOCVD System
Brighter World. Better Future
EPIK700 Raises the Bar TO A NEW LEVEL of Productivity and Yield to Maximize Customers’ Profitability 2014 EPIK700 Extends Veeco’s Leadership
2011-2013 2010
MaxBright Becomes Market Leading MOCVD System
K465i Becomes Market Leading MOCVD System
•
Highest productivity MOCVD platform with up to 20% improved CoO
•
#1 selling MOCVD tool
•
Best in class yield
•
#1 selling MOCVD tool
•
Compact cluster architecture
•
•
Leader in yield and productivity
•
MaxBright is yield and productivity leader
Fastest to production with easy process transfer
•
Most efficient capital investment for maximum profitability
(Ref: IHS Research)
2
| Introducing TurboDisc EPIK700 GaN MOCVD System
EPIK700 to Drive LED Bulb Cost Roadmap Lower EPIK700
MaxBright
2010
•
Higher Capacity 31x4”, 12x6”
•
Improved CoO up to 20%
•
Best in class yield
•
Highest productivity
2012 DOE LED Bulb ASP Roadmap Actual LED Bulb ASP Trend
2015
2020
Note: Actual LED Bulb ASP may vary depending on customer use cases and region. 3
3
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
LED Industry’s Highest Productivity and Lowest Cost of Ownership MOCVD System
Highest productivity MOCVD platform with up to 20% improved CoO compared to previous generations Designed for best-in-class uniformity which provides greater wafer yield Fastest to production with easy process transfer Most efficient capital investment for maximum profitability
EPIK700 Significantly Lowers Customers’ Costs Per Wafer
4
4
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
EPIK700 Maximizes Productivity Key innovations:
Larger Capacity
EPIK700
31x4” 12x6” AcuRampTM Advanced Temperature Control
Improved Serviceability
Advanced Automation
MaxBright 5
5
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
Best-in-Class Uniformity with Key Innovations Key innovations: IsoFlangeTM Technology Improved flow uniformity
EPIK700
TruHeatTM Technology Improved temperature uniformity
MaxBright 6
6
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
Capacity Increase Improves Throughput Wafer carrier capacity increase
K465i/MaxBright
31x4”
14x4” 2008 - 2011
Throughput (WPM)
Capacity
EPIK700 122 %
K465i/MaxBright Chamber
2014
Veeco Reactor Generation Timeline
7
7
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
EPIK700 Capacity
EPIK700 Difference – Up to 20% CoO Advantage Yielded throughput
(K wafers/year)
Capital efficiency
(WPD/$M)
+30% +30%
EPIK700
EPIK700
Footprint efficiency
(WPD/m2)
CoO per wafer
($/wafer)
-20% +54%
EPIK700
8
8
| Introducing TurboDisc EPIK700 GaN MOCVD System
EPIK700
Copyright ©2014 Veeco Instruments Inc.
TurboDisc EPIK700 MOCVD System September 4, 2014 1
| Introducing TurboDisc EPIK700 GaN MOCVD System
Brighter World. Better Future
EPIK700 Raises the Bar TO A NEW LEVEL of Productivity and Yield to Maximize Customers’ Profitability 2014 EPIK700 Extends Veeco’s Leadership
2011-2013 2010
MaxBright Becomes Market Leading MOCVD System
K465i Becomes Market Leading MOCVD System
•
Highest productivity MOCVD platform with up to 20% improved CoO
•
#1 selling MOCVD tool
•
Best in class yield
•
#1 selling MOCVD tool
•
Compact cluster architecture
•
•
Leader in yield and productivity
•
MaxBright is yield and productivity leader
Fastest to production with easy process transfer
•
Most efficient capital investment for maximum profitability
(Ref: IHS Research)
2
| Introducing TurboDisc EPIK700 GaN MOCVD System
EPIK700 to Drive LED Bulb Cost Roadmap Lower EPIK700
MaxBright
2010
•
Higher Capacity 31x4”, 12x6”
•
Improved CoO up to 20%
•
Best in class yield
•
Highest productivity
2012 DOE LED Bulb ASP Roadmap Actual LED Bulb ASP Trend
2015
2020
Note: Actual LED Bulb ASP may vary depending on customer use cases and region. 3
3
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
LED Industry’s Highest Productivity and Lowest Cost of Ownership MOCVD System
Highest productivity MOCVD platform with up to 20% improved CoO compared to previous generations Designed for best-in-class uniformity which provides greater wafer yield Fastest to production with easy process transfer Most efficient capital investment for maximum profitability
EPIK700 Significantly Lowers Customers’ Costs Per Wafer
4
4
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
EPIK700 Maximizes Productivity Key innovations:
Larger Capacity
EPIK700
31x4” 12x6” AcuRampTM Advanced Temperature Control
Improved Serviceability
Advanced Automation
MaxBright 5
5
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
Best-in-Class Uniformity with Key Innovations Key innovations: IsoFlangeTM Technology Improved flow uniformity
EPIK700
TruHeatTM Technology Improved temperature uniformity
MaxBright 6
6
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
Capacity Increase Improves Throughput Wafer carrier capacity increase
K465i/MaxBright
31x4”
14x4” 2008 - 2011
Throughput (WPM)
Capacity
EPIK700 122 %
K465i/MaxBright Chamber
2014
Veeco Reactor Generation Timeline
7
7
| Introducing TurboDisc EPIK700 GaN MOCVD System
Copyright ©2014 Veeco Instruments Inc.
EPIK700 Capacity
EPIK700 Difference – Up to 20% CoO Advantage Yielded throughput
(K wafers/year)
Capital efficiency
(WPD/$M)
+30% +30%
EPIK700
EPIK700
Footprint efficiency
(WPD/m2)
CoO per wafer
($/wafer)
-20% +54%
EPIK700
8
8
| Introducing TurboDisc EPIK700 GaN MOCVD System
EPIK700
Copyright ©2014 Veeco Instruments Inc.
