History of the Semiconductor Industry
Specialization in Microelectronics Coordinator: Contact details:
Micro_E Specialization
Prof. Hua Chun Zeng Email: [email protected] Tel: 6516-2896 Office: E5-02-21
1
Introduction The electronics industry in Singapore is divided into four main categories that are also its best prospects: -Semiconductors and Disk Drives -Electronic Modules and Components -Photovoltaic Devices (solar cells) -Electronic Manufacturing Services and Peripherals
Micro_E Specialization
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Background Singapore's achievements in the electronics industry, according to the Singapore Economic Development Board (EDB), include the following: • • • • •
10% global market share for semiconductor wafer foundry output Home to the world's top three wafer foundry companies Home to the world's top three sub-contract assembly-and-test companies Home to four of the world's top 10 fabless IC design companies 25% global market share for both printers and disk drives Singapore's eminence in the electronics industry is evident in the quantity and scope of facilities currently located in the country. It is home to over 14 semiconductor wafer fabrication plants (including two 300 mm fabrication plants), 20 assembly and test operations, and 40 IC design centres. However, many of the disk drive manufacturers have moved out to lower cost countries, leading to less assembly and testing activity in Singapore.
Micro_E Specialization
3
Situation (Chem. Eng.)
“Electronic materials processing by solid state chemistry and physics is heavily researched by US chemical engineers, but more so by chemists and physicists in the UK. In the US, whilst chemists and physicist do this research, they are focused on the phenomena rather than the applications and product design.”
A Report from IChemE (UK).
Micro_E Specialization
4
Specialization in Microelectronics • The specialisation is offered due to – the importance of the semiconductor industry to Singapore and the region. – the role of chemical/process engineering in the wafer fab and photovoltaic industry.
• The objectives of the specialisation : – to provide an orientation for chemical engineering students to the industry. – to enable application of the principles of chemical sciences and engineering to the manufacturing operations in the wafer fab and photovoltaic industry. – to provide the required background and skills to chemical engineers to enable them to contribute to the wafer fab and photovoltaic industry. Micro_E Specialization
5
Specialization in Microelectronics - Requirements • Coursework : – 4 elective courses relevant to microelectronics processing CN4216, CN4217, CN4223, & BN4404 • B. Eng. dissertation (final year project, FYP thesis) : – To be undertaken in an area of relevance to microelectronics processing (extension of UROP and IA projects, or normal or opening FYPs). For example, synthesis or processing of electronic materials.
Micro_E Specialization
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Elective Courses • CN4216 Electronic Materials Science Fundamental knowledge of electronic materials; a basic understanding in electrical, optical and magnetic properties of electronic materials in relation to their importance in the optoelectronic/semiconductor industry and their technological applications such as wafer devices, solid-state fuel cells, lithium secondary batteries, light-emitting diodes and solid-state lasers. In particular, semiconductors, electronic ceramics, conducting polymers and optical and magnetic materials will be introduced. • CN4217 Processing of Microelectronic Materials Overview of semiconductor processing with emphasis on the role of chemical engineering principles; overall view of manufacturing in the semiconductor industry and the role of chemical engineers; physics and materials aspects of solid-state devices; various processing events and applicable chemical engineering principles; process integration for device manufacture.
Micro_E Specialization
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Elective Courses • CN4223 Microelectronic Thin Films Working knowledge of thin film technology; role of chemical and engineering science in materials processing; basic concepts – kinetic theory, vacuum technology; thin film deposition techniques; diagnostics and characterisation; materials perspective on thin film phenomena. • BN4404 Bioelectromechanical Systems This module will provide students with background and basic knowledge of bioMEMS and introduce some useful techniques. Students will have a basic understanding of the principles, current state and prospects of bioMEMS and will be able to tackle simple problems in bioMEMS using what they have learned. The module will focus on major topics such as microfabrication technologies, micropatterning of biocompatible materials, microengineering of biomolecules, cells and tissues, biochips, biosensors, and the frontiers in bioMEMS.
Micro_E Specialization
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Schedule and other details • Schedule CN4216, CN4217: offered in the first semester of the academic year (August) CN4223, BN4404: offered in the second semester of the academic year (January) • Certificate for Specialization in Microelectronics The students will be awarded a certificate upon successful completion of the above 4 modules. • Global Foundries Book Prize The top students in the specialization programme are eligible for a book prize sponsored by Global Foundries. Micro_E Specialization
9
Specialist Manpower Programme • Sponsored by the Economic Development Board (EDB) of Singapore
• The SMP is a sponsorship programme for the 3rd and/or 4th year of the B.Eng. programme in a Wafer Fabrication specialisation, and is open to students from ECE, ME, and ChBE departments. Students taking up the sponsorship are bonded to work for the sponsoring company for 1 year. 120 sponsorships per year will be made available to NUS students. • Sponsored students (selected by the sponsoring companies) will receive a stipend of $540 per month during the 3rd and 4th year of study. • Upon graduation, the sponsored students are bonded to work with the company for 1 year.
Micro_E Specialization
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Hard Disc Drives
Singapore #1, 30% of world market share
Micro_E Specialization
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IBM U320 146GB Hard Drive
Micro_E Specialization
12
Micro_E Specialization
13
Micro_E Specialization
14
Electronic Materials
Micro_E Specialization
15
Light emitting diodes
Micro_E Specialization
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Light emitting diodes
Micro_E Specialization
17
Growth of silicon single crystals
Micro_E Specialization
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Solar cells
Micro_E Specialization
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Solar cells
PIONEER to capture the sun's power, Jones installed a 2,860-W, 323-sq-ft photovoltaic unit on the roof of his New Jersey home.
Micro_E Specialization
20
Solar cells
LOTS OF WATTS The world has installed more than 3,000 MW of photovoltaic-generated electricity. Shown here is one of the largest single installations, a 345-kW system covering three-quarters of an acre in solar panels and supplying electricity to the Georgia Institute of Technology aquatic center in Atlanta. Micro_E Specialization
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Micro_E Specialization
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Overview – chip fabrication – matters of size Singapore #3, 10% of world market share
Micro_E Specialization
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The semiconductor manufacturing process
Micro_E Specialization
24
The semiconductor manufacturing process
Example of a typical sequence of lithographic processing steps, illustrated for a positive resist.
Micro_E Specialization
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Chemical engineering in manufacture Unit process • crystal growth • cleaning/etching, oxidation • chemical vapour deposition • lithography • doping Micro_E Specialization
Chemical engineering concepts fluid mechanics, heat transfer crystallization, mass transfer kinetics, mass transfer kinetics, mass transfer, heat transfer adsorption/desorption, crystallization fluid mechanics, rheology, evaporation exposure kinetics, cleaning, etching solid-state diffusion 26
Chemical engineering in manufacture
e.g., Oxidation
oxidant
Substrate (Silicon)
oxide Micro_E Specialization
kinetics & mass transfer 27
Chemical engineering in manufacture Chemical Inputs to Semiconductor Mfg silicon HCl
acids inorganics solvents gases polymers metals
gases
silicon production crystal growth
wafer
wafer fab
plastics solvents
assembly test packaged ICs
the product is only as pure as the starting materials Micro_E Specialization
28
Chemical engineering in manufacture Support Functions • Purity of Chemicals • Water Quality • Contamination Control • Pollution Control • Recovery Systems
Micro_E Specialization
29
Chemical engineering in manufacture • Chemical/environmental/process engineers do have major roles to play in the microelectronics industry • Roles consist of applying skills in – facilities environment – manufacturing environment • Career in industry requires multi-disciplinary skills
Micro_E Specialization
30
What does a chemical engineer do? Concerns of the chemical engineer: Processes where materials undergo a required change in – composition – energy content – physical state ……with applications to useful ends Specifically, processes in which „core elements‟ of chemical engineering are important: – transport phenomena – equilibrium processes – rate processes Micro_E Specialization
31
What does a chemical engineer do? A chemical engineer is the one who • knows enough engineering to confuse the chemist • knows enough chemistry to confuse the draughtsman • knows enough mathematics to confuse the boss • knows enough electricity to confuse himself/herself • knows enough microelectronics to have more career opportunities, and …… i.e., is inherently trained for multidisciplinary work.
Micro_E Specialization
32
Micro_E Specialization
Prof. Hua Chun Zeng Email: [email protected] Tel: 6516-2896 Office: E5-02-21
1
Introduction The electronics industry in Singapore is divided into four main categories that are also its best prospects: -Semiconductors and Disk Drives -Electronic Modules and Components -Photovoltaic Devices (solar cells) -Electronic Manufacturing Services and Peripherals
Micro_E Specialization
2
Background Singapore's achievements in the electronics industry, according to the Singapore Economic Development Board (EDB), include the following: • • • • •
10% global market share for semiconductor wafer foundry output Home to the world's top three wafer foundry companies Home to the world's top three sub-contract assembly-and-test companies Home to four of the world's top 10 fabless IC design companies 25% global market share for both printers and disk drives Singapore's eminence in the electronics industry is evident in the quantity and scope of facilities currently located in the country. It is home to over 14 semiconductor wafer fabrication plants (including two 300 mm fabrication plants), 20 assembly and test operations, and 40 IC design centres. However, many of the disk drive manufacturers have moved out to lower cost countries, leading to less assembly and testing activity in Singapore.
Micro_E Specialization
3
Situation (Chem. Eng.)
“Electronic materials processing by solid state chemistry and physics is heavily researched by US chemical engineers, but more so by chemists and physicists in the UK. In the US, whilst chemists and physicist do this research, they are focused on the phenomena rather than the applications and product design.”
A Report from IChemE (UK).
Micro_E Specialization
4
Specialization in Microelectronics • The specialisation is offered due to – the importance of the semiconductor industry to Singapore and the region. – the role of chemical/process engineering in the wafer fab and photovoltaic industry.
• The objectives of the specialisation : – to provide an orientation for chemical engineering students to the industry. – to enable application of the principles of chemical sciences and engineering to the manufacturing operations in the wafer fab and photovoltaic industry. – to provide the required background and skills to chemical engineers to enable them to contribute to the wafer fab and photovoltaic industry. Micro_E Specialization
5
Specialization in Microelectronics - Requirements • Coursework : – 4 elective courses relevant to microelectronics processing CN4216, CN4217, CN4223, & BN4404 • B. Eng. dissertation (final year project, FYP thesis) : – To be undertaken in an area of relevance to microelectronics processing (extension of UROP and IA projects, or normal or opening FYPs). For example, synthesis or processing of electronic materials.
Micro_E Specialization
6
Elective Courses • CN4216 Electronic Materials Science Fundamental knowledge of electronic materials; a basic understanding in electrical, optical and magnetic properties of electronic materials in relation to their importance in the optoelectronic/semiconductor industry and their technological applications such as wafer devices, solid-state fuel cells, lithium secondary batteries, light-emitting diodes and solid-state lasers. In particular, semiconductors, electronic ceramics, conducting polymers and optical and magnetic materials will be introduced. • CN4217 Processing of Microelectronic Materials Overview of semiconductor processing with emphasis on the role of chemical engineering principles; overall view of manufacturing in the semiconductor industry and the role of chemical engineers; physics and materials aspects of solid-state devices; various processing events and applicable chemical engineering principles; process integration for device manufacture.
Micro_E Specialization
7
Elective Courses • CN4223 Microelectronic Thin Films Working knowledge of thin film technology; role of chemical and engineering science in materials processing; basic concepts – kinetic theory, vacuum technology; thin film deposition techniques; diagnostics and characterisation; materials perspective on thin film phenomena. • BN4404 Bioelectromechanical Systems This module will provide students with background and basic knowledge of bioMEMS and introduce some useful techniques. Students will have a basic understanding of the principles, current state and prospects of bioMEMS and will be able to tackle simple problems in bioMEMS using what they have learned. The module will focus on major topics such as microfabrication technologies, micropatterning of biocompatible materials, microengineering of biomolecules, cells and tissues, biochips, biosensors, and the frontiers in bioMEMS.
Micro_E Specialization
8
Schedule and other details • Schedule CN4216, CN4217: offered in the first semester of the academic year (August) CN4223, BN4404: offered in the second semester of the academic year (January) • Certificate for Specialization in Microelectronics The students will be awarded a certificate upon successful completion of the above 4 modules. • Global Foundries Book Prize The top students in the specialization programme are eligible for a book prize sponsored by Global Foundries. Micro_E Specialization
9
Specialist Manpower Programme • Sponsored by the Economic Development Board (EDB) of Singapore
• The SMP is a sponsorship programme for the 3rd and/or 4th year of the B.Eng. programme in a Wafer Fabrication specialisation, and is open to students from ECE, ME, and ChBE departments. Students taking up the sponsorship are bonded to work for the sponsoring company for 1 year. 120 sponsorships per year will be made available to NUS students. • Sponsored students (selected by the sponsoring companies) will receive a stipend of $540 per month during the 3rd and 4th year of study. • Upon graduation, the sponsored students are bonded to work with the company for 1 year.
Micro_E Specialization
10
Hard Disc Drives
Singapore #1, 30% of world market share
Micro_E Specialization
11
IBM U320 146GB Hard Drive
Micro_E Specialization
12
Micro_E Specialization
13
Micro_E Specialization
14
Electronic Materials
Micro_E Specialization
15
Light emitting diodes
Micro_E Specialization
16
Light emitting diodes
Micro_E Specialization
17
Growth of silicon single crystals
Micro_E Specialization
18
Solar cells
Micro_E Specialization
19
Solar cells
PIONEER to capture the sun's power, Jones installed a 2,860-W, 323-sq-ft photovoltaic unit on the roof of his New Jersey home.
Micro_E Specialization
20
Solar cells
LOTS OF WATTS The world has installed more than 3,000 MW of photovoltaic-generated electricity. Shown here is one of the largest single installations, a 345-kW system covering three-quarters of an acre in solar panels and supplying electricity to the Georgia Institute of Technology aquatic center in Atlanta. Micro_E Specialization
21
Micro_E Specialization
22
Overview – chip fabrication – matters of size Singapore #3, 10% of world market share
Micro_E Specialization
23
The semiconductor manufacturing process
Micro_E Specialization
24
The semiconductor manufacturing process
Example of a typical sequence of lithographic processing steps, illustrated for a positive resist.
Micro_E Specialization
25
Chemical engineering in manufacture Unit process • crystal growth • cleaning/etching, oxidation • chemical vapour deposition • lithography • doping Micro_E Specialization
Chemical engineering concepts fluid mechanics, heat transfer crystallization, mass transfer kinetics, mass transfer kinetics, mass transfer, heat transfer adsorption/desorption, crystallization fluid mechanics, rheology, evaporation exposure kinetics, cleaning, etching solid-state diffusion 26
Chemical engineering in manufacture
e.g., Oxidation
oxidant
Substrate (Silicon)
oxide Micro_E Specialization
kinetics & mass transfer 27
Chemical engineering in manufacture Chemical Inputs to Semiconductor Mfg silicon HCl
acids inorganics solvents gases polymers metals
gases
silicon production crystal growth
wafer
wafer fab
plastics solvents
assembly test packaged ICs
the product is only as pure as the starting materials Micro_E Specialization
28
Chemical engineering in manufacture Support Functions • Purity of Chemicals • Water Quality • Contamination Control • Pollution Control • Recovery Systems
Micro_E Specialization
29
Chemical engineering in manufacture • Chemical/environmental/process engineers do have major roles to play in the microelectronics industry • Roles consist of applying skills in – facilities environment – manufacturing environment • Career in industry requires multi-disciplinary skills
Micro_E Specialization
30
What does a chemical engineer do? Concerns of the chemical engineer: Processes where materials undergo a required change in – composition – energy content – physical state ……with applications to useful ends Specifically, processes in which „core elements‟ of chemical engineering are important: – transport phenomena – equilibrium processes – rate processes Micro_E Specialization
31
What does a chemical engineer do? A chemical engineer is the one who • knows enough engineering to confuse the chemist • knows enough chemistry to confuse the draughtsman • knows enough mathematics to confuse the boss • knows enough electricity to confuse himself/herself • knows enough microelectronics to have more career opportunities, and …… i.e., is inherently trained for multidisciplinary work.
Micro_E Specialization
32
