Laminated High-Aspect-Ratio Microstructures in a Conventional ...

Carnegie Mellon University

Research Showcase @ CMU Robotics Institute

School of Computer Science

1996

Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process Gary K. Fedder Carnegie Mellon University

S. Santhanam Carnegie Mellon University

M. L. Reed Carnegie Mellon University

S. C. Eagle Carnegie Mellon University

D. F. Guillou Carnegie Mellon University See next page for additional authors

Follow this and additional works at: http://repository.cmu.edu/robotics Part of the Robotics Commons Published In Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 13-18.

This Conference Proceeding is brought to you for free and open access by the School of Computer Science at Research Showcase @ CMU. It has been accepted for inclusion in Robotics Institute by an authorized administrator of Research Showcase @ CMU. For more information, please contact [email protected].

Authors

Gary K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M.S. C. Lu, and L. Richard Carley

This conference proceeding is available at Research Showcase @ CMU: http://repository.cmu.edu/robotics/306