Regulators - SMC

Regulators

Series

Page

AP500 AP1000 AP1500 AP1600 AP1900 AP1400T AP1200 AP1100 AP1700 AP2700 AP9000 & 9100 SL5200 SL5500 SL5400 SL5800 AZ1000 AZ1500 AZ1400T AZ1300 AZ1200 AZ9200 AZ1100

P.29 P.31 P.33 P.35 P.37 P.39 P.41 P.43 P.45 P.47 P.49

AK1000 AK1500 AK1400T AK1300 AK1200 AK9200 AK1700 BP1000

P.73 P.75 P.77 P.79 P.81 P.83 P.85 P.87

BP1000

P.89

For ultra high purity (UHP) Back Pressure Regulator

For air operated applications

Pneumatic Actuation Pressure Regulator: Low flow Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: Low flow Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: Low flow Pneumatic Actuation Pressure Regulator: Low flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: Intermediate flow (Tied-diaphragm) Pneumatic Actuation Pressure Regulator: High flow (Tied-diaphragm)

AP10PA AP15PA AP14PAT AP12PA AZ10PA AZ15PA AZ14PAT AZ12PA AK10PA AK15PA AK14PAT AK12PA

Pressure Gauges Regulators and Back Pressure Regulator/Specific Product Precautions

P.91 P.93 P.95 P.97 P.99 P.101 P.103 P.105 P.107 P.109 P.111 P.113 P.115 P.117 28

Diaphragm Valves BP AK AZ SL AP Regulators Check Valves

Single Stage Regulator: Low to intermediate flow Single Stage Regulator: Low flow (Tied-diaphragm) Single Stage Regulator: Intermediate flow (Tied-diaphragm) Single Stage Regulator: High flow Single Stage Regulator: High flow (Tied-diaphragm) Single Stage Regulator: High flow (Tied-diaphragm) Two Stage Regulator: Low flow (Tied-diaphragm) Back Pressure Regulator

Vacuum Generators

For general applications

Flow Switches

P.59 P.61 P.63 P.65 P.67 P.69 P.71

Technical Data/ Glossary of Terms

P.51 P.53 P.55 P.57

Precautions

Single Stage Compact Regulator Single Stage Regulator: Low to intermediate flow Single Stage Regulator: Low flow (Tied-diaphragm) Single Stage Regulator: Low to intermediate flow Single Stage Regulator: Low to intermediate flow (Tied-diaphragm) Single Stage Regulator: Intermediate flow (Tied-diaphragm) Single Stage Regulator: High flow (Tied-diaphragm) Single Stage Regulator: Delivery of sub-atmospheric pressure Two Stage Regulator: Low flow (Tied-diaphragm) Two Stage Regulator: Intermediate flow (Tied-diaphragm) Single Stage Regulator: Bulk gas delivery Single Stage Compact Regulator Single Stage Regulator: Low flow Single Stage Regulator: Intermediate flow Single Stage Regulator: Intermediate flow Single Stage Regulator: Low to intermediate flow Single Stage Regulator: Low flow (Tied-diaphragm) Single Stage Regulator: Intermediate flow (Tied-diaphragm) Single Stage Regulator: High flow Single Stage Regulator: High flow (Tied-diaphragm) Single Stage Regulator: High flow (Tied-diaphragm) Single Stage Regulator: Delivery of sub-atmospheric pressure

Recommendations

For ultra high purity (UHP)

Single Stage Compact Regulator for Ultra High Purity Series AP500 ¡For UHP gas delivery ¡Flow capacity Standard: to 15 slpm HF (option): to 30 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Sub-atmospheric pressure delivery option

RoHS

How to Order Port Number q

AP5 02 S

w

2PW FV4 FV4

e

Delivery pressure Code 01 02 06 10

Ports

Delivery pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa)

Code 2PW 3PWG

Range options *1) Code Specification No code Standard A Sub-atmospheric *1) Only available with AP501.

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS secondary Ni-Cr-Mo Ni-Co alloy 316L SS SH remelt alloy

Pressure gauge unit *3)

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Porting Configuration (Top view) q w

2PW

q

3PWG

qIN wOUT eGauge port (Outlet)

Specifications

Code Specification Cv No code Standard 0.06 FI Friction dampener *6) HF High flow *7) 0.1 *6) FI is friction dampener to slow response and reduce interaction with MFC. *7) VS material not available with HF option.

Seat material Code Material No code PCTFE (Standard) TF PTFE *4) VS Polyimide *5) *4) PTFE recommended for applications such as within a process tool. *5) Not available with SH material.

Gauge port (Outlete) Connections or Pressure gauge *2) psig/bar unit MPa unit No code No gauge port 1/4 inch face seal (Male) MV4 No FV4 pressure 1/4 inch face seal (Female) gauge TW4 1/4 inch tube weld V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa With pressure -30 in.Hg to 60 psig -0.1 to 0.4 MPa L gauge -30 in.Hg to 100 psig -0.1 to 0.7 MPa 1 *2) Refer to gauge guide (P.115) for gauge specifications. Code

e w

Option

Ports 2 ports 3 ports

Connections (Inletq, Outletw) Code FV4 MV4 TW4

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld

Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator.

AP501mmA AP501 AP502 AP506 AP510 100 mm Hg absolute to 10 psig 0.5 to 10 psig 0.5 to 30 psig 1 to 60 psig 1 to 100 psig Delivery pressure (-88 kPa to 0.07 MPa) (0.0034 to 0.07 MPa) (0.0034 to 0.2 MPa) (0.007 to 0.4 MPa) (0.007 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 150 psig (1.0 MPa) Proof pressure (Inlet) 500 psig (3.4 MPa) Burst pressure 1000 psig (6.9 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.06 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *2) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Supply pressure effect 0.2 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Installation Bottom mount Internal volume 0.15 in3 (2.4 cm3) Weight 0.45 kg *3) *1) Max. 90°C for Polyimide seat. *2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). *3) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

29

Single Stage Compact Regulator for Ultra High Purity

Series AP500

45°

1.12 (28.4)

5 (2

00 ) .4

1.

FV4 MV4 TW4

A

25

0.17

20

0.14

15

0.10

10

0.07

5

0.03 0

2

AP500HF

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

4 6 Flow rate (slpm, N2)

Inlet pressure:

0.00 10

8

75 psig (0.52 MPa) 30 psig (0.21 MPa)

45 psig (0.31 MPa)

35

0.24

30

0.21

25

0.17

20

0.14

15

0.10

10

0.07

5

0.03

0

0

10

20

30 40 50 60 Flow Rate (slpm, N2)

70

0.00 80

(mm)

AP501A

2.78

(70.6)

2.12

(53.8)

760 700

0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88

inch

Delivery pressure (mmHg abs)

Connections

0.21

Input pressure : 2 psig (14 kPa)

0 0

1

2

3 4 5 Flow rate (slpm, N2)

6

7

8

-101

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

30

Check Valves

A

30

0

Delivery pressure (psig)

Max. 3.32 (84.3)

ø0.82 (ø20.8)

0.44 (11.2)

ø1.00 (ø25.4)

0.24

Vacuum Generators

AP500

30 psig (0.21 MPa)

Delivery pressure (MPa)

inch (mm)

100 psig (0.69 MPa)

35

Delivery pressure (MPa)

Dimensions

AP500 Inlet pressure:

Derivery pressure (kPa)

Wetted Parts S SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm Ni-Co alloy Nozzle 316L SS Seat PTFE (Option: PCTFE, Polyimide) PTFE (Option: PCTFE)

Flow Switches

Flow Characteristics

Delivery pressure (psig)

Wetted Parts Material

Technical Data/ Glossary of Terms

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AP501mmA AP501 AP502 AP506 AP510 Cv 0.1 HF Supply pressure effect 0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop

Precautions

High flow

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

Single Stage Regulator for Ultra High Purity

Low to intermediate flow

Series AP1000 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

AP10 01 S

2PW FV4 FV4

Delivery pressure Code 01 02 06 10 15

Code FV4 MV4 TW4 FV6 MV6 TW6

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP secondary remelt SH Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo alloy alloy Ni-Cr-Mo alloy H alloy

Ports 2 ports 3 ports 4 ports

Porting Configuration q w

r

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Ports Code 2PW 3PW 4PW

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Gauge port (Inlete, Outletr)

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

w

e

Connections (Inletq, Outletw)

Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

r

w

e

q w

q

Sample Order Number 2PW

3PW

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

q

w e r

FV4 FV4 FV4 FV4 0 FV4 FV4 V3 MPA FV4 FV4 1 V3 MPA

Bonnet option Code Bonnet No code Standard P Panel installation *6) *6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Option Code Specification No code Standard (Cv: 0.09) HF High flow (Cv: 0.15)

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) TF PTFE *4) *5) *3) Not available with SHP, SH, H materials. *4) PTFE recommended for applications such as within a process tool. *5) Source pressure rating is limited to 300 psig (2.1 MPa) or less.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AP1002 AP1006 AP1010 AP1015 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1MPa) Vacuum to 3500 psig (24.1 MPa) *1) Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *3) Across the seat leak 4 x 10-9 Pa·m3/s *4) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *5) Supply pressure effect 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.25 kg *6) *1) Max. 300 psig (2.1 MPa) for PTFE seat. *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *5) On panel mount option, bonnet port is not threaded. *2) Max. 90°C for Polyimide seat. *6) Weight, including individual boxed weight, may vary depending on connections or options. *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). Operating Parameters

Delivery pressure

31

AP1001 1 to 10 psig (0.007 to 0.07 MPa)

Port AP1001S 2PW 3PW 3PW 4PW

r

Single Stage Regulator for Ultra High Purity Low to intermediate flow

Series AP1000

ø2.00 (ø50.8) A

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 400

0

AP1000

Inlet pressure:

(mm)

3.70

(94.0)

2.96

(75.2)

4.70 (119.4) 2.96

(75.2)

Delivery pressure (psig)

FV4 MV4 TW4 FV6 MV6 TW6

A

80 psig (0.55 MPa) 20 psig (0.14 MPa)

40

0.28

30

0.21

20

0.14

10

0.07

0

20

AP1000HF

inch

100 psig (0.69 MPa) 40 psig (0.28 MPa)

0.34

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

Connections

200 300 Flow rate (slpm, N2)

50

0

0.88 (22.4)

100

40 60 Flow rate (slpm, N2)

Inlet pressure:

100 psig (0.69 MPa) 30 psig (0.21 MPa)

0.00 80 50 psig (0.34 MPa)

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

20

40

0.00 60 80 100 120 140 160 180 200 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

32

Diaphragm Valves BP AK AZ SL AP Regulators

0.62

80

Delivery pressure (MPa)

90

Check Valves

0.69 (17.5)

ø2.25 (ø57.2)

0.69

Vacuum Generators

ø1.5 (ø38.1)

1000 psig (6.9 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

ø2.12 (ø53.8)

2000-3000 psig (13.8-20.7 MPa) 500 psig (3.4 MPa)

Delivery pressure (MPa)

AP1000

inch (mm)

Inlet pressure:

100

Delivery pressure (psig)

Dimensions

AP1000

Delivery pressure (psig)

Seat

S SHP SH H 316L SS secondary remelt Ni-Cr-Mo alloy Electropolish + Passivation Electropolish 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE PCTFE (Option: Polyimide, PTFE) (Option: PTFE)

Max. 5.6 (142)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle

Flow Switches

Flow Characteristics

Wetted Parts Material

Technical Data/ Glossary of Terms

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AP1001 AP1002 AP1006 AP1010 AP1015 Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Precautions

High flow

Recommendations

Option

Single Stage Regulator for Ultra High Purity

Low flow (Tied-diaphragm)

Series AP1500 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity: to 30 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Tied-diaphragm design

RoHS

How to Order Port Number q

AP15 02 S

w

2PW FV4 FV4

e

Delivery pressure Code 02 06 10 15

Bonnet option

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Connections (Inletq, Outletw) Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP secondary remelt SH Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo alloy alloy Ni-Cr-Mo alloy H alloy

Surface finish Ports Code 2PW 3PW 4PW

Ports 2 port 3 port 4 port

Porting Configuration r q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters Delivery pressure

Seat material Code

Material PCTFE No code (Standard) VS Polyimide *3) *3) Not available with SHP, SH, H materials.

Gauge port (Inlete, Outletr)

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Sample Order Number L -30 in.Hg to 60 psig -0.1 to 0.4 MPa Port q w e r 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa AP1510S 2PW FV4 FV4 H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 3PW FV4 FV4 0 3PW FV4 FV4 1 MPA 2 0 to 200 psig 0 to 1.4 MPa 4PW FV4 FV4 40 1 MPA 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

AP1502 1 to 30 psig (0.007 to 0.2 MPa)

AP1506 AP1510 AP1515 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 5000 psig (34.5 MPa) 10000 psig (69MPa) -40 to 71°C (No freezing) *1) 0.09 2 x 10-11 Pa·m3/s 2 x 10-10 Pa·m3/s *2) 4 x 10-9 Pa·m3/s *3) Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Face seal, Tube weld NPT 1/8 inch *4) 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.51 in3 (8.4 cm3) 1.27 kg *5)

Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Bonnet port Supply pressure effect Installation Internal volume Weight *1) Max. 90°C for Polyimide seat. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa).

33

Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Pressure gauge unit *2)

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

w

r

*4) On panel mount option, bonnet port is not threaded. *5) Weight, including individual boxed weight, may vary depending on connections or options.

Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm)

Series AP1500

SHP 316L SS secondary remelt Electropolish + Passivation

SH

316L SS 316L SS

H Ni-Cr-Mo alloy Electropolish

Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE

316L SS PCTFE (Option: Polyimide)

Dimensions

inch (mm)

AP1500

ø1.5 (ø38.1)

ø2.25 (ø57.2) IN

0.69 (17.5)

OUT

Max. 5.6 (142)

ø2.12 (ø53.8)

Diaphragm Valves BP AK AZ SL AP Regulators

S

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Recommendations

Wetted Parts Material

FV4 MV4 TW4 FV6 MV6 TW6

0.88 (22.4)

A inch

(mm)

3.70

(94.0)

2.96

(75.2)

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

4.70 (119.4) 2.96

(75.2)

Flow Characteristics

100

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 400

0

100

200 300 Flow rate (slpm, N2)

AP1500

Inlet pressure:

100 psig (0.69 MPa) 40 psig (0.28 MPa)

80 psig (0.55 MPa) 20 psig (0.14 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

20

40 60 Flow rate (slpm, N2)

0.00 80

Precautions

1000 psig (6.9 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

2000 to 3000 psig (13.8 to 20.7 MPa) 500 psig (3.4 MPa)

Delivery pressure (psig)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

AP1500

Flow Switches

Connections

Technical Data/ Glossary of Terms

A

Vacuum Generators

Check Valves

ø2.00 (ø50.8)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

34

Single Stage Regulator for Ultra High Purity

Low to intermediate flow

Series AP1600 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity: to 100 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

AP16 01 S

2PW FV4 FV4

Delivery pressure Code 01 02 06 10

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration r

r q w

e q

3PW

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Delivery pressure

AP1601 1 to 10 psig (0.007 to 0.07 MPa)

Gas Source pressure

Material PCTFE No code (Standard) VS Polyimide *3) *3) Not available with SH material.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) Pressure gauge unit *2) -30 in.Hg to 30 psig -0.1 to 0.2 MPa V3 Code Unit L -30 in.Hg to 60 psig -0.1 to 0.4 MPa No code psig/bar 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa MPA MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa *2) Pressure gauge unit MPa or 2 0 to 200 psig 0 to 1.4 MPa psig/bar selectable. However 40 0 to 4000 psig 0 to 28 MPa under Japanese regulation, *1) Refer to gauge guide (P.115) for gauge specifications. only MPa is available in Select a pressure gauge, which has a larger pressure Japan. range than the delivery pressure range of the regulator.

Sample Order Number

Operating Parameters

Seat material Code

Gauge port (Inlete, Outletr)

Surface finish

Bonnet option Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.43 inch (36.3 mm).

Code

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

2PW

r

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld

Material

q w

e

Connections (Inletq, Outletw)

Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa)

Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS secondary Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo SH remelt alloy alloy alloy

w

w

Vacuum to 100 psig (0.7 MPa)

Port AP1601S 2PW 3PW 3PW 4PW 4PW

q

w

FV4 FV4 FV4 FV4 FV4

FV4 FV4 FV4 FV4 FV4

e

r

1 0

0 V3 MPA V3 MPA 0

AP1602 AP1606 1 to 30 psig 2 to 60 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) Select compatible materials of construction for the gas

AP1610 2 to 100 psig (0.014 to 0.7 MPa)

Vacuum to 3500 psig (24.1 MPa)

Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.13 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *4) Supply pressure effect 0.25 psig (0.0017 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.82 in3 (13.5 cm3) Weight 1.54 kg *5) *1) Max. 90°C for Polyimide seat. *4) On panel mount option, bonnet port is not threaded. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Weight, including individual boxed weight, may vary depending on connections or options. *3) Tested with Helium gas inlet pressure 500 psig (3.5 MPa).

35

Single Stage Regulator for Ultra High Purity Low to intermediate flow

Series AP1600

S

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

AP1600

Max. 5.6 (142)

ø2.12 (ø53.8)

ø1.5 (ø38.1)

ø2.62 (ø66.5) IN

0.69 (17.5)

OUT

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

(mm)

4.30 (109.2) 3.46

(87.9)

5.22 (132.6) 4.00 (101.6)

Flow Characteristics

100

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 600

0

100

200 300 400 Flow rate (slpm, N2)

500

AP1600

Inlet pressure:

100 psig (0.69 MPa) 60 psig (0.41 MPa)

80 psig (0.55 MPa)

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

50 100 Flow rate (slpm, N2)

0.00 150

Precautions

1000 psig (0.69 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

2000 to 3000 psig (13.8 to 20.7 MPa) 500 psig (3.4 MPa)

Delivery pressure (psig)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

AP1600

Vacuum Generators

inch

Flow Switches

FV4 MV4 TW4 FV6 MV6 TW6

0.88 (22.4)

A

Technical Data/ Glossary of Terms

Connections

Check Valves

ø2.5 (ø63.5) A

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

36

Single Stage Regulator for Ultra High Purity

Low to intermediate flow (Tied-diaphragm)

Series AP1900 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Tied-diaphragm design

RoHS

How to Order Port Number q

AP19 01 S

2PW FV4 FV4

Delivery pressure Code 01 02 06 10 15

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld

Material

Gauge port (Inlete, Outletr)

Surface finish Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration r

2PW

r

Bonnet option Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia.1.43 inch (36.3 mm).

Option Code Specification No code Standard (Cv: 0.13) HF High flow (Cv: 0.16)

Pressure gauge *1) Seat material psig/bar unit MPa unit Code Material No code No gauge port No code PCTFE (Standard) No pressure gauge 0 VS Polyimide *3) (Connections: 1/4 inch face seal male) *3) Not available with SH V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa material. L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa Pressure gauge unit *2) H -30 in.Hg to 160 psig -0.1 to 1.1MPa Code Unit 2 0 to 200 psig 0 to 1.4 MPa No code psig/bar 40 0 to 4000 psig 0 to 28 MPa MPA MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, *2) Pressure gauge unit MPa or which has a larger pressure range than the delivery pressure range of the regulator. psig/bar selectable. However Sample Order Number under Japanese regulation, q w e r Port only MPa is available in AP1901S 2PW FV4 FV4 Japan. 3PW FV4 FV4 0 3PW FV4 FV4 V3 MPA 4PW FV4 FV4 40 V3 MPA 4PW FV4 FV4 0 0 Code

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

q w

e

Connections (Inletq, Outletw)

Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS secondary Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo SH remelt alloy alloy alloy

w

w

r

e

q w

3PW

q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

AP1902 AP1906 AP1910 AP1915 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.13 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *4) Supply pressure effect 0.25 psig (0.0017 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.82 in3 (13.5 cm3) Weight 1.54 kg *5) *1) Max. 90°C for Polyimide seat. *4) On panel mount option, bonnet port is not threaded. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Weight, including individual boxed weight, may vary depending on connections or options. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

Delivery pressure

37

AP1901 1 to 10 psig (0.007 to 0.07 MPa)

Single Stage Regulator for Ultra High Purity Low to intermediate flow (Tied-diaphragm)

Series AP1900

ø2.5 (ø63.5)

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 600

0

AP1900

A

Inlet pressure:

inch

(mm)

4.30 (109.2) 3.46

(87.9)

5.22 (132.6) 4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

Delivery pressure (psig)

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

80 psig (0.55 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

50 100 Flow rate (slpm, N2)

AP1900HF

A

100 psig (0.69 MPa) 60 psig (0.41 MPa)

500

0.41

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

Connections

200 300 400 Flow rate (slpm, N2)

60

0

0.88 (22.4)

100

Inlet pressure:

600 psig (4.1 MPa) 100 psig (0.69 MPa)

0.00 150 300 psig (2.1 MPa) 60 psig (0.41 MPa)

100

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 100 150 200 250 300 350 400 450 Flow rate (slpm, N2)

0

50

Delivery pressure (MPa)

100

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

38

Check Valves

IN 0.69 (17.5)

OUT

1000 psig (6.9 MPa) 200 psig (1.4 MPa)

Vacuum Generators

ø2.62 (ø66.5)

2000 to 3000 psig (13.8 to 20.7 MPa) 500 psig (3.4 MPa)

Delivery pressure (MPa)

ø1.5 (ø38.1)

Max. 5.6 (142)

ø2.12 (ø53.8)

Inlet pressure:

Delivery pressure (MPa)

AP1900

inch (mm)

Delivery pressure (psig)

Dimensions

AP1900

Delivery pressure (psig)

Wetted Parts S SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm 316L SS Ni-Cr-Mo alloy Nozzle 316L SS Ni-Cr-Mo alloy Seat PCTFE (Option: Polyimide) PCTFE

Flow Switches

Flow Characteristics

Wetted Parts Material

Technical Data/ Glossary of Terms

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AP1901 AP1902 AP1906 AP1910 AP1915 Cv 0.16 HF Supply pressure effect 0.6 psig (0.0042 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Precautions

High flow

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

Intermediate flow (Tied-diaphragm)

Single Stage Regulator for Ultra High Purity Series AP1400T

¡Sub-atmospheric ¡For UHP gas delivery ¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) pressure delivery option HR (option): Max. 3000 psig (20.7 MPa) ¡Tied-diaphragm design ¡Flow capacity: to 400 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals standard

RoHS

How to Order Port Number q

AP14 02 T S 02 06 10 15

Connections (Inletq, Outletw)

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS Ni-Cr-Mo Ni-Cr-Mo secondary Ni-Cr-Mo alloy alloy SH remelt alloy

Porting Configuration

Code Range No code Standard A Sub-atmospheric *1) Only available with AP1402T.

Ports

r w

q w

r w

2PW e

Gauge port (Inlete, Outletr)

Range options *1)

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

q

Code 2PW 3PW 4PW

r

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) Sub-atmospheric(A):100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Surface finish

e

2PW FV4 FV4

Delivery pressure Code

w

Ports 2 ports 3 ports 4 ports

3PW

Pressure gauge *2) Code psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa -30 in.Hg to 60 psig -0.1 to 0.4 MPa L -30 in.Hg to 100 psig -0.1 to 0.7 MPa 1 H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa 40 0 to 4000 psig 0 to 28 MPa *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator.

Sample Order Number

qIN

q wOUT

eGauge port (Inlet) 4PW rGauge port (Outlet)

Specifications

q

FV4 FV4 FV4 FV4 FV4

w

e r

FV4 FV4 FV4 FV4 40 FV4 0

0 1 MPA 1 MPA 0

Option Code No code

Specification Standard High inlet pressure (Max. inlet pressure HR 3000 psig (20.7 MPa)) *5) *5) Not available with AP1402T and AP1406T.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *4) *4) Not available with SH material.

Pressure gauge unit *3) Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AP1402T AP1406T AP1410T AP1415T 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa) (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Vacuum to 2300 psig(15.9 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.45 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3­/s *3) Across the seat leak 4 x 10-9 Pa·m3/s *4) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *5) Supply pressure effect 1.6 psig(0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.06 in3 (17.4 cm3) Weight 2.04 kg *6) *1) Source pressure above 1000 psig (6.9 MPa) decreases maximum *2) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). delivery pressure to less than 150 psig (1 MPa) due to supply *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). pressure effect. When the source pressure is 2300 psig (15.9 *5) On panel mount option, bonnet port is not threaded. MPa), achievable delivery pressure is around 129 psig (0.89 *6) Weight, including individual boxed weight, may vary depending on connections or options. MPa). Operating Parameters

Delivery pressure

39

AP1402TmmA 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa)

Port AP1410T 2PW 3PW 3PW 4PW 4PW

Bonnet option Code Bonnet No code Standard P Panel installation *6) SC Short type *7) *6) Panel mounting hole: 1.56 inch (39.6 mm). *7) Bonnet port is not threaded. SC option not available with 1402TA option.

Single Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm)

Series AP1400T

0.69 (17.5)

ø2.62 (ø66.5)

øA

B

inch

(mm)

2.00

(50.8)

inch (mm) 3.70 (94.0) 4.00 (101.6) 3.46 (87.9) 5.22 (132.6)

2.50

(63.5)

0.21

20

0.14

10

0.07

4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

0

40

80 120 Flow rate (slpm, N2)

Inlet pressure:

0.00 200

160

2000 psig (13.8 MPa) 200 psig (1.4 MPa)

600 psig (4.1 MPa)

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

100

200

300 400 500 600 Flow rate (slpm, N2)

700

0.00 800

Inlet pressure: 0 psig (0 kPa)

760 700

0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88

0

0

1

Delivery pressure (MPa)

30

AP1402TA Delivery pressure (mm Hg abs)

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

0.28

0 2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

A

40

AP1400T

B

Connections

0.35

0

0.88 (22.4)

60 psig (0.41 MPa)

2

3

4 5 6 7 Flow rate (slpm, N2)

8

9

-101 10

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

40

Check Valves

ø1.5 (ø38.1)

Max. 6.0 (152) Max. 5.6 (142) (When selecting the option code SC)

ø2.12 (ø53.8)

80 psig (0.55 MPa)

Delivery pressure (MPa)

AP1400T

Inlet pressure:

50

Delivery pressure (kPa)

inch (mm)

Delivery pressure (psig)

Dimensions

AP1400T

Delivery pressure (psig)

Wetted Parts S SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet Ni-Cr-Mo alloy Diaphragm Ni-Cr-Mo alloy Nozzle 316L SS Ni-Cr-Mo alloy Seat PCTFE (Option: Polyimide) PCTFE

Vacuum Generators

Flow Characteristics

Wetted Parts Material

Flow Switches

AP1410T AP1415T Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

Technical Data/ Glossary of Terms

Changes from the standard type are: Option Other Parameters Source pressure HR Proof pressure (Inlet) Burst pressure

Precautions

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

Single Stage Regulator for Ultra High Purity

High flow (Tied-diaphragm)

Series AP1200 ¡For UHP gas delivery ¡Body material: 316L SS ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) secondary remelt HR (option): Max. 3000 psig (20.7 MPa) ¡Ni-Cr-Mo alloy internals available for corrosion ¡Flow capacity Standard: to 800 slpm HF (option): to 1000 slpm resistance FC (option): to 1500 slpm ¡Tied-diaphragm design

RoHS

How to Order Port Number q

AP12 02 S

w

2PW FV8 FV8

e

r

Delivery pressure Code 02 06 10 15 25

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig (1.7 MPa)

Connections (Inletq, Outletw)

Material

Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS SHP Ni-Cr-Mo secondary Ni-Cr-Mo alloy Ni-Cr-Mo remelt alloy SH alloy

Surface finish

Ports

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld FV12 3/4 inch face seal (Female) *1) MV12 3/4 inch face seal (Male) *1) TW12 3/4 inch tube weld *1) Prepare a suitable mating fitting with a rated pressure.

Porting Configuration

Pressure gauge unit *3)

Bonnet option Code No code

Bonnet Standard P Panel installation *7) Short type *8) SC *7) Panel mounting hole: dia. 1.56 inch (39.6 mm). *8) Bonnet port is not threaded. SC option not available with FC or HR option.

Option Code No code

HF FC HR

Specification Standard (Cv: 0.65) High flow (Cv: 1.1) Force compensation (Cv: 0.65) *5)*6) High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) *5)

Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

*5) FC and HR options are not available with AP1202, AP1206 and AP1225. *6) FC option is available with connection size 1/2 or 3/4 inch.

AP1202 AP1206 AP1210 AP1215 AP1225 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) (1.7 MPa) *2) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1700 psig (11.7 MPa) Proof pressure (Inlet) 2550 psig (17.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *3) Cv 0.65 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *4) Across the seat leak 4 x 10-9 Pa·m3/s *5) Ra max 15 min. (0.4 mm) Surface finish Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *6) 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) Supply pressure effect source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.07 in3 (17.6 cm3) Weight 2.0 kg *7)

*1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). *2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. *3) Max. 90°C for Polyimide seat. *4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *6) On panel mount option, bonnet port is not threaded. *7) Weight, including individual boxed weight, may vary depending on connections or options.

r w

q w

2PW r w

Gauge port (Inlete, Outletr) q

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters

Delivery pressure

41

Pressure gauge *2) psig/bar unit MPa unit No code No gauge port Seat material No pressure gauge 0 Code Material (Connections: 1/4 inch face seal male) Sample Order Number No code PCTFE (Standard) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Port q w e r VS Polyimide *4) L -30 in.Hg to 60 psig -0.1 to 0.4 MPa AP1210S 2PW FV8 FV8 *4) Not available with SHP 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 3PW FV8 FV8 0 and SH materials. H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 3PW FV8 FV8 1 MPA 4PW FV8 FV8 40 1 MPA 2 0 to 200 psig 0 to 1.4 MPa 4PW FV8 FV8 0 0 40 0 to 4000 psig 0 to 28 MPa *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Single Stage Regulator for Ultra High Purity

Series AP1200

High flow (Tied-diaphragm)

Options

Changes from the standard type are: AP1210 AP1215 Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

Dimensions

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

inch (mm)

A Connections inch (mm) inch FV4 3.70 MV4 2.00 (50.8) 4.00 TW4 3.46 FV6 5.22 MV6 TW6 4.00 FV8 5.22 MV8 2.50 (63.5) TW8 4.34 FV12 6.26 MV12 TW12 5.00

B (mm) (94.0) (101.6) (87.9) (132.6) (101.6) (132.6) (110.2) (159.0) (127.0)

Delivery pressure (psig)

0.88 (22.4)

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

150 psig (1.0 MPa) 50 psig (0.35 MPa)

100 psig (0.69 MPa) 0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0.00 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2)

AP1200FC

B

Inlet pressure:

0.00 800

120

0

øA

400 600 Flow rate (slpm, N2)

Inlet pressure:150 psig (1.0 MPa) 3/4 inch connections *)

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

Precautions

ø2.62 (ø66.5)

200

AP1200HF

Delivery pressure (psig)

ø1.5 (ø38.1)

Max. 6.0 (152) Max. 6.5 (165) (When selecting the option code FC) Max. 5.6 (142) (When selecting the option code SC)

ø2.12 (ø53.8)

0

Delivery pressure (MPa)

0

0.69 (17.5)

AP1200

80 psig (0.55 MPa) 60 psig (0.41 MPa) 1/2 inch connections *)

Delivery pressure (MPa)

Option Other Parameters Source pressure HR Proof pressure (Inlet) Burst pressure

Inlet pressure:

Diaphragm Valves BP AK AZ SL AP Regulators

3. High inlet pressure

AP1200

Check Valves

Option Other Parameters AP1210 AP1215 Source pressure Vacuum to 300 psig (2.1 MPa) Cv 0.65 FC Supply pressure 4.2 psig (0.029 MPa) rise in delivery pressure effect per 100 psig (0.7 MPa) source pressure drop Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld

Flow Characteristics

Vacuum Generators

Force compensation feature added to HF option and has wider flow capacity than HF option. Changes from the standard type are:

Flow Switches

2. Force compensation

Technical Data/ Glossary of Terms

Option Other Parameters AP1202 AP1206 AP1210 AP1215 AP1225 Cv 1.1 HF Supply pressure 4.2 psig (0.029 MPa) rise in delivery pressure effect per 100 psig (0.7 MPa) source pressure drop

Wetted Parts S SHP SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm Ni-Cr-Mo alloy Nozzle 316L SS Ni-Cr-Mo alloy Seat PCTFE (Option: Polyimide) PCTFE

Delivery pressure (MPa)

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are:

Delivery pressure (psig)

1. High flow

Recommendations

Wetted Parts Material

0.00 200 400 600 800 1000 1200 1400 1600 1800 2000 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

42

Single Stage Regulator for Ultra High Purity

Delivery of sub-atmospheric pressure

Series AP1100 ¡For UHP gas delivery ¡Sub-atmospheric to low positive pressure delivery ¡Flow capacity: to 0.5 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

AP11 01 S

w

2PW FV4 FV4

Delivery pressure

Code No code

Bonnet Standard Panel installation *4) P *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP secondary remelt SH Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo alloy alloy Ni-Cr-Mo alloy H alloy

Seat material Code Material No code PCTFE (Standard) TF PTFE *3) *3) PTFE recommended for applications such as within a process tool. Pressure gauge unit *2)

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Porting Configuration w

2PW r w

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Connections (Inletq, Outletw)

q w

q 3PW

e

Code FV4 MV4 TW4 FV6 MV6 TW6

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

q Sample Order Number 4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

r

Bonnet option

Code Delivery pressure 01 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa)

r

e

Port AP1101S 2PW 3PW 3PW 4PW 4PW

q

FV4 FV4 FV4 FV4 FV4

w

e r

FV4 FV4 0 FV4 V3 MPA FV4 V3 V3 MPA FV4 0 0

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa *1) Other range available. Refer to gauge guide (P.115). Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters AP1101 Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 500 psig (3.4 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) Cv 0.05 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *1) Across the seat leak 4 x 10-9 Pa·m3/s *1) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *2) Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.25 kg *3) *1) Tested with Helium gas inlet pressure 300 psig (2.1 MPa). *3) Weight, including individual boxed weight, may vary depending on *2) On panel mount option, bonnet port is not threaded. connections or options.

43

Single Stage Regulator for Ultra High Purity Delivery of sub-atmospheric pressure

Series AP1100

SHP 316L SS secondary remelt Electropolish + Passivation

316L SS 316L SS

SH

H Ni-Cr-Mo alloy Electropolish

Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: PTFE)

316L SS

Dimensions

inch (mm)

AP1100

ø1.5 (ø38.1)

0.69 (17.5)

ø2.25 (ø57.2)

Max. 5.6 (142)

ø2.12 (ø53.8)

Check Valves

ø2.00 (ø50.8) A

FV4 MV4 TW4 FV6 MV6 TW6

A inch

(mm)

3.70

(94.0)

2.96

(75.2)

0.88 (22.4) 2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

Vacuum Generators

Connections

4.70 (119.4) 2.96

(75.2)

Flow Characteristics 0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88 0

1 2 Flow rate (slpm, N2)

3

-101

Precautions

0

Technical Data/ Glossary of Terms

760 700

Flow Switches

Inlet pressure: 2 psig (14 kPa)

Delivery pressure (kPa)

Delivery pressure (mm Hg abs)

AP1100

Diaphragm Valves BP AK AZ SL AP Regulators

S

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

44

Two Stage Regulator for Ultra High Purity

Low flow (Tied-diaphragm)

Series AP1700 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Minimizes supply pressure effect by two stage regulation ¡Tied-diaphragm design

RoHS

How to Order Port Number q

AP17 02 S

2PW FV4 FV4

Delivery pressure

Code FV4 MV4 TW4 FV6 MV6 TW6

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS secondary Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo SH remelt alloy alloy alloy

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Ports

w

e

q w

2PW

q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

r

Code 2PW 4PW

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Gauge port (Inlete, Outletr)

Surface finish

r

e

Connections (Inletq, Outletw)

Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 2 to 60 psig (0.014 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa)

Porting Configuration

w

Ports 2 ports 4 ports

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Sample Order Number Port AP1702S 2PW 4PW 4PW

q

w

e

FV4 FV4 FV4 FV4 0 FV4 FV4 40

Bonnet option Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia.1.56 inch (39.6 mm).

Seat material Code

Material PCTFE (Standard) VS Polyimide *3) *3) Not available with SH material. No code

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

r

0 V3 MPA

AP1702 AP1706 AP1710 1 to 30 psig 2 to 60 psig 2 to 100 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) First stage pressure 175 psig (1.2 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.05 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *4) Supply pressure effect 0.05 psig (0.00035 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Option: panel mount Internal volume 0.92 in3 (15.1 cm3) Weight 2.04 kg *5) *1) Max. 90°C for Polyimide seat. *4) On panel mount option, bonnet port is not threaded. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Weight, including individual boxed weight, may vary depending on connections or options. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

Delivery pressure

45

Two Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm)

Series AP1700

S

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

AP1700

ø2.12 (ø53.8)

(mm)

3.70

(94.0)

2.96

(75.2)

4.70 (119.4) 2.96

Check Valves

FV4 MV4 TW4 FV6 MV6 TW6

A inch

ø2.25 (ø57.2)

Vacuum Generators

Connections

IN

2.36 (60)

OUT

Max. 7.5 (190.5)

ø1.5 (ø38.1)

A

(75.2)

Flow Characteristics

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 200

0

50

100 150 Flow rate (slpm, N2)

Technical Data/ Glossary of Terms

0.69

90

Precautions

100

Flow Switches

Inlet pressure: 200 to 3000 psig (1.4 to 20.7 MPa)

Delivery pressure (MPa)

Delivery pressure (psig)

AP1700

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

46

Two Stage Regulator for Ultra High Purity

Intermediate flow (Tied-diaphragm)

Series AP2700 ¡For UHP gas delivery ¡Tied-diaphragm design ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity to 150 slpm (NF3) to 900 slpm (H2) ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Minimizes supply pressure effect by two stage regulation

RoHS

How to Order Port Number q

AP27 02 S

w

2PW FV4 FV4

e

r

Delivery pressure Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 2 to 60 psig (0.014 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa) 12 3 to 120 psig (0.021 to 0.8 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 TW4 FV6 MV6 TW6

Material Code

Body Poppet 316L SS S 316L SS secondary remelt SH Ni-Cr-Mo alloy

Diaphragm Nozzle 316L SS/ 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy

Ports

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Porting Configuration w

q

w

2PW r w

e q

r

4PW

3PWQ

q MP

Ports 2 ports 3 ports 3PWQ (1 pressure monitor port (MP)) 4PW 4 ports 5 ports 5PWQ (1 pressure monitor port (MP))

5PWQ

qIN wOUT eGauge port (Inlet) rGauge port (Outlet) MP=Monitoring gauge port

Bonnet option Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code

Material PCTFE No code (Standard) VS Polyimide *3) *3) Not available with SH material.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) -30 in.Hg to 30 psig -0.1 to 0.2 MPa V3 Sample Order Number -30 in.Hg to 60 psig -0.1 to 0.4 MPa L e r Port 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa AP2702S 2PW FV4 FV4 -30 in.Hg to 160 psig -0.1 to 1.1 MPa H 3PWQ FV4 FV4 4PW FV4 FV4 40 V3 MPA 2 0 to 200 psig 0 to 1.4 MPa 5PWQ FV4 FV4 40 V3 MPA 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

e

w

Code 2PW

Gauge port (Inlete, Outletr)

q

MP

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Specifications AP2706 AP2710 AP2712 2 to 60 psig 2 to 100 psig 3 to 120 psig Delivery pressure (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.021 to 0.8 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) First stage pressure 200 psig (1.4 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.105 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *4) Supply pressure effect 0.01 psig (0.00007 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Option: panel mount Internal volume 1.87 in3 (30.6 cm3) Weight 2.27 kg *5) *1) Max. 90°C for Polyimide seat. *4) On panel mount option, bonnet port is not threaded. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Weight, including individual boxed weight, may vary depending on connections or options. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

47

AP2702 1 to 30 psig (0.007 to 0.2 MPa)

Two Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm)

Series AP2700

S

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS/Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

AP2700

ø2.12 (ø53.8)

ø1.5 (ø38.1)

Check Valves

A inch

(mm)

4.30 (109.2) 3.46

(87.9)

Vacuum Generators

FV4 MV4 TW4 FV6 MV6 TW6

4.93 ±0.05 (125.2 ±1.3)

Connections

Max. 10.95 (278.1)

HP

1.54 ±0.04 (39.1 ±1)

LP

2.92 ±0.04 (74.2 ±1)

ø2.62 (ø66.5)

2.56 ±0.04 (65.0 ±1)

ø1.87 (ø47.5)

5.22 (132.6) A

4.00 (101.6)

Flow Characteristics

80

0.55

60

0.41

40

0.28

20

0.14

0

50

100 150 200 250 Flow rate (slpm, N2)

300

0.00 350

Precautions

0

Technical Data/ Glossary of Terms

0.69

Flow Switches

Inlet pressure: greater than 150 psig (1.0 MPa)

100

Delivery pressure (MPa)

Delivery pressure (psig)

AP2700

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

48

Single Stage Regulator for Ultra High Purity Series AP9000

Bulk gas delivery

& 9100

¡For UHP gas delivery ¡Inlet pressure AP9000: Max. 1700 psig (11.7 MPa) AP9100: Max. 800 psig (5.5 MPa) ¡Flow capacity AP9000: to 2000 slpm AP9100: to 5000 slpm ¡Body material: 316L SS ¡Tied-diaphragm design

RoHS

How to Order Port Number

AP9 0 10 S

q

w

2PW FV16 FV16

e

Size Code 0 1

Seat material

Cv 3 4

Code Material No code PCTFE (Standard) VS Polyimide

Delivery pressure

Pressure gauge unit *2)

Size 0 1 10 5 to 100 psig (0.034 to 0.7 MPa) V V 15 5 to 150 psig (0.034 to 1.0 MPa) V 30 Preset to 300 psig (2.1 MPa) V

Code

Delivery pressure

Ports Code 2PW 3PW

Material Code S

Material 316L SS

Code FV8 MV8 TW8 FV12 MV12 TW12 FV16 MV16 TW16

Code Surface finish Ra max No code 15 min. (0.4 mm) M 10 min. (0.25 mm)

Porting Configuration e w

Ports 2 ports 3 ports

Connections (Inletq, Outletw)

Surface finish

q w

q

Connections 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld 1 inch face seal (Female) 1 inch face seal (Male) 1 inch tube weld

Sample Order Number 2PW

w e Port q AP9010S 2PW FV16 FV16 3PW FV16 FV16 H MPA

3PW

qIN wOUT eGauge port (Outlet)

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Gauge ports (Outlete)

Pressure gauge*1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 4 0 to 400 psig 0 to 3 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Bonnet port

AP9010

AP9030

AP9110

5 to 100 psig (0.034 to 0.7 MPa)

Preset to 300 psig (2.1 MPa) *1)

5 to 100 psig (0.034 to 0.7 MPa)

AP9115 5 to 150 psig (0.034 to 1.0 MPa) (Source pressure 250 psig or less)∗5)

Select compatible materials of construction for the gas Vacuum to 1700 psig (11.7 MPa) Vacuum to 800 psig (5.5 MPa) 2550 psig (17.6 MPa) 6800 psig (46.9 MPa) -40 to 71°C (No freezing) *2) 3.0 4.0 2 x 10-11 Pa·m3/s 2 x 10-10 Pa·m3/s *3) 4 x 10-9 Pa·m3/s *3) Ra max 15 min (0.4 mm) or 10 min (0.25 mm) Face seal, Tube weld NPT 1/8 inch 3.7 psig (0.026 MPa) rise in delivery pressure per 5.4 psig (0.038 MPa) rise in delivery pressure per Supply pressure effect 100 psig (0.7 MPa) source pressure drop 100 psig (0.7 MPa) source pressure drop Internal volume 12 in3 (197 cm3) Weight 5.9 kg *4) *1) At 800 psig (5.5 MPa) inlet pressure. Optional preset pressure available. Please contact SMC. *2) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 300 psig (2.1 MPa). *4) Weight, including individual boxed weight, may vary depending on connections or options. ∗5) Source pressure above 250 psig (1.7 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When the source pressure is 800 psig (5.5 MPa), achievable delivery pressure is around 119 psig (0.82 MPa ).

49

AP9000 & 9100

3.5 (89)

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

ø0.75 (ø19)

5.76 (146.3)

Delivery pressure (psig)

Max. 11.2 (284.5) A

2 x 1/4-20 UNC depth 0.35 (8.9) (Mounting hole)

A inch

(mm)

3.11

(79.0)

4.75 (120.7) 3.64

(92.5)

Delivery pressure (psig)

1.5 (38.1)

600 psig (4.1 MPa) 2.1

250

1.7

200

1.4

150

1.0

100

0.7

50

0.3

0

AP9110 A

Inlet pressure:

300

0

1.13 (28.7)

HP

ø3.5 (ø88.9)

0.0 200 400 600 800 1000 1200 1400 1600 1800 2000 Flow rate (slpm, N2) Inlet pressure:

150 psig (1.0 MPa)

75 psig (0.52 MPa)

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

0.00 500 1000 1500 2000 2500 3000 3500 4000 4500 5000 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

4.75 (120.7) 3.92

(99.6)

4.75 (120.7)

Precautions

FV8 MV8 TW8 FV12 MV12 TW12 FV16 MV16 TW16

0.00 200 400 600 800 1000 1200 1400 1600 1800 2000 Flow rate (slpm, N2)

AP9030

LP

Connections

0

Recommendations

90

0

ø4.00 (ø101.6)

300 psig (2.1 MPa) 75 psig (0.52 MPa)

Diaphragm Valves BP AK AZ SL AP Regulators

inch (mm)

1000 psig (6.9 MPa) 200 psig (1.4 MPa)

Check Valves

Dimensions

Inlet pressure:

Vacuum Generators

AP9010

Flow Switches

Wetted Parts S Body 316L SS Surface finish Electropolish + Passivation Poppet Ni-Cr-Mo alloy Bellows Ni-Cr-Mo alloy Nozzle 316L SS Seat PCTFE (Option: Polyimide) Poppet spring Ni-Co alloy Bonnet seal Nickel 200 *) (Silver plated) *) 316 SS silver plated for AP9030

Technical Data/ Glossary of Terms

Flow Characteristics

Delivery pressure (psig)

Wetted Parts Material

& 9100

Delivery pressure (MPa)

Series AP9000

Delivery pressure (MPa)

Bulk gas delivery

Delivery pressure (MPa)

Single Stage Regulator for Ultra High Purity

50

Single Stage Compact Regulator for Ultra High Purity Series SL5200 ¡For UHP gas delivery ¡Flow capacity Standard: to 30 slpm HF (option): to 130 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Sub-atmospheric pressure delivery option ¡Springless design (No poppet spring in the wetted area)

RoHS

How to Order Port Number q

SL52 02 S M

2PW FV4 FV4

Delivery pressure Code 01 02 06 10

Delivery pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa)

Material Code Body Poppet Diaphragm S 316L SS 316L SS 316L SS SH secondary remelt Ni-Cr-Mo alloy

Surface finish Code

M V X

Surface finish Ra max 10 min. (0.25 mm) Standard 7 μin. (0.18 mm) 5 μin. (0.13 mm)

Porting Configuration w

q

w

2PW

qIN wOUT eGauge port(Outlet)

Specifications

Range options *1)

q 3PW

e

Option

Ports Code 2PW 3PW

Code Specification No code Standard A Sub-atmospheric *1) Only available with SL5201.

Ports 2 ports 3 ports

Connections (Inletq, Outletw) Code

FV4 MV4 TW4 FV6 MV6 TW6

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Code Specification No code Standard High flow HF

Seat material Code

Material No code PCTFE (Standard) VS Polyimide *4) *4) Not available with SH material.

Pressure gauge unit *3)

Gauge port (Outlete) gauge *2)

Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Connections or Pressure psig/bar unit MPa unit No code No gauge port 1/4 inch face seal (Male) 0 No pressure gauge FV4 1/4 inch face seal (Female) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa With pressure -30 in.Hg to 60 psig -0.1 to 0.4 MPa L gauge -30 in.Hg to 100 psig -0.1 to 0.7 MPa 1 *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

e

w

SL5201mmA SL5201 SL5202 SL5206 SL5210 100 mm Hg absolute to 10 psig 0.5 to 10 psig 0.5 to 30 psig 1 to 60 psig 1 to 100 psig Delivery pressure (-88 kPa to 0.07 MPa) (0.0034 to 0.07 MPa) (0.0034 to 0.2 MPa) (0.007 to 0.4 MPa) (0.007 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 150 psig (1.0 MPa) Proof pressure (Inlet) 500 psig (3.4 MPa) Burst pressure 1000 psig (6.9 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.07 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *2) Surface finish Ra max 10 min. (0.25 mm) Option: 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Supply pressure effect 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Installation Bottom mount Internal volume 0.19 in3 (3.1 cm3) Weight 0.45 kg *3) *1) Max. 90°C for Polyimide seat. *3) Weight, including individual boxed weight, may vary depending on *2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). connections or options. Operating Parameters

Option High flow Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters SL5201mmA SL5201 SL5202 SL5206 SL5210 HF Supply pressure effect 0.50 psig (0.0035 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop

51

Single Stage Compact Regulator for Ultra High Purity

Series SL5200

inch (mm) ø0.97 (ø24.6)

SL5200

0.44 (11.2)

ø1.42 (ø36.1)

ø1.25 (ø31.8) A

A

(98.0)

2.65

(67.3) 0 1. .4) 5 (2

Flow Characteristics Inlet pressure:

Delivery pressure (psig)

SL5210HF 70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0.00 140

0

SL5210 Delivery pressure (psig)

100 psig (0.69 MPa) inlet 50 psig (0.34 MPa) inlet

20

40

60 80 100 Flow rate (slpm, N2)

Inlet pressure:

100 psig (0.69 MPa) 30 psig (0.21 MPa)

120

0.28

35

0.24

30

0.21

25

0.17

20

0.14

15

0.10

10

0.07

5

0.03 0

5

10

15 20 25 30 35 Flow rate (slpm, N2)

760 700

0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88

0

0

1

2

3

4 5 6 7 Flow rate (slpm, N2)

8

9

-101 10

60 psig (0.41 MPa)

40

0

Inlet pressure: 2 psig (14 kPa) High flow option Standard

SL5201A

40

45

Technical Data/ Glossary of Terms

3.86

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Precautions

(53.8)

Delivery pressure (kPa)

2.12

Delivery pressure (Hg abs)

(mm) (70.6)

Delivery pressure (MPa)

inch 2.78

4 5°

FV4 MV4 TW4 FV6 MV6 TW6

Delivery pressure (MPa)

Connections

Max. 3.95 (100.3)

ø1.18 (ø30)

Check Valves

Dimensions

Vacuum Generators

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS PCTFE (Option: Polyimide) PCTFE

Flow Switches

S

Wetted Parts Body Surface finish Poppet Diaphragm Seat

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

0.00 50

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

52

Single Stage Regulator for Ultra High Purity

Low flow

Series SL5500 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity to 30 slpm ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Sub-atmospheric pressure delivery option ¡Springless design (No poppet spring in the wetted area)

RoHS

How to Order Port Number q

SL55 02 S M

w

2PW FV4 FV4

e

r

Delivery pressure Code

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) Sub-atmospheric (A): 02 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 06 1 to 60 psig (0.007 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa)

Connections (Inletq, Outletw) Code

FV4 MV4 TW4 FV6 MV6 TW6

Material Code S SH

Body 316L SS secondary remelt

Poppet 316L SS Ni-Cr-Mo alloy

Diaphragm 316L SS Ni-Cr-Mo alloy

Surface finish Code M V X

Gauge port (Inlete, Outletr)

Porting Configuration

Code Specification No code Standard A Sub-atmospheric *1) Only available with SL5502.

Ports

r w

q

w

2PW r w

q 3PW

Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Sample Order Number

e q 4PW

Specifications

Pressure gauge *2) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Range options *1)

Surface finish Ra max 10 min. (0.25 mm) Standard 7 min. (0.18 mm) 5 min. (0.13 mm)

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Port SL55 ∗ ∗ ∗ ∗ 2PW 3PW 3PW 4PW 4PW

∗ ∗ ∗ ∗ ∗

Bonnet option Code Bonnet No code Standard P Panel installation *5) *5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code

Material PCTFE (Standard) VS Polyimide *4) *4) Not available with SH material. No code

Pressure gauge unit *3) Code No code

Unit psig/bar MPa MPA *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

e r

∗ 0 ∗ 1 MPA ∗ ∗ 0 0 ∗ 40 1 MPA

SL5502mmA SL5502 SL5506 SL5510 100 mm Hg absolute to 30 psig 1 to 30 psig 1 to 60 psig 2 to 100 psig (-88 kPa to 0.2 MPa) (0.007 to 0.2 MPa) (0.007 to 0.4 MPa) (0.014 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 10 min. (0.25 mm) Option: 7 min. (0.18 mm), 5 min. (0.13 mm) Bonnet port NPT 1/8 inch *4) Supply pressure effect 0.25 psig (0.0017 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.55 in3 (9 cm3) Weight 1.63 kg *5) *4) On panel mount option, bonnet port is not threaded. *1) Max. 90°C for Polyimide seat. *5) Weight, including individual boxed weight, may vary depending on *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). connections or options. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

Delivery pressure

53

Single Stage Regulator for Ultra High Purity Low flow

Series SL5500

S

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

SL5500

ø1.5 (ø38.1) ø2.25 (ø57.2)

IN 0.69 (17.5)

OUT

Max. 5.6 (142)

ø2.12 (ø53.8)

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

FV4 MV4 TW4 FV6 MV6 TW6

inch

(mm)

3.70

(94.0)

2.96

(75.2)

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

4.70 (119.4) 2.96

(75.2)

Flow Characteristics 50 psig (0.34 MPa)

SL5500

Inlet pressure:

1000 to 3000 psig (6.9 to 20.7 MPa)

500 psig (3.4 MPa)

60

0.41

25

0.17

50

0.34

20

0.14

40

0.28

15

0.10

30

0.21

10

0.07

20

0.14

5

0.03

10

0.07

0

0

1

2

3

4 5 6 7 Flow rate (slpm, N2)

8

9

0.00 10

Delivery pressure (psig)

0.21

0

0

20

40 60 80 Flow rate (slpm, N2)

100

0.00 120

Precautions

80 psig (0.55 MPa)

Delivery pressure (MPa)

Inlet pressure:

30

Delivery pressure (MPa)

Delivery pressure (psig)

SL5500

Flow Switches

0.88 (22.4)

A

Connections

Technical Data/ Glossary of Terms

A

Vacuum Generators

Check Valves

ø2.00 (ø50.8)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

54

Single Stage Regulator for Ultra High Purity

Intermediate flow

Series SL5400 ¡For UHP gas delivery ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Springless design (No poppet spring in the wetted area)

RoHS

How to Order Port Number q

w

SL54 02 S M 2PW FV4 FV4

e

r

Delivery pressure Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 1 to 60 psig (0.007 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa)

Bonnet option Connections (Inletq, Outletw)

Material Code S SH

Body 316L SS secondary remelt

Poppet 316L SS Ni-Cr-Mo alloy

Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

Diaphragm 316L SS

Surface finish Code M V X

Surface finish Ra max 10 min. (0.25 mm) Standard 7 min. (0.18 mm) 5 min. (0.13 mm)

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

Ports Code

2PW 3PW 4PW

Porting Configuration r w

q w

2PW

r q w

3PW

Ports 2 ports 3 ports 4 ports

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Gauge port (Inlete, Outletr)

Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code

Material PCTFE No code (Standard) VS Polyimide *3) *3) Not available with SH material.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) Sample Order Number V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa e r Port L -30 in.Hg to 60 psig -0.1 to 0.4 MPa SL54 ∗ ∗ ∗ 2PW ∗ ∗ 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 3PW ∗ ∗ 0 3PW ∗ ∗ 1 MPA 2 0 to 200 psig 0 to 1.4 MPa 4PW ∗ ∗ 0 0 10 0 to 1000 psig 0 to 7 MPa *1) Other range available. Refer to gauge guide (P.115). Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters SL5402 SL5406 SL5410 Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1000 psig (6.9 MPa) Proof pressure (Inlet) 3000 psig (20.7 MPa) Burst pressure 6000 psig (41.4 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.23 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *2) Surface finish Ra max 10 min. (0.25 mm) Option: 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *3) Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.2 in3 (19.7 cm3) Weight 1.91 kg *4) *1) Max. 90°C for Polyimide seat. *4) Weight, including individual boxed weight, may vary depending on *2) Tested with Helium gas inlet pressure 1000 psig (7 MPa). connections or options. *3) On panel mount option, bonnet port is not threaded.

55

Single Stage Regulator for Ultra High Purity Intermediate flow

Series SL5400

S

SH 316L SS secondary remelt Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS 316L SS PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

SL5400

Max. 5.9 (150)

ø2.12 (ø53.8)

ø1.5 (ø38.1) ø2.5 (ø63.5)

IN 0.69 (17.5)

OUT

A

(mm)

0.88 (22.4)

4.30 (109.2) 3.46

Check Valves

inch

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

(87.9)

5.22 (132.6)

Vacuum Generators

4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

Flow Characteristics 50 psig (0.34 MPa)

SL5400

Inlet pressure:

1000 psig (6.9 MPa)

500 psig (3.4 MPa)

0.21

60

0.41

25

0.17

50

0.34

20

0.14

40

0.28

15

0.10

30

0.21

10

0.07

20

0.14

5

0.03

10

0.07

0

0

4

8

12 16 20 24 Flow rate (slpm, N2)

28

0.00 32

Delivery pressure (psig)

30

0

0

20

40 60 80 Flow rate (slpm, N2)

100

0.00 120

Precautions

80 psig (0.55 MPa)

Delivery pressure (MPa)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

SL5400

Flow Switches

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

ø2.5 (ø63.5)

A

Technical Data/ Glossary of Terms

Connections

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

56

Single Stage Regulator for Ultra High Purity

Intermediate flow

Series SL5800 ¡For UHP gas delivery ¡Inlet pressure: Max. 300 psig (2.1 MPa) ¡Flow capacity to 200 slpm ¡Body material: 316L SS secondary remelt ¡Springless design (No poppet spring in the wetted area)

RoHS

How to Order Port Number q

w

SL58 02 S M 2PW FV4 FV4

e

r

Delivery pressure Bonnet option

Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 1 to 60 psig (0.007 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

Material Code S

Body Poppet Diaphragm 316L SS 316L SS 316L SS secondary remelt

Surface finish Code M V X

Surface finish Ra max 10 min. (0.25 mm) Standard 7 min. (0.18 mm) 5 min. (0.13 mm)

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration r w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Code Bonnet No code Standard P Panel installation *3) *3) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Gauge port (Inlete, Outletr)

Seat material Code

Material PCTFE No code (Standard) VS Polyimide

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japan's regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Sample Order Number L -30 in.Hg to 60 psig -0.1 to 0.4 MPa e r Port 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa SL58 ∗ ∗ ∗ 2PW ∗ ∗ H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 3PW ∗ ∗ 0 3PW ∗ ∗ 1 MPA 2 0 to 200 psig 0 to 1.4 MPa 4PW ∗ ∗ 0 0 4 0 to 400 psig 0 to 3 MPa *1) Other range available. Refer to gauge guide (P.115). Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters SL5802 SL5806 SL5810 Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 2000 psig (13.8 MPa) Burst pressure 4000 psig (27.6 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.4 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 10 min. (0.25 mm) Option: 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Bonnet port NPT 1/8 inch *4) Supply pressure effect 5 psig (0.035 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.2 in3 (19.7 cm3) Weight 1.91 kg *5) *4) On panel mount option, bonnet port is not threaded. *1) Max. 90°C for Polyimide seat. *5) Weight, including individual boxed weight, may vary depending on *2) Tested with Helium gas inlet pressure 300 psig (2.1 MPa). connections or options. *3) Tested with Helium gas inlet pressure 100 psig (0.7 MPa).

57

Single Stage Regulator for Ultra High Purity Intermediate flow

Series SL5800

S 316L SS secondary remelt Electropolish + Passivation 316L SS 316L SS 316L SS PCTFE (Option: Polyimide)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

SL5800

Max. 5.9 (150)

ø2.12 (ø53.8)

ø1.5 (ø38.1) ø2.5 (ø63.5)

IN 0.69 (17.5)

OUT

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

ø2.5 (ø63.5) 0.88 (22.4)

4.30 (109.2) 3.46

Check Valves

A (mm)

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

(87.9)

5.22 (132.6)

Vacuum Generators

4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

Flow Characteristics

0.24

30

0.21

30

0.21

25

0.17

25

0.17

20

0.14

20

0.14

15

0.10

15

0.10

10

0.07

10

0.07

5

0.03

5

0.03

0.00 100

0

0

20

40 60 Flow rate (slpm, N2)

80

0

40

80

120 160 200 240 Flow rate (slpm, N2)

280

0.00 320

Precautions

0

Delivery pressure (psig)

35

Delivery pressure (MPa)

Delivery pressure (psig)

Inlet pressure: 100 psig (0.69 MPa) 1/2 inch connections *)

SL5800

Delivery pressure (MPa)

Inlet pressure: 30 psig (0.21 MPa) 1/2 inch connections *)

SL5800

Flow Switches

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

inch

Technical Data/ Glossary of Terms

Connections

A

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

58

Single Stage Regulator for Ultra High Purity

Low to intermediate flow

Series AZ1000 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Body material: 316L SS ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

AZ10 01 S

w

2PW FV4 FV4

e

r

Delivery pressure Code 01 02 06 10 15

Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6

Material Code S SHP

Body

Poppet Diaphragm Nozzle 316L SS 316L SS Ni-Cr-Mo Ni-Cr-Mo 316L SS alloy alloy

316L SS

Gauge port (Inlete, Outletr)

Surface finish Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Ports Code 2PW 3PW 4PW

Porting Configuration r w

q w

r q w

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Ports 2 ports 3 ports 4 ports

e q

Pressure gauge *1) Code psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator.

Sample Order Number 2PW

3PW

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters Delivery pressure

AZ1001 1 to 10 psig (0.007 to 0.07 MPa)

Gas Source pressure

Vacuum to 300 psig (2.1 MPa)

Port AZ1001S 2PW 3PW 4PW 4PW

q

w e r

FV4 FV4 FV4 FV4 V3 MPA FV4 FV4 1 V3 MPA FV4 FV4 0 0

Bonnet option Code Bonnet No code Standard P Panel installation *6) BP Bonnet port (NPT 1/8 inch) *6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Option Code Specification No code Standard (Cv: 0.09) HF High flow (Cv: 0.15)

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) TF PTFE *4) *5) *3) Not available with SHP material. *4) PTFE recommended for applications such as within a process tool. *5) Source pressure rating is limited to 300 psig (2.1 MPa) or less.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AZ1002 AZ1006 AZ1010 1 to 30 psig 2 to 60 psig 2 to 100 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) Select compatible materials of construction for the gas

AZ1015 5 to 150 psig (0.034 to 1.0 MPa)

Vacuum to 3500 psig (24.1 MPa) *1)

Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *3) Across the seat leak 4 x 10-9 Pa·m3/s *4) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Supply pressure effect 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.25 kg *5) *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *1) Max. 300 psig (2.1MPa) for PTFE seat. *5) Weight, including individual boxed weight, may vary depending on *2) Max. 90°C for Polyimide seat. connections or options. *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).

59

Single Stage Regulator for Ultra High Purity Low to intermediate flow

Series AZ1000

0.69 (17.5)

ø2.25 (ø57.2)

ø2.00 (ø50.8) A

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

40

Inlet pressure:

100 psig (0.69 MPa) 40 psig (0.28 MPa)

80 psig (0.55 MPa) 20 psig (0.14 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

20

40 60 Flow rate (slpm, N2)

0.00 80

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

A inch

(mm)

3.70

(94.0)

Technical Data/ Glossary of Terms

FV4 MV4 FV6 MV6 TW6

20

0.52 0.48 0.45 0.41 0.38 0.34 0.31 0.28 0.24 0.21 0.17 0.14 0.10 0.07 0.03 0.00 60 80 100 120 140 160 180 200 Flow rate (slpm, N2)

4.70 (119.4) 2.96

(75.2)

Precautions

Connections

AZ1000

0

0.88 (22.4)

0

50 psig (0.34 MPa)

Flow Switches

ø1.5 (ø38.1)

Max. 5.0 (127) Max. 5.6 (142) (When selecting option code P)

ø2.12 (ø53.8)

100 psig (0.69 MPa) 30 psig (0.21 MPa)

Delivery pressure (MPa)

AZ1000

75 70 65 60 55 50 45 40 35 30 25 20 15 10 5 0

Inlet pressure:

Delivery pressure (MPa)

inch (mm)

Delivery pressure (psig)

Dimensions

AZ1000HF

Delivery pressure (psig)

Wetted Parts S SHP Body 316L SS Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm 316L SS Ni-Cr-Mo alloy Nozzle 316L SS Seat PCTFE (Option: Polyimide, PTFE) PCTFE (Option: PTFE)

Diaphragm Valves BP AK AZ SL AP Regulators

Flow Characteristics

Wetted Parts Material

Check Valves

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AZ1001 AZ1002 AZ1006 AZ1010 AZ1015 Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Vacuum Generators

High flow

Recommendations

Option

60

Single Stage Regulator for Ultra High Purity

Low flow (Tied-diaphragm)

Series AZ1500 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Body material: 316L SS ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Tied-diaphragm design

RoHS

How to Order Port Number q

AZ15 02 S

w

2PW FV4 FV4

e

r

Delivery pressure Code 02 06 10 15

Bonnet option

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6

Material Code S SHP

Body

Poppet Diaphragm Nozzle 316L SS 316L SS Ni-Cr-Mo Ni-Cr-Mo 316L SS alloy alloy

316L SS

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Surface finish Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Gauge port (Inlete, Outletr)

Ports Code 2PW 3PW 4PW

Porting Configuration r w

q w

2PW

r q w

3PW

Ports 2 ports 3 ports 4 ports

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator.

*4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code Material No code PCTFE(Standard) VS Polyimide *3) *3) Not available with SHP material. Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Sample Order Number Port AZ1510S 2PW 3PW 3PW 4PW 4PW

q

w er

FV4 FV4 FV4 FV4 FV4 FV4 FV4 FV4 40 FV4 FV4 0

0 1 MPA 1 MPA 0

AZ1506 AZ1510 AZ1515 2 to 60 psig 2 to 100 psig 5 to 150 psig Delivery pressure (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra 10 min.(0.25 mm) Option: 25 min.(0.62 mm) Connections Face seal, Tube weld Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.51 in3 (8.4 cm3) Weight 1.27 kg *4) *1) Max. 90°C for Polyimide seat. *4) Weight, including individual boxed weight, may vary depending on *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). connections or options. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

61

AZ1502 1 to 30 psig (0.007 to 0.2 MPa)

Code

Code Bonnet No code Standard P Panel installation *4) Bonnet port BP (NPT 1/8 inch)

Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm)

Series AZ1500

S

SHP 316L SS Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

AZ1500

ø1.5 (ø38.1)

0.69 (17.5)

ø2.25 (ø57.2)

Max. 5.0 (127) Max. 5.6 (142) (When selecting option code P)

ø2.12 (ø53.8)

ø2.00 (ø50.8)

Connections

3.70

A

0.88 (22.4)

(mm)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

(94.0)

(75.2)

Flow Characteristics

100

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 400

0

100

200 300 Flow rate (slpm, N2)

AZ1500

Inlet pressure:

100 psig (0.69 MPa) 40 psig (0.28 MPa)

80 psig (0.55 MPa) 20 psig (0.14 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

20

40 60 Flow rate (slpm, N2)

0.00 80

Precautions

1000 psig (6.9 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

2000 to 3000 psig (13.8 to 20.7 MPa) 500 psig (3.4 MPa)

Delivery pressure (slpm)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

AZ1500

Flow Switches

2.96

Vacuum Generators

4.70 (119.4)

Technical Data/ Glossary of Terms

FV4 MV4 FV6 MV6 TW6

inch

Check Valves

A

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

62

Intermediate flow (Tied-diaphragm)

Single Stage Regulator for Ultra High Purity Series AZ1400T

¡Sub-atmospheric ¡For UHP gas delivery pressure delivery option ¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Tied-diaphragm design ¡Flow capacity to 400 slpm ¡Body material: 316L SS ¡Ni-Cr-Mo alloy internals standard

RoHS

How to Order Port Number q

AZ14 02 T S

2PW FV4 FV4

Delivery pressure Code 02 06 10 15

S

316L SS

Poppet Ni-Cr-Mo alloy

Surface finish Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Diaphragm Ni-Cr-Mo alloy

Gauge port (Inlete, Outletr)

Range options *1) Code Specification No code Standard A Sub-atmospheric *1) Only available with AZ1402T.

Porting Configuration

Ports

r w

q w

r w

2PW e q 4PW

Specifications

q

r

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld

Material Body

e

Connections (Inletq, Outletw)

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Code

w

Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

3PW

Pressure gauge *2) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa 40 0 to 4000 psig 0 to 28 MPa *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Sample Order Number

qIN Port q w e r wOUT AZ1402TS 2PW FV4 FV4 3PW FV4 FV4 0 eGauge port (Inlet) 3PW FV4 FV4 1 MPA rGauge port (Outlet) 4PW FV4 FV4 40 1 MPA 4PW FV4 FV4 0 0

Option Code No code

Specification Standard High inlet pressure HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) *4) Not available with AZ1402T and AZ1406T.

Seat material Code Material No code PCTFE (Standard) VS Polyimide

Pressure gauge unit *3) Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AZ1402T AZ1406T AZ1410T AZ1415T 5 to 150 psig (0.034 to 1.0 MPa) 1 to 30 psig 2 to 60 psig 2 to 100 psig Delivery pressure (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Vacuum to 2300 psig (15.9 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.45 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *3) Across the seat leak 4 x 10-9 Pa·m3/s *4) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connection Face seal, Tube weld Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.06 in3 (17.4 cm3) Weight 2.04 kg *5) *1) Source pressure above 1000 psig (6.9 MPa) decreases maximum *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). delivery pressure to less than 150 psig (1 MPa) due to supply *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). pressure effect. When the source pressure is 2300 psig (15.9 *5) Weight, including individual boxed weight, may vary depending on MPa), achievable delivery pressure is around 129 psig (0.89 MPa). connections or options. *2) Max. 90°C for Polyimide seat. Operating Parameters

63

AZ1402TmmA 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa)

Bonnet option Code Bonnet No code Standard P Panel installation*5) Bonnet port BP (1/8 inch) *5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Single Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm)

Series AZ1400T

0.69 (17.5) ø2.5 (ø63.5)

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

inch

(mm)

4.30 (109.2) 5.22 (132.6) 4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

Inlet pressure:

0.00 200

160

2000 psig (13.8 MPa) 200 psig (1.4 MPa)

600 psig (4.1 MPa) 0.55

70

0.48

60

0.41

50

0.34

40

0.27

30

0.21

20

0.14

10

0.07

0

0

100

200

300 400 500 600 Flow rate (slpm, N2)

AZ1402TA

Delivery pressure (mm Hg)

FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

A

80 120 Flow rate (slpm, N2)

80

0.88 (22.4)

Connections

40

AZ1400T

A

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

0

700

0.00 800

Inlet pressure: 2 psig (14 kPa)

760 700

0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88

0

0

1

2

3

4 5 6 7 Flow rate (slpm, N2)

8

9

-101 10

Check Valves

ø2.62 (ø66.5)

50

Precautions

ø1.5 (ø38.1)

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code A, P or HR)

ø2.12 (ø53.8)

60 psig (0.41 MPa)

Delivery pressure (MPa)

AZ1400T

80 psig (0.55 MPa)

Delivery pressure (MPa)

inch (mm)

Inlet pressure:

Delivery pessure (kPa)

Dimensions

Delivery pressure (psig)

AZ1400T

S 316L SS Electropolish + Passivation Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316L SS PCTFE (Option: Polyimide)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Vacuum Generators

Flow Characteristics

Wetted Parts Material

Flow Switches

AZ1410T AZ1415T Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

Delivery pressure (psig)

Changes from the standard type are: Option Other Parameters Source pressure HR Proof pressure (Inlet) Burst pressure

Technical Data/ Glossary of Terms

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

Note) slpm N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

64

Single Stage Regulator for Ultra High Purity

High flow

Series AZ1300 ¡For UHP gas delivery ¡Flow capacity to 1000 slpm ¡Body material: 316L SS ¡Inlet pressure: Max. 300 psig (2.1 MPa)

RoHS

How to Order Port Number

AZ13 02 S

q

w

2PW FV8 FV8

e

Delivery pressure Code 02 06 10 15

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

Material Code

Body

Poppet

S

316L SS

316L SS

Diaphragm Ni-Cr-Mo alloy

Surface finish Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Ports Code 2PW 3PW

Ports 2 ports 3 ports

Porting Configuration e w

q w

2PW

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

q

3PW

qIN wOUT eGauge port (Outlet)

Gauge port (Inlete)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Sample Order Number q Port AZ1302S 2PW FV8 3PW FV8 3PW FV8

Bonnet option Code Bonnet No code Standard P Panel installation*4) Bonnet port BP (NPT 1/8 inch) *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code Material No code PCTFE (Standard) TF PTFE *3) *3) PTFE recommended for applications such as within a process tool.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

w e FV8 FV8 0 FV8 V3 MPA

Specifications AZ1306 AZ1310 AZ1315 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 450 psig (3.1 MPa) Burst pressure 1200 psig (8.3 MPa) Ambient and operating temperature -40 to 71°C (No freezing) Cv 1.1 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 1 x 10-10 Pa·m3/s *1) Across the seat leak 4 x 10-9 Pa·m3/s Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Supply pressure effect 4.6 psig (0.031 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 1.19 in3 (19.6 cm3) Weight 2.0 kg *2) *1) Tested with Helium gas inlet pressure 300 psig (2.1 MPa). *2) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

Delivery pressure

65

AZ1302 1 to 30 psig (0.007 to 0.2 MPa)

Single Stage Regulator for Ultra High Purity High flow

Series AZ1300

S 316L SS Electropolish + Passivation 316L SS 316L SS Ni-Cr-Mo alloy PCTFE (Option: PTFE)

Dimensions

inch (mm)

AZ1300

ø1.5 (ø38.1)

0.69 (17.5)

ø2.62 (ø66.5)

(mm)

Check Valves

inch

0.88 (22.4)

4.30 (109.2)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

5.22 (132.6) 4.00 (101.6)

Vacuum Generators

FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

ø2.5 (ø63.5) A

A

5.22 (132.6) 4.34 (110.2)

Flow Characteristics 100 psig (0.69 MPa)

AZ1300

Inlet pressure:

75 psig (0.52 MPa) 25 psig (0.17 MPa)

50 psig (0.34 MPa)

0.97

40

0.28

120

0.83

35

0.24

100

0.69

30

0.21

80

0.55

25

0.17

20

0.14

60

0.41

15

0.10

40

0.28

10

0.07

20

0.14

5

0.03

0.00 1200

0

0

0

200

400 600 800 Flow rate (slpm, N2)

1000

Delivery pressure (psig)

140

0

100

200 300 400 500 Flow rate (slpm, N2)

600

0.00 700

Precautions

150 psig (1.0 MPa) 75 psig (0.52 MPa)

Delivery pressure (MPa)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

AZ1300

Flow Switches

Connections

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code P)

ø2.12 (ø53.8)

Technical Data/ Glossary of Terms

Wetted Parts Body Surface finish Nozzle Poppet Diaphragm Seat

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

66

Single Stage Regulator for Ultra High Purity

High flow (Tied-diaphragm)

Series AZ1200 ¡Body material: 316L SS ¡For UHP gas delivery ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) ¡Ni-Cr-Mo alloy internals available for corrosion HR (option): Max. 3000 psig (20.7 MPa) resistance ¡Flow capacity Standard to 800 slpm HF (option): to 1000 slpm FC (option): to 1500 slpm

RoHS

How to Order Port Number q

AZ12 02 S

2PW FV8 FV8

Delivery pressure

Code FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

Material Poppet Diaphragm 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy

Surface finish

Ports

Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Code 2PW 3PW 4PW

Porting Configuration r w

q w

2PW

r w

q

3PW

e q

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Weight

67

r

Ports 2 ports 3 ports 4 ports

Bonnet option

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

Code Bonnet No code Standard P Panel installation*6) Bonnet port BP (NPT 1/8 inch) *6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Option Code No code HF

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator.

FC

Code

Sample Order Number

4PW

Specifications

e

Connections (Inletq, Outletw)

Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 2 to 60 psig (0.014 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa) 15 5 to 150 psig (0.034 to 1.0 MPa) 25 Preset to 250 psig (1.7 MPa (Preset)) Code Body S 316L SS SHP

w

Port AZ1210S 2PW 3PW 3PW 4PW

q

w e r

FV8 FV8 FV8 FV8 0 FV8 FV8 1 MPA FV8 FV8 40 1 MPA

HR

2550 psig (17.6 MPa) 8000 psig (55.2 MPa) -40 to 71°C (No freezing) *3) 0.65 2 x 10-11 Pa·m3/s 2 x 10-10 Pa·m3/s *4) 4 x 10-9 Pa·m3/s *5) Ra 10 min.(0.25 mm) Option: 25 min.(0.62 mm) Face seal, Tube weld 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 1.07 in3 (17.6 cm3) 2.0 kg *6)

High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) *4)

*4) FC and HR options are not available with AZ1202, AZ1206 and AZ1225. *5) FC option is available with 1/2 inch face seal or 1/2 inch tube weld.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) *3) Not available with SHP material.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AZ1202 AZ1206 AZ1210 AZ1215 AZ1225 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) (1.7 MPa) *2) Select compatible materials of construction for the gas Vacuum to 1700 psig (11.7 MPa)

Specification Standard (Cv: 0.65) High flow (Cv: 1.1) Force compensation (Cv: 0.65) *4)*5)

*1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). *2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. *3) Max. 90°C for Polyimide seat. *4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *6) Weight, including individual boxed weight, may vary depending on connections or options.

Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm)

Options

Vacuum to 300 psig (2.1 MPa) 0.65 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop 1/2 inch face seal 1/2 inch tube weld

3. High inlet pressure Changes from the standard type are: Other Parameters

Source pressure HR Proof pressure (Inlet) Burst pressure

AZ1210

Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

Dimensions

ø2.62 (ø66.5)

ø2.5 (ø63.5) A

FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

40

0.28

30

0.21

20

0.14

10

0.07

0

0

100

0.88 (22.4)

A (mm)

4.30 (109.2) 5.22 (132.6) 4.00 (101.6) 5.22 (132.6) 4.34 (110.2)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Delivery pressure (psig)

200 300 400 500 Flow rate (slpm, N2)

Inlet pressure:

150 psig (1.0 MPa) 50 psig (0.34 MPa)

600

0.00 700

100 psig (0.69 MPa)

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

0.00 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2)

AZ1200FC

Delivery pressure (psig)

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code P or HR) Max. 6.5 (165) (When selecting option code FC)

ø1.5 (ø38.1)

inch

0.34

AZ1200HF

ø2.12 (ø53.8)

60 psig (0.41 MPa) 1/2 inch connections *)

50

inch (mm)

AZ1200

Connections

AZ1215

0.69 (17.5)

Option

80 psig (0.55 MPa)

Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections *)

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

Diaphragm Valves BP AK AZ SL AP Regulators

AZ1215

Inlet pressure:

Check Valves

Source pressure Cv FC Supply pressure effect Connections

AZ1200

Vacuum Generators

AZ1210

Other Parameters

Flow Characteristics

Flow Switches

Force compensation feature added to HF option and has wider flow capacity than HF option. Changes from the standard type are:

Technical Data/ Glossary of Terms

2. Force compensation

Precautions

1.1 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Delivery pressure (psig)

Cv HF Supply pressure effect

Delivery pressure (MPa)

Option Other Parameters AZ1202 AZ1206 AZ1210 AZ1215 AZ1225

Wetted Parts S SH Body 316L SS Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm Ni-Cr-Mo alloy Nozzle 316L SS PCTFE (Option: Polyimide) PCTFE Seat

Delivery pressure (MPa)

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are:

Recommendations

Wetted Parts Material

1. High flow

Option

Series AZ1200

0.00 200 400 600 800 1000 1200 1400 1600 1800 2000 Flow rate (slpm, N2)

*1) If connection size differs, flow characteristics also differ. *2) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

68

High flow (Tied-diaphragm)

Single Stage Regulator for Ultra High Purity Series AZ9200 ¡For UHP gas delivery ¡Inlet pressure: Max. 300 psig (2.1 MPa) ¡Flow capacity to 2000 slpm ¡Body material: 316L SS

RoHS

How to Order Port Number q

w

AZ92 02 S 2PW FV12 FV12

e

Delivery pressure Code 02 06 10 15

Bonnet option

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Code Bonnet No code Standard P Panel installation *3) Bonnet port BP (NPT 1/8 inch) *3) Panel mounting hole: dia. 39.6 mm.

Material Code S

Body 316L SS

Poppet 316L SS

Diaphragm Ni-Cr-Mo alloy

Ports Code 2PW 3PW

Pressure gauge unit *2)

Ports 2 ports 3 ports

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Porting Configuration e w

q w

q

Gauge port *1) (Outlete) 2PW

3PW

qIN wOUT eGauge port (Outlet) Connections (Inletq, Outletw) Code FV12 MV12 TW12 FV16 MV16 TW16

Connections 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld 1 inch face seal (Female) 1 inch face seal (Male) 1 inch tube weld

Pressure gauge psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa *1) Other range available. Refer to gauge guide (P.115). Code

Specifications AZ9206 AZ9210 AZ9215 2 to 60 psig 2 to 100 psig 5 to 150 psig Delivery pressure (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 450 psig (3.1 MPa) Burst pressure 1500 psig (10.3 MPa) Ambient and operating temperature -40 to 71°C (No freezing) Cv 1.6 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 1 x 10-10 Pa·m3/s *1) Across the seat leak 4 x 10-9 Pa·m3/s *2) Surface finish Ra 10 min. (0.25 mm) Connections Face seal, Tube weld Supply pressure effect 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 2.2 in3 (36 cm3) *1) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *2) Tested with Helium gas inlet pressure 1000 psig (7 MPa). Operating Parameters

69

AZ9202 1 to 30 psig (0.007 to 0.2 MPa)

Single Stage Regulator for Ultra High Purity High flow(Tied-diaphragm)

Series AZ9200

S 316L SS Electropolish + Passivation 316L SS 316L SS Ni-Cr-Mo alloy PFA

Wetted Parts Body Surface finish Nozzle Poppet Diaphragm Seat

Dimensions

inch (mm)

ø1.5 (ø38.1)

1.125 (28.6)

ø2.62 (ø66.5)

Max. 6.4 (163) Max. 6.9 (175) (BP & P Option)

AZ9200

ø2.99 (76.2) A

A

FV12 MV12 TW12 FV16 MV16 TW16

inch

2 x 1/4-20 UNC depth 0.35 (8.9) (Mounting hole)

(mm)

3.39

(86.1)

3.00

(76.2)

3.67

(93.2)

3.00

(76.2)

Vacuum Generators

Connections

Check Valves

1.50 (38.1)

A

Flow Characteristics

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

500

1000 1500 Flow rate (slpm, N2)

2000

Technical Data/ Glossary of Terms

0.83

Flow Switches

100 psig (0.69 MPa)

0.00 2500

Precautions

150 psig (1.0 MPa)

120

Delivery pressure (MPa)

Delivery pressure (psig)

AZ9200 Inlet pressure:

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

70

Single Stage Regulator for Ultra High Purity

Delivery of sub-atmospheric pressure

Series AZ1100 ¡For UHP gas delivery ¡Sub-atmospheric to low positive pressure delivery ¡Flow capacity to 0.5 slpm ¡Body material: 316L SS ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

AZ11 01 S

w

2PW FV4 FV4

e

r

Delivery pressure Code 01

Bonnet option

Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa)

Material Code S SHP

Body

Poppet Diaphragm Nozzle 316L SS 316L SS Ni-Cr-Mo Ni-Cr-Mo 316L SS alloy alloy

316L SS

Seat material

Code Material No code PCTFE (Standard) TF PTFE *3) *3) PTFE recommended for applications such as within a process tool.

Surface finish Code Surface finish Ra No code 10 min. (0.25 mm) Standard Q 25 min. (0.62 mm)

Porting Configuration r w

q w

2PW r w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Pressure gauge unit *2)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Connections (Inletq, Outletw)

q Code FV4 MV4 FV6 MV6 TW6

Code Bonnet No code Standard P Panel installation *4) BP Bonnet port (NPT 1/8 inch) *4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Sample Order Number Port AZ1101S 2PW 3PW 3PW 4PW 4PW

q

w e r

FV4 FV4 FV4 FV4 0 FV4 FV4 V3 MPA FV4 FV4 V3 V3 MPA FV4 FV4 0 0

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa *1) Other range available. Refer to gauge guide (P.115). Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters AZ1101 Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 500 psig (3.4 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) Cv 0.05 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *1) Across the seat leak 4 x 10-9 Pa·m3/s *1) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.25 kg *2) *1) Tested with Helium gas inlet pressure 300 psig (2.1 MPa). *2) Weight, including individual boxed weight, may vary depending on connections or options.

71

Single Stage Regulator for Ultra High Purity Delivery of sub-atmospheric pressure

Series AZ1100

S

SHP 316L SS Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS PCTFE (Option: PTFE)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm)

AZ1100

ø1.5 (ø38.1)

0.69 (17.5)

ø2.25 (ø57.2)

Max. 5.0 (127) Max. 5.6 (142) (When selecting option code P)

ø2.12 (ø53.8)

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

Check Valves

ø2.00 (ø50.8) A

FV4 MV4 FV6 MV6 TW6

0.88 (22.4)

A inch

(mm)

3.70

(94.0)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Vacuum Generators

Connections

4.70 (119.4) 2.96

(75.2)

Flow Characteristics

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88 0

1 2 Flow rate (slpm, N2)

3

-101

Precautions

0

Technical Data/ Glossary of Terms

0 -8

Flow Switches

Inlet pressure: 2 psig (14 kPa)

760 700

Delivery pressure (kPa)

Delivery pressure (mm Hg abs)

AZ1100

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

72

Single Stage Regulator for General Applications

Low to intermediate flow

Series AK1000 ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Body material: Stainless steel and Brass available ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

w

e

AK10 01 S 4PL 4 4 0 Material Code B S SH

Body Brass

Poppet

316 SS

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Material B S, SH V V V V V V V

Ports

2P 3P Refer to the 4P following porting 4PL configurations. 5PC

Connections (Inletq, Outletw) Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression 6T 3/8 inch compression

Delivery pressure Code 01 02 06 10

Delivery pressure Code Delivery pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) 15 5 to 150 psig (0.034 to 1.0 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 20 5 to 200 psig (0.034 to 1.4 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 30 5 to 300 psig (0.034 to 2.1 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 50 10 to 500 psig (0.07 to 3.4 MPa)

Porting Configuration t w

q

w

t q

2P

r

w

q

3P t

w

t q

e

4PL

w

0

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Ports Code

t

Pressure gauge unit *2)

Diaphragm

316 SS

r

4P r q

e 5PC

Gauge port (Extra bottom outlete, Inletr, Outlett)

Bonnet option Code Bonnet No code Standard P Panel installation *6) *6) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Option Code No code HF

Specification Standard (Cv: 0.09) High flow (Cv: 0.15)

Pressure gauge *1) psig/bar unit MPa unit Seat material No code No gauge port Code Material No pressure gauge 0 No code PCTFE (Standard) (Gauge port: 1/4 inch NPT) *2) VS Polyimide *3) No pressure gauge C PK PEEK (1/4 inch NPT plug is installed before shipment.) TF PTFE *4) *5) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa *3) Not available with SH material. 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa *4) Source pressure rating is limited to 300 psig (2.1 MPa) or less. H -30 in.Hg to 160 psig -0.1 to 1.1 MPa *5) PTFE seats reduce seat 2 -30 in.Hg to 160 psig 0 to 1.5 MPa abrasion for flow cycle 10 0 to 1000 psig 0 to 7 MPa application. Gas permeation is 40 0 to 4000 psig 0 to 28 MPa greater with PTFE than PCTFE. *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the Sample Order Number Port q w e r t delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port AK1002S 2P 4 4 3P 4 4 V3 MPA code 4PL and 5PC. 4P 4 4 1 V3 MPA 4PL 4 4 0 V3 MPA 4PL 4 4 0 0 5PC 4 4 0 1 V3 MPA Code

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications AK1001 AK1002 AK1006 AK1010 AK1015 AK1020 AK1030 AK1050 0.5 to 10 psig 1 to 30 psig 2 to 60 psig 2 to 100 psig 5 to 150 psig 5 to 200 psig 5 to 300 psig 10 to 500 psig Delivery pressure (0.0034 to 0.07 MPa) (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) (0.034 to 1.4 MPa) (0.034 to 2.1 MPa) (0.07 to 3.4 MPa) Gas Select compatible materials of construction for the gas Vacuum to 300 psig Source pressure Vacuum to 3500 psig (24.1 MPa) *1) (2.1 MPa) Proof pressure (Inlet) 4500 psig (30.7 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.09 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Supply pressure effect 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.09 kg *3) *1) Max. 300 psig (2.1 MPa) for PTFE seat. *2) Max. 90°C for Polyimide and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC. *3) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

73

Single Stage Regulator for General Applications

Series AK1000

Low to intermediate flow

ø1.50 (ø38.1)

ø2.25 (ø57.2)

IN 0.69 (17.5)

OUT

0.88 (22.4)

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 400

0

AK1000

200 300 Flow rate (slpm, N2)

Inlet pressure:

100 psig (0.69 MPa) 40 psig (0.28 MPa)

80 psig (0.55 MPa) 20 psig (0.14 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

100

0

20

ø2.00 (ø50.8)

AK1000HF

40 Flow rate (slpm, N2)

Inlet pressure:

60

100 psig (0.69 MPa) 30 psig (0.21 MPa)

0.00 80 50 psig (0.34 MPa)

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

20

40

0.00 60 80 100 120 140 160 180 200 Flow rate (slpm, N2)

Diaphragm Valves BP AK AZ SL AP Regulators

Max. 5.0 (127) Max. 5.6 (142) (When selecting AK1050 and the panel mounting option)

ø2.12 (ø53.8)

90

Check Valves

AK1000

0.69

Vacuum Generators

inch (mm)

100

Precautions

Dimensions

3000 psig (20.7 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

316 SS 316 SS Ni-Cr-Mo alloy 316 SS Ni-Cr-Mo alloy PCTFE PCTFE (Option: Polyimide, PEEK, PTFE) (Option: PEEK, PTFE)

Inlet pressure:

AK1000

Delivery pressure (MPa)

SH

Dlivery pressure (MPa)

S

Delivery pressure (psig)

Seat

B Brass

Delivery pressure (psig)

Wetted Parts Body Poppet Diaphragm

Flow Characteristics

Delivery pressure (psig)

Wetted Parts Material

Flow Switches

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AK1001 AK1002 AK1006 AK1010 AK1015 AK1020 AK1030 AK1050 Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Technical Data/ Glossary of Terms

High flow

Recommendations

Option

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

74

Single Stage Regulator for General Applications

Low flow (Tied-diaphragm)

Series AK1500 ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity: to 30 slpm ¡Body material: Stainless steel and Brass available ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Tied-diaphragm design

RoHS

How to Order Port Number q

w

e

AK15 02 S 4PL 4 4 0 Delivery pressure Code 02 06 10 15

Body Brass 316 SS

Poppet

Diaphragm

316 SS

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Code

Ports

2P 3P 4PL 5PC

Refer to the following porting configurations.

Porting Configuration t w

q w

q

2P t w

3P t

r

q w

e 4PL

q

t

0

Connections (Inletq, Outletw)

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Material Code B S SH

r

Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression 6T 3/8 inch compression

Gauge port (Extra bottom outlete, Inletr, Outlett)

Bonnet option Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) PK PEEK *3) Not available with SH material.

Pressure gauge *1) psig/bar unit MPa unit Ports No code No gauge port Material No pressure gauge 0 B S, SH (Gauge port: 1/4 inch NPT) *2) Pressure gauge unit *2) V No pressure gauge Code Unit C V (1/4 inch NPT plug is installed before shipment.) No code psig/bar V V V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa MPA MPa V V L -30 in.Hg to 60 psig -0.1 to 0.4 MPa *2) Pressure gauge unit MPa or psig/bar 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa selectable. However H -30 in.Hg to 160 psig -0.1 to 1.1 MPa under Japanese regulation, only MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa is available in Japan. 10 0 to 1000 psig 0 to 7 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge Sample Order Number specifications. Select a pressure gauge, Port q w e r t AK1510S 2P 4 4 which has a larger pressure range than the 3P 4 4 1 MPA delivery pressure range of the regulator. 4PL 4 4 0 1 MPA *2) 1/4 inch NPT plug is included only for port 4PL 4 4 0 0 code 4PL and 5PC. 5PC 4 4 0 40 1 MPA Code

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications AK1506 AK1510 AK1515 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (inlet) 4500 psig (30.7 MPa) Burst pressure 10000 psig (69 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.09 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.18 kg *2) *1) Max. 90°C for Polyimide and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC. *2) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

Delivery pressure

75

AK1502 1 to 30 psig (0.007 to 0.2 MPa)

Single Stage Regulator for General Applications Low flow (Tied-diaphragm)

Series AK1500

Seat

Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: PEEK)

Dimensions

inch (mm)

AK1500

ø1.50 (ø38.1) ø2.25 (ø57.2)

IN

0.88 (22.4)

Check Valves

0.69 (17.5)

OUT

Max. 5.0 (127) Max. 5.6 (142) (When selecting AK1050 and the panel mounting option)

ø2.12 (ø53.8)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

ø2.00 (ø50.8)

Flow Characteristics

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 400

0

100

200 300 Flow rate (slpm, N2)

Inlet pressure:

100 psig (0.69 MPa) 40 psig (0.28 MPa)

80 psig (0.55 MPa) 20 psig (0.14 MPa)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

20

40 60 Flow rate (slpm, N2)

Delivery pressure (MPa)

100

AK1500

Delivery pressure (psig)

Delivery pressure (psig)

3000 psig (20.7 MPa) 200 psig (1.4 MPa)

Delivery pressure (MPa)

Inlet pressure:

AK1500

0.00 80

Precautions

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Vacuum Generators

316 SS 316 SS PCTFE (Option: Polyimide, PEEK)

Diaphragm Valves BP AK AZ SL AP Regulators

SH 316 SS

Flow Switches

S

Technical Data/ Glossary of Terms

B Brass

Wetted Parts Body Poppet Diaphragm

Recommendations

Wetted Parts Material

76

Intermediate flow (Tied-diaphragm)

Single Stage Regulator for General Applications Series AK1400T

¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) ¡Sub-atmospheric pressure delivery option HR (option): Max. 3000 psig (20.7 MPa) ¡Tied-diaphragm design ¡Flow capacity to 400 slpm ¡Body material: Stainless steel and Brass available ¡Ni-Cr-Mo alloy internals standard

RoHS

How to Order Port Number

AK14 02 T S

q

w

e

4PL 6 6 0

r

t

0

Delivery pressure Code 02 06 10 15

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Ports Code 2P 3P 4PL 5PC

Material Code Body Poppet Diaphragm Nozzle B Brass Ni-Cr-Mo Ni-Cr-Mo 316 SS S alloy 316 SS alloy SH Ni-Cr-Mo alloy

Porting Configuration q w

q

2P t w

3P t

r

q w

Range options *1) Code Specification No code Standard A Sub-atmospheric *1) Only available with AK1402T.

Connections (Inletq, Outletw)

t w

Material B S, SH V Refer to V the following porting V V configurations. V V Ports

q

Code Connections 4 NPT 1/4 inch 6 NPT 3/8 inch 8 NPT 1/2 inch 4T 1/4 inch compression 6T 3/8 inch compression 8T 1/2 inch compression

Sample Order Number e 4PL

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications

AK1410TS Port q w 2P 6 6 3P 6 6 4PL 6 6 4PL 6 6 5PC 6 6

e r t

1 MPA 0 1 MPA 0 0 0 40 1 MPA

Pressure gauge unit *3) Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *4) *4) Not available with SH material.

Bonnet option Code Bonnet No code Standard P Panel installation*6) BP Bonnet port (NPT 1/8 inch) *6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Option Code No code HR

Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) *5)

*5) Not available with AK1402T and AK1406T. Gauge port (Extra bottom outlete, Inletr, Outlett) Pressure gauge *2) psig/bar unit MPa unit No code No gauge port 0 No pressure gauge (Gauge port: 1/4 inch NPT) *2) C No pressure gauge (1/4 inch NPT plug is installed before shipment.) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa 4 0 to 400 psig 0 to 3 MPa 10 0 to 1000 psig 0 to 7 MPa 30 0 to 3000 psig 0 to 21 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

AK1402TmA AK1402T AK1406T AK1410T AK1415T 5 to 150 psig (0.034 to 1.0 MPa) 100 mm Hg absolute to 30 psig 1 to 30 psig 1 to 60 psig 2 to 100 psig Delivery pressure (-88 kPa to 0.2 MPa) (0.007 to 0.2 MPa) (0.007 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) Gas Select compatible materials of construction for the gas Vacuum to 300 psig Source pressure Vacuum to 2300 psig (15.9 MPa) (2.1 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.45 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.65 in3 (10.6 cm3) Weight 2.04 kg *3) *1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa). *2) Max. 90°C for Polyimide seat. *3) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

77

Single Stage Regulator for General Applications Intermediate flow (Tied-diaphragm)

Series AK1400T

AK1400T

ø1.50 (ø38.1) Bonnet port Note)

ø2.62 (ø66.5)

IN

ø2.50 (ø63.5)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Note) The standard port is ø1.5. When selecting the AK1402TA or the option code P or HR, the connection is NPT1/8 female thread.

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

100

AK1400T

200

300 400 500 Flow rate (slpm, N2)

Inlet pressure:

600

700

0.00 800

80 psig (0.55 MPa) 60 psig (0.41 MPa) 1/2 inch Connection *)

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

40

AK1400TA Delivery pressure (mm Hg abs)

0.88 (22.4)

0.55

0

0.69 (17.5)

OUT

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code P or HR)

ø2.12 (ø53.8)

80

80 120 Flow Rate (slpm, N2)

0.00 200

160

Inlet pressure: 0 psig (14 kPa)

760 700

0 -8

600

-21

500

-35

400

-48

300

-61

200

-75

100

-88

0

0

1

2

3 4 5 6 7 Flow rate (slpm, N2)

8

9

Precautions

inch (mm)

AK1400T

2000 psig (13.8 MPa) 600 psig (4.1 MPa) 200 psig (1.4 MPa) 1/2 inch Connection *)

Delivery pressure (MPa)

Dimensions

Inlet pressure:

Delivery pressure (MPa)

SH 316 SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316 SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Delivery pressure (kPa)

S

Delivery pressure (psig)

B Brass

Delivery pressure (psig)

Wetted Parts Body Poppet Diaphragm Nozzle Seat

Flow Characteristics

Check Valves

Wetted Parts Material

Vacuum Generators

AK1410T AK1415T Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

Flow Switches

Changes from the standard type are: Option Other Parameters Source pressure HR Proof pressure (Inlet) Burst pressure

Technical Data/ Glossary of Terms

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

-101 10

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

78

Single Stage Regulator for General Applications

High flow

Series AK1300 ¡Flow capacity to 1000 slpm ¡Body material: Stainless steel and Brass available ¡Inlet pressure: Max. 300 psig (2.1 MPa)

RoHS

How to Order Port Number q

w

e

r

AK13 02 S 4PL 8 8 0 0 Delivery pressure Code 02 06 10 15

Bonnet option

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Material Code Body Poppet Diaphragm B Brass Ni-Cr-Mo 316 SS alloy S 316 SS

Ports Code

Ports

2P Refer to the 3P following porting 4PL configurations.

Gauge port (Outlete, r)

Connections (Inletq, Outletw)

Material B S, SH V V V V

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Gauge port: 1/4 inch NPT) *2) No pressure gauge C (1/4 inch NPT plug is installed before shipment.) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa Code

Code Connections 4 NPT 1/4 inch 6 NPT 3/8 inch 8 NPT 1/2 inch 4T 1/4 inch compression 6T 3/8 inch compression 8T 1/2 inch compression

*1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL.

Porting Configuration r

r w

q w

q w

q

Sample Order Number 2P

3P

Port AK1302S 2P 3P 4PL 4PL

e 4PL

qIN wOUT erGauge port (Outlet)

Code No code P BP

Bonnet Standard Panel installation*4) Bonnet port (NPT 1/8 inch)

*4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Seat material Code Material No code PCTFE (Standard) TF PTFE *3) *3) PTFE seats reduce seat abrasion for flow cycle application. Gas permeation is greater with PTFE than PCTFE.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

q w e r

6 6 6 8

6 6 6 8

V3 MPA 0 V3 MPA 0 0

Specifications AK1306 AK1310 AK1315 2 to 60 psig 2 to 100 psig 5 to 150 psig Delivery pressure (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 300 psig (2.1 MPa) Proof pressure (Inlet) 450 psig (3.1 MPa) Burst pressure 1200 psig (8.3 MPa) Ambient and operating temperature -40 to 71°C (No freezing) Cv 1.1 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Supply pressure effect 4.6 psig (0.031 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.65 in3 (10.6 cm3) Weight 2.0 kg * * Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

AK1302 1 to 30 psig (0.007 to 0.2 MPa)

Wetted Parts Material Wetted Parts Body Poppet Diaphragm Seat

79

B Brass

S 316 SS

316 SS Ni-Cr-Mo alloy PCTFE (Option: PTFE)

Single Stage Regulator for General Applications High flow

Series AK1300

Dimensions

Recommendations

inch (mm)

AK1300

Diaphragm Valves BP AK AZ SL AP Regulators

0.88 (22.4)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

ø2.50 (ø63.5)

Note) The standard port is ø1.5. When selecting the option code P, the connection is NPT1/8 female thread.

Flow Characteristics 100 psig (0.69 MPa)

AK1300

Inlet pressure:

75 psig (0.52 MPa) 25 psig (0.17 MPa)

50 psig (0.34 MPa)

0.97

40

0.28

120

0.83

35

0.24

100

0.69

30

0.21

80

0.55

25

0.17

20

0.14

60

0.41

15

0.10

40

0.28

10

0.07

20

0.14

5

0.03

0.00 1200

0

0

0

200

400 600 800 Flow rate (slpm, N2)

1000

Delivery pressure (psig)

140

0

100

200 300 400 500 Flow rate (slpm, N2)

600

Technical Data/ Glossary of Terms

150 psig (1.0 MPa) 75 psig (0.52 MPa)

Delivery pressure (MPa)

Inlet pressure:

Delivery pressure (MPa)

Delivery pressure (psig)

AK1300

Check Valves

IN 0.69 (17.5)

OUT

Vacuum Generators

ø2.62 (ø66.5)

Flow Switches

ø1.5 (ø38.1)

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code P or BP)

ø2.12 (ø53.8)

0.00 700

Precautions

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

80

Single Stage Regulator for General Applications

High flow (Tied-diaphragm)

Series AK1200 ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) ¡Ni-Cr-Mo alloy internals HR (option): Max. 3000 psig (20.7 MPa) available for corrosion resistance ¡Flow capacity Standard: to 800 slpm ¡Tied-diaphragm design HF (option): to 1000 slpm FC (option): to 1500 slpm ¡Body material: Stainless steel and Brass available

RoHS

How to Order Port Number q

w

e

AK12 02 S 4PL 8 8 0

Code 02 06 10 15 25

t

0 Bonnet option

Ports

Material Code Body Poppet Diaphragm B Brass 316 SS S Ni-Cr-Mo alloy 316 SS Ni-Cr-Mo SH alloy

Code

Ports

2P Refer to the 3P following porting 4PL configurations. 5PC

Material B S, SH V V V V V V

Connections (Inletq, Outletw)

Delivery pressure

r

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig (1.7 MPa)

Code Connections 4 NPT 1/4 inch 6 NPT 3/8 inch 8 NPT 1/2 inch 4T 1/4 inch compression 6T 3/8 inch compression 8T 1/2 inch compression

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Gauge port (Extra bottom outlete, Inletr, Outlett)

Porting Configuration t

Code Bonnet No code Standard P Panel installation *6) BP Bonnet port (NPT 1/8 inch) *6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Option

Code Specification No code Standard (Cv: 0.65) HF High flow (Cv: 1.1) FC Force compensation(Cv: 0.65) *4) *5) High inlet pressure HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) *4) FC option is not available with AK1202, AK1206 and AK1225. *5) FC option is available with 1/2 inch NPT or 1/2 inch compression.

Pressure gauge *1) Seat material psig/bar unit MPa unit Code Material No code No gauge port No code PCTFE (Standard) 0 No pressure gauge (Gauge port: 1/4 inch NPT) *2) VS Polyimide *3) C No pressure gauge (1/4 inch NPT plug is installed before shipment.) *3) Not available with SH material. V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa Sample Order Number L -30 in.Hg to 60 psig -0.1 to 0.4 MPa Port q w e r r 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa AK1202S 2P 8 8 H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 3P 8 8 V3 MPA 2 -30 in.Hg to 160 psig 0 to 1.5 MPa 4PL 8 8 0 V3 MPA 4PL 8 8 0 0 10 0 to 1000 psig 0 to 7 MPa 5PC 8 8 0 40 V3 MPA 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

w

q w 2P t

w

q 3P

t q w

e 4PL

r q

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications

AK1206 AK1210 AK1215 AK1225 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.034 to 1.0 MPa) Preset to 250 psig Delivery pressure (1.7 MPa) *2) (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (Source pressure 1000 psig or less) *1) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1700 psig (11.7 MPa) Proof pressure (Inlet) 2550 psig (17.6 MPa) Burst pressure 9000 psig (62 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *3) Cv 0.65 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Supply pressure effect 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount (Option: panel mount) Internal volume 0.65 in3 (10.6 cm3) Weight 2.0 kg *4) *1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect. When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). *2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. *3) Max. 90°C for Polyimide seat. Optional ambient and operating temperature range available. Please contact SMC. *4) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

81

AK1202 1 to 30 psig (0.007 to 0.2 MPa)

Series AK1200

2. Force compensation Force compensation feature added to HF option and has higher flow capacity than HF option. Changes from the standard type are: Option Other Parameters AK1210 AK1215 Source pressure Vacuum to 300 psig (2.1 MPa) Cv 0.65 FC Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Connections NPT 1/2 inch, 1/2 inch compression

ø1.50 (ø38.1) Bonnet port Note)

3. High inlet pressure Changes from the standard type are: AK1210 AK1215 Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa)

ø2.62 (ø66.5)

Wetted Parts Material

0.69 (17.5)

SH

316 SS 316 SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

0.88 (22.4) ø2.50 (ø63.5)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole) Note) The standard port is ø1.5. When selecting the option code P, HR, or FC, the connection is NPT1/8 female thread.

1700 psig (11.7 MPa)

500 to 1000 psig (3.4 to 6.9 MPa) 1/2 inch connections *)

90

60

0.41

50

0.34

40

0.28

30

0.21 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2)

0

AK1200HF

Inlet pressure:

150 psig (1.0 MPa) 50 psig (0.34 MPa)

100 psig (0.69 MPa)

100

0.69

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 1000

0

200

400 600 Flow rate (slpm, N2)

800

Delivery pressure (psig)

0.48

Inlet pressure:

80 psig (0.55 MPa) 60 psig (0.41 MPa) 1/2 inch connections *)

50

0.34

45

0.31

40

0.28

35

0.24

30

0.21

25

0.17

20

0.14

15

0.10

10

0.07

5 0

0.03 0.00 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections *)

AK1200FC

Delivery pressure (psig)

70

Delivery pressure (MPa)

Delivery pressure (psig)

0.55

Delivery pressure (MPa)

0.62

80

Delivery pressure (psig)

AK1200

75

0.52

60

0.41

45

0.31

30

0.21

15

0.10

0

0

400

800 1200 Flow rate (slpm, N2)

1600

Precautions

Inlet pressure:

Delivery pressure (MPa)

S

Flow Characteristics AK1200

IN

OUT

B Brass

Wetted Parts Body Poppet Diaphragm Seat

Delivery pressure (MPa)

Option Other Parameters Source pressure HR Proof pressure (Inlet) Burst pressure

Max. 5.6 (142) Max. 6.0 (152) (When selecting option code P or HR) Max. 6.5 (165) (When selecting option code FC)

ø2.12 (ø53.8)

Recommendations

AK1200

dimensions. Changes from the standard type are: Option Other Parameters AK1202 AK1206 AK1210 AK1215 AK1225 Cv 1.1 HF Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Diaphragm Valves BP AK AZ SL AP Regulators

1.High flow Higher flow capacity with internal changes only, no change in external

inch (mm)

Check Valves

Dimensions

Vacuum Generators

Options

Flow Switches

High flow (Tied-diaphragm)

Technical Data/ Glossary of Terms

Single Stage Regulator for General Applications

0.00 2000

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

82

Single Stage Regulator for General Applications

High flow (Tied-diaphragm)

Series AK9200 ¡3/4 inch port size ¡Inlet pressure: Max. 300 psig (2.1 MPa) ¡Flow capacity: to 2000 slpm ¡Body material: 316 SS

RoHS

How to Order Port Number q

w

e

r

AK92 02 S 4PL1212 0 0

Delivery pressure Code 02 06 10 15

Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa)

Code S

Body 316 SS

Bonnet option Code Bonnet No code Standard P Panel installation *3) BP Bonnet port (NPT 1/8 inch) *3) Panel mounting hole: dia.39.6 mm.

Material

Poppet 316 SS

Diaphragm Ni-Cr-Mo alloy

Pressure gauge unit *2)

Ports Code 4PL

Ports 4 ports

Connections (Inletq, Outletw) Code 12

Porting Configuration r w

q

Gauge port (Outlete, r) Code 0 C

e 4PL TOP VIEW

qIN wOUT erGauge port (Outlet)

Connections NPT 3/4 inch

V3 L 1 H 2

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No pressure gauge (Gauge port: 1/4 inch NPT) *2) No pressure gauge (1/4 inch NPT plug is installed before shipment.) -30 in.Hg to 30 psig -0.1 to 0.2 MPa *1) Refer to gauge guide (P.115) for gauge specifi-30 in.Hg to 60 psig -0.1 to 0.4 MPa cations. Select a pressure gauge, which has a -30 in.Hg to 100 psig -0.1 to 0.7 MPa larger pressure range than the delivery pres-30 in.Hg to 160 psig -0.1 to 1.1 MPa sure range of the regulator. -30 in.Hg to 160 psig 0 to 1.5 MPa *2) 1/4 inch NPT plug is included.

Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume

AK9202 1 to 30 psig (0.007 to 0.2 MPa)

AK9206 AK9210 Ak9215 2 to 60 psig 2 to 100 psig 5 to 150 psig (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) 450 psig (3.1 MPa) 1500 psig (10.3 MPa) -40 to 71°C (No freezing) 1.6 1 x 10-10 Pa·m3/s NPT 3/4 inch 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 2.2 in3 (36 cm3)

Wetted Parts Material Wetted Parts Body Nozzle Poppet Diaphragm Seat

83

S 316 SS 316 SS 316 SS Ni-Cr-Mo alloy PFA

Single Stage Regulator for General Applications High flow (Tied-diaphragm)

Series AK9200

Dimensions

Recommendations

inch (mm)

1.125 (28.6)

ø2.62 (ø66.5)

Diaphragm Valves BP AK AZ SL AP Regulators

ø1.5 (ø38.1)

Max. 6.4 (162.6) Max. 6.9 (175.3) (P & BP Option)

AK9200

ø2.99 (ø75.9)

1.5 (38.1)

Vacuum Generators

Check Valves

2 x 1/4-20 UNF depth 0.35 (8.9) (Mounting hole)

AK9200

Inlet pressure:

150 psig (1.0 MPa)

Flow Switches

Flow Characteristics 100 psig (0.69 MPa)

80

0.55

60

0.41

40

0.28

20

0.14

0

0

500

1000 1500 Flow rate (slpm, N2)

2000

0.00 2500

Technical Data/ Glossary of Terms

0.69

Precautions

100

Delivery pressure (MPa)

Delivery pressure (psig)

120

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

84

Two Stage Regulator for General Applications

Low flow (Tied-diaphragm)

Series AK1700 ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm ¡Body material: Stainless steel and Brass available ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡Minimizes supply pressure effect by two stage regulation ¡Tied-diaphragm design

RoHS

How to Order Port Number q

w

e

r

t

AK17 02 S 5PC 4 4 0 0 0 Delivery pressure Code Delivery pressure 02 1 to 30 psig (0.007 to 0.2 MPa) 06 2 to 60 psig (0.014 to 0.4 MPa) 10 2 to 100 psig (0.014 to 0.7 MPa) 20 5 to 200 psig (0.034 to 1.4 MPa)

Material Code Body B Brass S 316 SS SH

Poppet 316 SS

316 SS Ni-Cr-Mo alloy

Porting configuration t

r q

w

Sample Order Number

Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression

Specifications Operating Parameters

Gauge port (Extra bottom outlete, Inletr, Outlett)

Pressure gauge *1) Code psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Gauge port: 1/4 inch NPT) *2)

Poppet feature option Code

Feature Standard No code (First and second stage tied diaphragm) First stage tied, NT second stage free poppet

Seat material No pressure gauge Code Material (1/4 inch NPT plug is installed before shipment.) No code PCTFE (Standard) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa VS Polyimide *3) L -30 in.Hg to 60 psig -0.1 to 0.4 MPa PK PEEK 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa *3) Not available with SH material. H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa Pressure gauge unit *2) 10 0 to 1000 psig 0 to 7 MPa 40 0 to 4000 psig 0 to 28 MPa Code Unit No code psig/bar *1) Refer to gauge guide (P.115) MPA MPa for gauge specifications. Select a pressure gauge, which *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is has a larger pressure range available in Japan. than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included. C

e

5PC

Port q w e r t AK1702S 5PC 4 4 0 0 0 5PC 4 4 0 V3 40 MPA

Delivery pressure

Code Bonnet No code Standard P Panel installation *4) *4) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Diaphragm

Ni-Cr-Mo alloy

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Bonnet option

Connections (Inletq, Outletw)

AK1702 1 to 30 psig (0.007 to 0.2 MPa)

AK1706 AK1710 AK1720 2 to 60 psig 2 to 100 psig 5 to 200 psig (0.014 to 0.4 MPa) (0.014 to 0.7 MPa) (0.034 to 1.4 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 175 psig (1.2 MPa) 4500 psig (30.7 MPa) 8000 psig (55.2 MPa) -40 to 71°C (No freezing) *1) 0.05 1 x 10-10 Pa·m3/s NPT female, Compression 0.05 psig (0.00035 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Option: panel mount 0.9 in3 (15 cm3) 1.95 kg *2)

Gas Source pressure First stage pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Weight *1) Max. 90°C for Polyimide and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC. *2) Weight, including individual boxed weight, may vary depending on connections or options.

85

Two Stage Regulator for General Applications Low flow (Tied-diaphragm)

Series AK1700

SH 316 SS

316 SS 316 SS PCTFE (Option: Polyimide, PEEK)

Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: PEEK)

Dimensions

inch (mm)

AK1700

IN

2.40 (61.0)

OUT

Check Valves

ø2.00 (ø50.8)

Vacuum Generators

ø2.25 (ø57.2)

Max. 6.9 (175.3) Max. 7.5 (190.5) (When selecting option code P)

ø2.12 (ø53.8)

90

0.62

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10 0

0.07 0.00 200

50

100 150 Flow rate (slpm, N2)

Technical Data/ Glossary of Terms

0.69

Delivery pressure (MPa)

Delivery pressure (psig)

Inlet pressure: 200 to 3000 psig (1.4 to 20.7 MPa)

100

0

Flow Switches

Flow Characteristics AK1700

Diaphragm Valves BP AK AZ SL AP Regulators

S

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

86

Precautions

B Brass

Wetted Parts Body Poppet Diaphragm Seat

Recommendations

Wetted Parts Material

Back Pressure Regulator for General Applications Series BP1000 ¡Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) ¡Body material: Stainless steel and Brass available ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

w

e

r

BP10 01 S 4PL 4 4 0 0 Operating pressure

Bonnet option

Code pressure 01 0.5 to 10 psig (0.0034 to 0.07 MPa) 02 1 to 30 psig (0.007 to 0.2 MPa) 06 2 to 60 psig (0.014 to 0.4 MPa) 10 5 to 100 psig (0.034 to 0.7 MPa) 20 15 to 200 psig (0.1 to 1.4 MPa) 30 15 to 300 psig (0.1 to 2.1 MPa)

Connections (Inletq, Outletw) Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression

Material Code B S SH

Body Brass 316 SS

Nozzle

Diaphragm

316 SS

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Gauge port (Inlete, r)

Ports

2P 4PL

Please refer to the following porting configurations.

Material B S, SH V V V

Porting Configuration r w

q

2P

w

q

e

qIN wOUT erGauge port (Inlet)

Seat material Code No code TF KZ

Material FKM (Standard) PTFE FFKM

Pressure gauge *1) psig/bar unit MPa unit Pressure gauge unit *2) No code No gauge port Code Unit 2) No pressure gauge * 0 No code psig/bar (Gauge port: 1/4 inch NPT) MPA MPa No pressure gauge C (1/4 inch NPT plug is installed before shipment.) *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa regulation, only MPa is available in 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa Japan. H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa 4 0 to 400 psig 0 to 3 MPa 10 0 to 1000 psig 0 to 7 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range Sample Order Number than the delivery pressure e r Port range of the regulator. BP10 01 S 2P 4 4 *2) 1/4 inch NPT plug is included 4PL 4 4 0 1 MPA only for port code 4PL. Code

Ports Code

Code Bonnet No code Standard P Panel installation *3) *3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

4PL

Specifications BP1001 BP1002 BP1006 BP1010 BP1020 BP1030 15 to 200 psig 15 to 300 psig 1 to 30 psig 2 to 60 psig 5 to 100 psig 0.5 to 10 psig Operating pressure (0.0034 to 0.07 MPa) (0.007 to 0.2 MPa) (0.014 to 0.4 MPa) (0.034 to 0.7 MPa) (0.1 to 1.4 MPa) (0.1 to 2.1 MPa) Gas Select compatible materials of construction for the gas Proof pressure (Inlet) 15 psig (0.105 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 450 psig (3.15 MPa) Burst pressure 30 psig (0.2 MPa) 90 psig (0.6 MPa) 180 psig (1.2 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 900 psig (6.2 MPa) Ambient and operating temperature -10 to 71°C (No freezing) *1) Cv 0.3 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.2 kg *2) *1) Min. -30°C for PTFE seat. Optional ambient and operating temperature range available. Please contact SMC. *2) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

87

Back Pressure Regulator for General Applications

Series BP1000

B Brass

S

SH 316 SS

316 SS 316 SS FKM (Option: PTFE, FFKM) PTFE

Ni-Cr-Mo alloy Ni-Cr-Mo alloy

Diaphragm Valves BP AK AZ SL AP Regulators

Wetted Parts Body Diaphragm Nozzle Seat Seal

Recommendations

Wetted Parts Material

Dimensions BP1000

ø2.25 (ø57.2)

IN

0.88 (22.4)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Vacuum Generators

ø2.00 (ø50.8)

Check Valves

0.69 (17.5)

OUT

Max. 4.9 (127) Max. 5.6 (142) (Option: panel mount)

ø2.12 (ø53.8)

Flow Characteristics

28

0.19

26

0.18

24

0.17

22

0.15

20

0.14

18

0.12

16

0

20

40 60 80 Flow rate (slpm, N2)

100

Flow Switches

0.21

Technical Data/ Glossary of Terms

30

Back pressure (MPa)

Back pressure (psig)

BP1000

0.11

Precautions

Note) s lpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

88

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 ¡For UHP gas delivery ¡Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) ¡Body material: 316L SS secondary remelt ¡Ni-Cr-Mo alloy internals available for corrosion resistance

RoHS

How to Order Port Number q

BP10 01 S

w

2PW FV4 FV4

Bonnet option

Operating pressure Code Pressure 01 0.5 to 10 psig (0.0034 to 0.07 MPa) 02 1 to 30 psig (0.007 to 0.2 MPa) 10 5 to 100 psig (0.034 to 0.7 MPa) 20 15 to 200 psig (0.1 to 1.4 MPa) 30 15 to 300 psig (0.1 to 2.1 MPa)

Connections (Inletq, Outletw) Code FV4 MV4 TW4 FV6 MV6 TW6

Material Code Body S 316L SS SH secondary remelt

Nozzle Diaphragm 316L SS Ni-Cr-Mo alloy

Surface finish

Code 2PW 3PW

e q w 2PW

Ports 2 ports 3 ports

q 3PW

Code Bonnet No code Standard P Panel installation *3) *3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Seat material Code No code TF KZ

Material FKM (Standard) PTFE FFKM

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Gauge port: 1/4 inch NPT) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa 2 -30 in.Hg to 160 psig 0 to 1.4 MPa 4 0 to 400 psig 0 to 3 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Ports

w

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Gauge port (Inlete)

Code Surface finish Ra max No code 15 µin. (0.4 µm) Standard M 10 µin. (0.25 µm) V 7 µin. (0.18 µm) X 5 µin. (0.13 µm)

Porting Configuration

e

Sample Order Number

qIN wOUT eGauge port (Inlet)

e Port BP10 01 S 2PW FV4 FV4 3PW FV4 FV4 V3 MPA

Specifications

BP1002 BP1010 BP1020 BP1030 15 to 300 psig 1 to 30 psig 5 to 100 psig 15 to 200 psig (0.007 to 0.2 MPa) (0.034 to 0.7 MPa) (0.1 to 1.4 MPa) (0.1 to 2.1 MPa) Gas Select compatible materials of construction for the gas Proof pressure (Inlet) 15 psig (0.105 MPa) 45 psig (0.3 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 450 psig (3.15 MPa) Burst pressure 30 psig (0.2 MPa) 90 psig (0.6 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 900 psig (6.2 MPa) Ambient and operating temperature -10 to 71°C (No freezing) *1) Cv 0.3 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s He Across the seat leak Bubble tight Surface finish Ra ma x 15 µin. (0.4 µm) Option: 10 µin. (0.25 µm), 7 µin. (0.18 µm), 5 µin. (0.13 µm) Connections Face seal, Tube weld Installation Bottom mount (Option: panel mount) Internal volume 0.49 in3 (8 cm3) Weight 1.2 kg *2) *1) Min. -30°C for PTFE seat. Optional ambient and operating temperature range available. Please contact SMC. *2) Weight, including individual boxed weight, may vary depending on connections or options. Operating Parameters

Operating pressure

89

BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa)

Welded Connection Series Back Pressure Regulator for Ultra High Purity

Series BP1000

S SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy FKM (Option: PTFE, FFKM) PTFE

Wetted Parts Body Diaphragm Nozzle Seat Seal

Dimensions

inch (mm)

BP1000

ø1.50 (ø38.1)

inch

(mm)

3.70

(94.0)

2.96

(75.2)

A 0.88 (22.4)

4.70 (119.4) 2.96

Check Valves

FV4 MV4 TW4 FV6 MV6 TW6

2 x 10-32 UNF depth 0.3 (6.4) (Mounting hole)

(75.2)

Vacuum Generators

Connections

ø2.00 (ø50.8)

A

0.69 (17.5)

ø2.25 (ø57.2)

Max. 5.0 (127) Max. 5.6 (142) (P Option)

ø2.12 (ø53.8)

Flow Switches

Flow Characteristics

0.19

26

0.18

24

0.17

22

0.15

20

0.14

18

0.12

16

0

20

40 60 80 Flow rate (slpm, N2)

100

Technical Data/ Glossary of Terms

28

Precautions

0.21

Back pressure (MPa)

Back pressure (psig)

BP1000 30

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

0.11

Note) s lpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

90

Pneumatic Actuation Pressure Regulator

Low flow

Series AP10PA ¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order

Port Number q

AP10 PA S

w

2PW FV4 FV4

e

r

Option

Delivery pressure Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Connections (Inletq, Outletw) Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP secondary remelt SH Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo alloy alloy Ni-Cr-Mo alloy H alloy

Gauge port (Inlete, Outletr)

Surface finish Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration (Top view) r w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Maximum control pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Control pressure port Bonnet port Supply pressure effect Installation Internal volume *1) Max. 300 psig (2.1 MPa) for PTFE seat. *2) Max. 90°C for Polyimide seat.

91

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Code Specification Standard No code (Cv: 0.09) High flow HF (Cv: 0.15) *6) *6) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) TF PTFE *4) *5) *3) Not available with SHP, SH, H materials. *4) Source pressure rating is limited to 300 psig (2.1 MPa) or less. *5) PTFE seats reduce seat abrasion for flow cycle application. Gas permeation is greater with PTFE than PCTFE. Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AP10PA 7 to 150 psig (0.05 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) *1) 5000 psig (34.5 MPa) 10000 psig (69 MPa) 150 psig (1.0 MPa) -40 to 71°C (No freezing) *2) 0.09 2 x 10-11 Pa·m3/s 2 x 10-10 Pa·m3/s *3) 4 x 10-9 Pa·m3/s *4) Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Face seal, Tube weld NPT 1/8 inch NPT 1/8 inch 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount 0.49 in3 (8 cm3) *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa).

Pneumatic Actuation Pressure Regulator Low flow

Series AP10PA

ø1.86 (ø47.2)

CONTROL PRESSURE PORT

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

BONNET VENT PORT ø1.50 (ø38.1) ø2.25 (ø57.2)

Max. 4.5 (114)

0

0

50

0.69 (17.5)

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14 0

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

A inch

(mm)

3.70

(94.0)

2.96

(75.2)

4.70 (119.4) 2.96

Precautions

FV4 MV4 TW4 FV6 MV6 TW6

Inlet pressure:

140

0

Connections

0.00 400

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10 Delivery pressure (psig)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

350

Input/Output Characteristics

ø2.00 (ø50.8)

0.88 (22.4)

150 200 250 300 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

AP10PA

A

100

Diaphragm Valves BP AK AZ SL AP Regulators

AP10PA

80

Check Valves

inch (mm)

300 psig (2.1 MPa) 100 psig (0.69 MPa)

Technical Data/ Glossary of Terms

Dimensions

Inlet pressure:

AP10PA

Delivery pressure (MPa)

Seat

S SHP SH H 316L SS secondary remelt Ni-Cr-Mo alloy Electropolish + Passivation Electropolish 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy PCTFE PCTFE (Option: PTFE) (Option: Polyimide, PTFE)

Delivery pressure (MPa)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle

Flow Characteristics

Delivery pressure (psig)

Wetted Parts Material

Vacuum Generators

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AP10PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop *) HF option will not achieve rated outlet pressure at all inlet pressures.

Flow Switches

High flow

Recommendations

Option

(75.2)

92

Low flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AP15PA

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 800 psig (0.55 MPa) control pressure or less

RoHS

How to Order Port Number q

AP15 PA S

w

2PW FV4 FV4

e

Delivery pressure Code PA

Seat material

Delivery pressure 7 to 150 psig (0.05 to 1.0MPa)

Connections (Inletq, Outletw) Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP secondary remelt SH Ni-Cr-Mo Ni-Cr-Mo Ni-Cr-Mo alloy alloy Ni-Cr-Mo alloy H alloy

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration (Top view) r w

q w

2PW

r q w

3PW

r

e q

4PW

Gauge port (Inlete, Outletr)

Code

Material PCTFE No code (Standard) VS Polyimide *3) *3) Not available with SHP, SH, H materials.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters AP15PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 0.51 in3 (8.4 cm3) *1) Max. 90°C for Polyimide seat. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa).

93

Pneumatic Actuation Pressure Regulator

Series AP15PA

Low flow (Tied-diaphragm)

Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE

316L SS PCTFE (Option: Polyimide)

Dimensions

inch (mm) ø1.86 (ø47.2)

CONTROL PRESSURE PORT

BONNET VENT PORT ø1.50 (ø38.1)

0.69 (17.5)

ø2.25 (ø57.2)

Max. 4.5 (114)

AP15PA

ø2.00 (ø50.8)

Check Valves

A 0.88 (22.4) inch

(mm)

3.70

(94.0)

2.96

(75.2)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

4.70 (119.4) (75.2)

Flow Characteristics

Delivery pressure (psig)

300 psig (2.1 MPa) 100 psig (0.69 MPa)

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0

50

100 150 200 250 Flow rate (slpm, N2)

300

AP15PA

Inlet pressure:

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10 Delivery pressure (MPa)

Inlet pressure:

AP15PA

Input / Output Characteristics

0.00 350

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

Precautions

2.96

Delivery pressure (MPa)

FV4 MV4 TW4 FV6 MV6 TW6

A

Delivery pressure (psig)

Connections

Diaphragm Valves BP AK AZ SL AP Regulators

316L SS 316L SS

H Ni-Cr-Mo alloy Electropolish

Vacuum Generators

SH

Flow Switches

SHP 316L SS secondary remelt Electropolish + Passivation

Technical Data/ Glossary of Terms

S

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Recommendations

Wetted Parts Material

Note) s lpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

94

Intermediate flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AP14PAT

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity: to 400 slpm ¡Ni-Cr-Mo alloy internals standard ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order

Port Number q

AP14 PA T S

w

2PW FV4 FV4

e

r

Delivery pressure

Option

Code Delivery pressure 7 to 150 psig PA (0.05 to 1.0 MPa)

Connections (Inletq, Outletw) Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS Ni-Cr-Mo Ni-Cr-Mo secondary Ni-Cr-Mo alloy alloy SH remelt alloy

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration(Top View) r w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Code No code

Specification Standard High inlet pressure *4) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *4) *3) Not available with SH material.

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Operating Parameters AP14PAT Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 2300 psig (15.9 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.45 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 1.06 in3 (17.4 cm3) *1) Max. 90°C for Polyimide seat. *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa).

95

Pneumatic Actuation Pressure Regulator Intermediate flow (Tied-diaphragm)

Series AP14PAT

Flow Characteristics

CONTROL PRESSURE PORT

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

ø1.88 (ø47.6)

ø2.62 (ø66.5)

Max. 4.9 (124.5)

0 BONNET VENT PORT

0

0.00 50 100 150 200 250 300 350 400 450 500 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Input / Output Characteristics Inlet pressure:

AP14PAT 0.69 (17.5)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 1.10 160

0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Delivery pressure (psig)

øA B

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8

A inch

(mm)

2.00

(50.8)

0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

B inch (mm) 3.70 (94.0) 4.00 (101.6) 3.46 (87.9) 5.22 (132.6)

2.50

(63.5)

4.00 (101.6)

Precautions

Connections

2300 psig (15.9 MPa) 250 psig (1.7 MPa)

Technical Data/ Glossary of Terms

ø2.74 (ø69.6)

80

Delivery pressure (MPa)

AP14PAT

inch (mm)

100 psig (0.69 MPa) 60 psig (0.41 MPa)

Delivery pressure (MPa)

Dimensions

Inlet pressure:

AP14PAT

Delivery pressure (psig)

Wetted Parts S SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet Ni-Cr-Mo alloy Diaphragm Ni-Cr-Mo alloy Nozzle 316L SS Ni-Cr-Mo alloy Seat PCTFE (Option: Polyimide) PCTFE

Check Valves

Wetted Parts Material

Vacuum Generators

Changes from the standard type are: Option Other Parameters AP14PAT Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HR option will not achieve rated outlet pressure at all inlet pressures.

Flow Switches

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

5.22 (132.6) 4.34 (110.2)

96

High flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AP12PA

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity Standard: to 800 slpm HF (option): to 1000 slpm RoHS ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

How to Order Port Number q

AP12 PA S

2PW FV8 FV8

Delivery pressure

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS SHP Ni-Cr-Mo secondary Ni-Cr-Mo alloy Ni-Cr-Mo remelt alloy SH alloy

Surface finish Code Surface finish Ra max No code 15 min. (0.4 mm) Standard M 10 min. (0.25 mm) V 7 min. (0.18 mm) X 5 min. (0.13 mm)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration (Top View) w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

e

r

Connections (Inletq, Outletw)

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

r

w

Code Connections FV4 1/4 inch face seal (Female) MV4 1/4 inch face seal (Male) TW4 1/4 inch tube weld FV6 3/8 inch face seal (Female) MV6 3/8 inch face seal (Male) TW6 3/8 inch tube weld FV8 1/2 inch face seal (Female) MV8 1/2 inch face seal (Male) TW8 1/2 inch tube weld FV12 3/4 inch face seal (Female) *1) MV12 3/4 inch face seal (Male) *1) TW12 3/4 inch tube weld *1) Prepare a suitable mating fitting with a rated pressure.

Gauge port (Inlete, Outletr)

Pressure gauge *2) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *2) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Option Code Specification No code Standard (Cv: 0.65) HF High flow (Cv: 1.1) *5) High inlet pressure *5) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *5) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *4) *4) Not available with SHP and SH materials. Pressure gauge unit *3) Code Unit No code psig/bar MPA MPa *3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Operating Parameters AP12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1700 psig (11.7 MPa) Proof pressure (Inlet) 2550 psig (17.6 MPa) Burst pressure 8000 psig (55.2 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.65 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra max 15 min. (0.4 mm) Option: 10 min. (0.25 mm), 7 min. (0.18 mm), 5 min. (0.13 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 1.20 in3 (19.6 cm3) *1) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).

97

Pneumatic Actuation Pressure Regulator High flow (Tied-diaphragm)

Series AP12PA

Wetted Parts S SHP SH Body 316L SS secondary remelt Surface finish Electropolish + Passivation Poppet 316L SS Ni-Cr-Mo alloy Diaphragm Ni-Cr-Mo alloy Nozzle 316L SS Ni-Cr-Mo alloy Seat PCTFE (Option: Polyimide) PCTFE

AP12PA

Dimensions

inch (mm)

AP12PA

CONTROL PRESSURE PORT

80

0.55

70

0.48

60

0.41

50

0.35

40

0.28

30

0.21

20

0.14

10

0.07

ø2.62 (ø66.5)

0

0.00 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 1/2 inch connections

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Input / Output Characteristics Inlet pressure:

AP12PA 0.69 (17.5)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 160 1.10

B

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Connections FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 FV12 MV12 TW12

A inch (mm) inch 3.70 2.00 (50.8) 4.00 3.46

B (mm) (94.0) (101.6) (87.9)

5.22 (132.6) 4.00 (101.6) 2.50 (63.5)

5.22 (132.6) 4.34 (110.2)

Delivery pressure (psig)

øA

0.88 (22.4)

1700 psig (11.7 MPa) 250 psig (1.7 MPa)

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

Precautions

ø1.88 (ø47.6)

Max. 4.9 (124.5)

0 BONNET VENT PORT

100 psig (0.69 MPa) 60 psig (0.41 MPa)

Delivery pressure (MPa)

ø2.74 (ø69.6)

Inlet pressure:

Delivery pressure (MPa)

Flow Characteristics

Delivery pressure (psig)

Wetted Parts Material

Check Valves

Changes from the standard type are: Option Other Parameters AP12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HF and HR option will not achieve rated outlet pressure at all inlet pressures.

Vacuum Generators

2. High inlet pressure

Flow Switches

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AP12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 1.1 HF Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Technical Data/ Glossary of Terms

1. High flow

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Options

6.26 (159.0) 5.00 (127.0)

98

Pneumatic Actuation Pressure Regulator

Low flow

Series AZ10PA ¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order

Port Number q

AZ10 PA S

w

2PW FV4 FV4

e

r

Option

Delivery pressure

Code

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

No code

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS SHP Ni-Cr-Mo alloy Ni-Cr-Mo alloy

Surface finish Code No code Q

Surface finish Ra 10 min. (0.25 mm) Standard 25 min. (0.62 mm)

Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Maximum control pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Control pressure port Bonnet port Supply pressure effect Installation Internal volume *1) Max. 300 psig (2.1 MPa) for PTFE seat. *2) Max. 90°C for Polyimide seat.

99

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Porting Configuration (Top View) r

Gauge port (Inlete, Outletr)

HF

Specification Standard (Cv: 0.09) High flow (Cv: 0.15) *6)

*6) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) TF PTFE *4)*5) *3) Not available with SHP material. *4) PTFE recommended for applications such as within a process tool. *5) Source pressure rating is limited to 300 psig (2.1 MPa) or less. Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

AZ10PA 7 to 150 psig (0.05 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) *1) 5000 psig (34.5 MPa) 10000 psig (69 MPa) 150 psig (1.0 MPa) -40 to 71°C (No freezing) *2) 0.09 2 x 10-11 Pa·m3/s 2 x 10-10 Pa·m3/s *3) 4 x 10-9 Pa·m3/s *4) Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Face seal, Tube weld NPT 1/8 inch NPT 1/8 inch 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount 0.49 in3 (8 cm3) *3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). *4) Tested with Helium gas inlet pressure 1000 psig (7 MPa).

Pneumatic Actuation Pressure Regulator Low flow

Series AZ10PA

inch (mm)

AZ10PA ø1.86 (ø47.2)

CONTROL PRESSURE PORT

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0.69 (17.5)

ø2.25 (ø57.2)

ø2.00 (ø50.8) A 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

100

150 200 250 300 Flow rate (slpm, N2)

350

0.00 400

AZ10PA

Inlet pressure:

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10 140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14 0

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

A inch

(mm)

3.70

(94.0)

4.70 (119.4) 2.96

(75.2)

Precautions

FV4 MV4 FV6 MV6 TW6

50

Input / Output Characteristics

0

Connections

0

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Delivery pressure (psig)

BONNET VENT PORT ø1.50 (ø38.1)

Max. 4.5 (114)

0

Diaphragm Valves BP AK AZ SL AP Regulators

Dimensions

300 psig (2.1 MPa) 100 psig (0.69 MPa)

Technical Data/ Glossary of Terms

316L SS Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS PCTFE PCTFE (Option: Polyimide, PTFE) (Option: PTFE)

Inlet pressure:

AZ10PA

Delivery pressure (MPa)

SHP

Delivery pressure (MPa)

Seat

S

Delivery pressure (psig)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle

Check Valves

Flow Characteristics

Wetted Parts Material

Vacuum Generators

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AZ10PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop *) HF option will not achieve rated outlet pressure at all inlet pressures.

Flow Switches

High flow

Recommendations

Option

100

Pneumatic Actuation Pressure Regulator

Low flow (Tied-diaphragm)

Series AZ15PA ¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order Port Number

AZ15 PA S

q

w

2PW FV4 FV4

e

Seat material

Delivery pressure

Code Material No code PCTFE (Standard) VS Polyimide *3) *3) Not available with SHP material. Pressure gauge unit *2)

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Material Code Body Poppet Diaphragm Nozzle S 316L SS 316L SS 316L SS 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy SHP

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Surface finish Code No code Q

Surface finish Ra 10 min. (0.25 mm) Standard 25 min. (0.62 mm)

Porting Configuration (Top View) r w

q w

2PW r w

q

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

r

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa 2 -30 in.Hg to 160 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Other range available. Refer to gauge guide (P.115). Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters AZ15PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 5000 psig (34.5 MPa) Burst pressure 10000 psig (69 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.09 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 0.51 in3 (8.4 cm3) *1) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).

101

Pneumatic Actuation Pressure Regulator Low flow (Tied-diaphragm)

Series AZ15PA

S

SHP 316L SS Electropolish + Passivation 316L SS Ni-Cr-Mo alloy 316L SS Ni-Cr-Mo alloy 316L SS PCTFE (Option: Polyimide) PCTFE

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Dimensions

inch (mm) ø1.86 (ø47.2)

CONTROL PRESSURE PORT

BONNET VENT PORT ø1.50 (ø38.1)

0.69 (17.5)

ø2.25 (ø57.2)

Max. 4.5 (114)

AZ15PA

ø2.00 (ø50.8)

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Wetted Parts Material

(mm)

3.70

(94.0)

0.88 (22.4)

80

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

50

100 150 200 250 Flow rate (slpm, N2)

300

AZ15PA

Inlet pressure:

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10

0.00 350

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

102

Flow Switches

Delivery pressure (psig)

300 psig (2.1 MPa) 100 psig (0.69 MPa)

Delivery pressure (MPa)

Inlet pressure:

AZ15PA

Input / Output Characteristics

Technical Data/ Glossary of Terms

(75.2)

Precautions

2.96

Vacuum Generators

4.70 (119.4)

Flow Characteristics

0

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Delivery pressure (MPa)

FV4 MV4 FV6 MV6 TW6

A inch

Delivery pressure (psig)

Connections

Check Valves

A

Intermediate flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AZ14PAT

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316 SS secondary remelt ¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity: to 400 slpm ¡Ni-Cr-Mo alloy internals standard ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order Port Number q

AZ14 PA T S

w

2PW FV4 FV4

e

r

Delivery pressure Code PA

Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa)

Option Connections (Inletq, Outletw) Code FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

Material Code S

Body 316L SS

Poppet Ni-Cr-Mo alloy

Diaphragm Ni-Cr-Mo alloy

Surface finish Code No code Q

Surface finish Ra 10 min. (0.25 mm) Standard 25 min. (0.62 mm)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration (Top View) r w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

Gauge port (Inlete, Outletr)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge 0 (Connections: 1/4 inch face seal male) V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa -30 in.Hg to 60 psig -0.1 to 0.4 MPa L 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa 2 0 to 200 psig 0 to 1.4 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Code No code

Specification Standard High inlet pressure *3) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *3) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide

Pressure gauge unit *2) Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Operating Parameters AZ14PAT Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 2300 psig (15.9 MPa) Proof pressure (Inlet) 4000 psig (27.6 MPa) Burst pressure 8000 psig (55.2 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.45 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 1.06 in3 (17.4 cm3) *1) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).

103

Pneumatic Actuation Pressure Regulator Intermediate flow (Tied-diaphragm)

Series AZ14PAT

CONTROL PRESSURE PORT

0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

ø1.88 (ø47.6)

0.69 (17.5)

ø2.62 (ø66.5)

ø2.50 (ø63.5) A 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Inlet pressure:

AZ14PAT

2300 psig (15.9 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 160 1.10 140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14 0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

A inch

(mm)

4.30 (109.2) 5.22 (132.6) 4.00 (101.6) 5.22 (132.6)

Precautions

FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

0.00 50 100 150 200 250 300 350 400 450 500 Flow rate (slpm, N2)

Input / Output Characteristics

0

Connections

0

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Delivery pressure (psig)

BONNET VENT PORT

Max. 4.9 (124.5)

0

Technical Data/ Glossary of Terms

ø2.74 (ø69.6)

80

Delivery pressure (MPa)

AZ14PAT

100 psig (0.69 MPa) 60 psig (0.41 MPa)

Delivery pressure (MPa)

inch (mm)

Delivery pressure (psig)

Dimensions

Inlet pressure:

AZ14PAT

S 316L SS Electropolish + Passivation Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316L SS PCTFE (Option: Polyimide)

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat

Check Valves

Flow Characteristics

Wetted Parts Material

Vacuum Generators

Changes from the standard type are: Option Other Parameters AZ14PAT Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HR option will not achieve rated outlet pressure at all inlet pressures.

Flow Switches

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

4.34 (110.2)

104

Pneumatic Actuation Pressure Regulator

High flow (Tied-diaphragm)

Series AZ12PA ¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity Standard: to 800 slpm HF (option): to 1000 slpm RoHS ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

How to Order Port Number q

AZ12 PA S

w

2PW FV8 FV8

e

r

Delivery pressure Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Option Connections (Inletq, Outletw)

Material Code Body Poppet Diaphragm S 316L SS 316L SS Ni-Cr-Mo alloy SHP Ni-Cr-Mo alloy

Surface finish Code No code Q

Surface finish Ra 10 min. (0.25 mm) Standard 25 min. (0.62 mm)

Ports Code 2PW 3PW 4PW

Ports 2 ports 3 ports 4 ports

Porting Configuration (Top View) r w

q w

2PW

r q w

3PW

e q

4PW

qIN wOUT eGauge port (Inlet) rGauge port (Outlet)

Specifications

Code FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld

Gauge port (Inlete, Outletr)

Code Specification No code Standard (Cv: 0.65) HF High flow (Cv: 1.1) *4) High inlet pressure *4) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) *3) Not available with SHP material.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge Pressure gauge unit *2) 0 (Connections: 1/4 inch face seal male) Code Unit V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa No code psig/bar L -30 in.Hg to 60 psig -0.1 to 0.4 MPa MPA MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa *2) Pressure gauge unit MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa or psig/bar selectable. 2 -30 in.Hg to 160 psig 0 to 1.4 MPa However under Japanese 40 0 to 4000 psig 0 to 28 MPa regulation, only MPa is *1) Refer to gauge guide (P.115) for gauge available in Japan. specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. Code

Operating Parameters AZ12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1700 psig (11.7 MPa) Proof pressure (Inlet) 2550 psig (17.6 MPa) Burst pressure 8000 psig (55.2 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *1) Cv 0.65 Inboard leakage 2 x 10-11 Pa·m3/s Leak rate Outboard leakage 2 x 10-10 Pa·m3/s *2) Across the seat leak 4 x 10-9 Pa·m3/s *3) Surface finish Ra 10 min. (0.25 mm) Option: 25 min. (0.62 mm) Connections Face seal, Tube weld Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 1.20 in3 (19.6 cm3) *1) Max. 90°C for Polyimide seat. *3) Tested with Helium gas inlet pressure 1000 psig (7 MPa). *2) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).

105

Pneumatic Actuation Pressure Regulator High flow (Tied-diaphragm)

Series AZ12PA

Flow Characteristics

Seat

Dimensions ø2.74 (ø69.6)

CONTROL PRESSURE PORT

BONNET VENT PORT

ø1.88 (ø47.6)

ø2.50 (ø63.5) A 0.88 (22.4)

FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8

inch

(mm)

4.30 (109.2) 5.22 (132.6)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

60 psig (0.41 MPa) 1/2 inch connections 0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0.00 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Input / Output Characteristics Inlet pressure:

AZ12PA

1700 psig (11.7 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 160 1.10 140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

4.00 (101.6)

Precautions

Connections

A

0.69 (17.5)

ø2.62 (ø66.5)

100 psig (0.69 MPa)

80

0 0 Max. 4.9 (124.5)

AZ12PA

inch (mm)

Inlet pressure:

Delivery pressure (MPa)

316L SS Electropolish + Passivation 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316L SS PCTFE PCTFE (Option: Polyimide)

AZ12PA

Delivery pressure (MPa)

SHP

Delivery pressure (psig)

S

Wetted Parts Body Surface finish Poppet Diaphragm Nozzle

Delivery pressure (psig)

Wetted Parts Material

Check Valves

Changes from the standard type are: Option Other Parameters AZ12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HF and HR option will not achieve rated outlet pressures at all inlet pressures.

Vacuum Generators

2. High inlet pressure

Flow Switches

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AZ12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 1.1 HF Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Technical Data/ Glossary of Terms

1. High flow

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Options

5.22 (132.6) 4.34 (110.2)

106

Pneumatic Actuation Pressure Regulator

Low flow

Series AK10PA ¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316 SS ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

How to Order

RoHS

Port Number q

w

e

AK10 PA S 4PL 4 4 0

r

t

0

Delivery pressure

Option

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Connections (Inletq, Outletw)

Material Code Body B Brass S 316 SS SH

Poppet

Diaphragm

316 SS

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression 6T 3/8 inch compression

Ports Code

Ports

2P 3P 4P 4PL 5PC

Refer to the following porting configurations.

Material B S, SH V V V V V V V

Porting Configuration (Top View) t w

q

w

t q

2P

r

w

q

3P t

t w

q

e

4PL

w

4P r q

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Gauge port (Extra bottom outlete, Inletr, Outlett)

Code Specification No code Standard (Cv: 0.09) HF High flow (Cv: 0.15) *6) *6) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) PK PEEK TF PTFE *4) *5) *3) Not available with SH material. *4) Source pressure rating is limited to 300 psig (2.1 MPa) or less. *5) PTFE seats reduce seat abrasion for flow cycle application. Gas permeation is greater with PTFE than PCTFE.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port 0 No pressure gauge (Gauge port: 1/4 inch NPT) *2) C No pressure gauge (1/4 inch NPT plug is installed before shipment.) V15 -30 in.Hg to 30 psig -0.1 to 0.1 MPa V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa 4 0 to 400 psig 0 to 3 MPa Pressure gauge unit *2) 10 0 to 1000 psig 0 to 7 MPa Code Unit 30 0 to 3000 psig 0 to 21 MPa No code psig/bar 40 0 to 4000 psig 0 to 28 MPa MPA MPa *1) Refer to gauge guide (P.115) for gauge *2) Pressure gauge unit MPa or specifications. Select a pressure gauge, psig/bar selectable. However which has a larger pressure range than the under Japanese regulation, delivery pressure range of the regulator. only MPa is available in Japan. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

Specifications Operating Parameters AK10PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) *1) Proof pressure (Inlet) 4500 psig (30.7 MPa) Burst pressure 10000 psig (69 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *2) Cv 0.09 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 0.49 in3 (8 cm3) *1) Max. 300 psig (2.1 MPa) for PTFE seat. *2) Max. 90°C for Polyimide and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC.

107

Pneumatic Actuation Pressure Regulator Low flow

Series AK10PA

Dimensions CONTROL PRESSURE PORT ø1.87 (ø47.2)

ø2.00 (ø50.8)

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

50

AK10PA

100

150 200 250 300 Flow rate (slpm, N2)

350

0.00 400

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Inlet pressure:

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.35 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10 Delivery pressure (psig)

0.69 (17.5) 0.88 (22.4)

0.48

Input / Output Characteristics

IN

OUT

70

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Max. 4.5 (114)

ø2.25 (ø57.2)

0.55

0

ø1.50 (ø38.1) BONNET VENT PORT

80

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

Precautions

AK10PA

inch (mm)

300 psig (2.1 MPa) 100 psig (0.69 MPa)

Diaphragm Valves BP AK AZ SL AP Regulators

316 SS 316 SS Ni-Cr-Mo alloy 316 SS Ni-Cr-Mo alloy PCTFE PCTFE (Option: Polyimide, PEEK, PTFE) (Option: PEEK, PTFE)

Inlet pressure:

AK10PA

Check Valves

SH

Delivery pressure (MPa)

S

Delivery pressure (MPa)

Seat

B Brass

Delivery pressure (psig)

Wetted Parts Body Poppet Diaphragm

Vacuum Generators

Flow Characteristics

Wetted Parts Material

Flow Switches

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AK10PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 0.15 HF Supply pressure effect 0.75 psig (0.0052 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop *) HF option will not achieve rated outlet pressure at all inlet pressures.

Technical Data/ Glossary of Terms

High flow

Recommendations

Option

108

Low flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AK15PA

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316L SS secondary remelt ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order

Port Number q

w

e

AK15 PA S 4PL 4 4 0

r

t

0

Delivery pressure

Seat material

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Connections (Inletq, Outletw)

Material Code Body B Brass S 316 SS SH

Poppet

Diaphragm

316 SS

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Code Connections 4 NPT 1/4 inch 4T 1/4 inch compression 6T 3/8 inch compression

Pressure gauge unit *2)

Ports Code

Ports

2P 3P 4PL 5PC

Refer to the following porting configurations.

Material B S, SH V V V V V V

Porting Configuration (Top View) t w

q w 2P t

w

3P t

q w

e 4PL

q

r q

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Code Material No code PCTFE (Standard) VS Polyimide *3) PK PEEK *3) Not available with SH material.

Gauge port (Extra bottom outlete, Inletr, Outlett) Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge (Gauge port: 1/4 inch NPT) *2) 0 C No pressure gauge (1/4 inch NPT plug is installed before shipment.) V15 -30 in.Hg to 30 psig -0.1 to 0.1 MPa V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa -30 in.Hg to 100 psig -0.1 to 0.7 MPa 1 H -30 in.Hg to 160 psig -0.1 to 1.1 MPa -30 in.Hg to 200 psig -0.1 to 1.4 MPa V2 -30 in.Hg to 160 psig 0 to 1.5 MPa 2 4 0 to 400 psig 0 to 3 MPa 10 0 to 1000 psig 0 to 7 MPa 30 0 to 3000 psig 0 to 21 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Specifications Operating Parameters AK15PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 3500 psig (24.1 MPa) Proof pressure (Inlet) 4500 psig (30.7 MPa) Burst pressure 10000 psig (69 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *) Cv 0.09 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 0.53 in3 (8.7 cm3) *) Max. 90°C for Polyimide and PEEK seat. Optional ambient and operating temperature range available. Please contact SMC.

109

Pneumatic Actuation Pressure Regulator Low flow (Tied-diaphragm)

Series AK15PA

Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: PEEK)

Dimensions

inch (mm)

AK15PA

CONTROL PRESSURE PORT ø1.87 (ø47.2)

BONNET VENT PORT

0.88 (22.4)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

ø2.00 (ø50.8)

Flow Characteristics 300 psig (2.1 MPa) 100 psig (0.69 MPa) 0.55

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07

0

0.00 350

0

50

100 150 200 250 Flow rate (slpm, N2)

300

Inlet pressure:

3500 psig (24.1 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 0.76 0.83 160 1.10 140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

Delivery pressure (MPa)

80

AK15PA

Delivery pressure (psig)

Delivery pressure (psig)

Input/Output Characteristics

Delivery pressure (MPa)

Inlet pressure:

AK15PA

Check Valves

0.69 (17.5)

ø2.25 (ø57.2)

Max. 4.5 (114)

ø1.50 (ø38.1)

0.00 10 20 30 40 50 60 70 80 90 100 110 120 Control pressure (psig)

Precautions

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Vacuum Generators

316 SS 316 SS PCTFE (Option: Polyimide, PEEK)

Diaphragm Valves BP AK AZ SL AP Regulators

SH 316 SS

Flow Switches

S

Technical Data/ Glossary of Terms

B Brass

Wetted Parts Body Poppet Diaphragm Seat

Recommendations

Wetted Parts Material

110

Intermediate flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AK14PAT

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316 SS ¡High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity: to 400 slpm ¡Ni-Cr-Mo alloy internals standard ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa)

RoHS

How to Order Port Number q

w

e

AK14 PA T S 4PL 6 6 0

r

t

0 Option

Delivery pressure

Code No code

Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Material Code Body B Brass S 316 SS SH

Poppet

Diaphragm

Nozzle

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

316 SS

Pressure gauge unit *2)

Ni-Cr-Mo alloy

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Ports Code

Ports

2P 3P 4PL 5PC

Refer to the following porting configurations.

Material B S, SH V V V V V V

Porting Configuration (Top View) t w

q w

2P t w

q

3P t

q w

e 4PL

r q

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Connections (Inletq, Outletw) Code Connections 4 NPT 1/4 inch 6 NPT 3/8 inch 8 NPT 1/2 inch 4T 1/4 inch compression 6T 3/8 inch compression 8T 1/2 inch compression

Specification Standard High inlet pressure *4) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) *3) Not available with SH material.

Gauge port (Extra bottom outlete, Inletr, Outlett)

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge (Gauge port: 1/4 inch NPT) *2) 0 C No pressure gauge (1/4 inch NPT plug is installed before shipment.) V15 -30 in.Hg to 30 psig -0.1 to 0.1 MPa V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa -30 in.Hg to 160 psig 0 to 1.5 MPa 2 4 0 to 400 psig 0 to 3 MPa 10 0 to 1000 psig 0 to 7 MPa 30 0 to 3000 psig 0 to 21 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Maximum control pressure Ambient and operating temperature Cv Leak rate Connections Control pressure port Bonnet port Supply pressure effect Installation Internal volume *) Max. 90°C for Polyimide seat.

111

AK14PAT 7 to 150 psig (0.05 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 2300 psig (15.9 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 150 psig (1.0 MPa) -40 to 71°C (No freezing) *) 0.45 1 x 10-10 Pa·m3/s NPT female, Compression NPT 1/8 inch NPT 1/8 inch 1.6 psig (0.011 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount 1.14 in3 (18.7 cm3)

Pneumatic Actuation Pressure Regulator Intermediate flow (Tied-diaphragm)

Series AK14PAT

SH

316 SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy 316 SS Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Dimensions CONTROL PRESSURE PORT ø2.74 (ø69.6)

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

0.00 50 100 150 200 250 300 350 400 450 500 Flow rate (slpm, N2)

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Inlet pressure:

AK14PAT

2300 psig (15.9 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 1.10 160 140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

Technical Data/ Glossary of Terms

ø2.50 (ø63.5)

0.48

Precautions

0.69 (17.5) 0.88 (22.4)

70

Input/Output Characteristics

Delivery pressure (psig)

IN

OUT

0.55

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

Max. 4.9 (124.5)

ø2.62 (ø66.5)

80

0

ø1.88 (ø47.6) BONNET VENT PORT

100 psig (0.69 MPa) 60 psig (0.41 MPa)

Delivery pressure (MPa)

AK14PAT

inch (mm)

Inlet pressure:

AK14PAT

Delivery pressure (MPa)

S

Delivery pressure (psig)

B Brass

Wetted Parts Body Poppet Diaphragm Nozzle Seat

Check Valves

Flow Characteristics

Wetted Parts Material

Vacuum Generators

Changes from the standard type are: Option Other Parameters AK14PAT Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HR option will not achieve rated outlet pressure at all inlet pressures.

Flow Switches

High inlet pressure

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Option

112

High flow (Tied-diaphragm)

Pneumatic Actuation Pressure Regulator Series AK12PA

¡Actuation control pressure isolated from process gas by two seals ¡Body material: 316 SS ¡High inlet pressure type Standard: Max. 1700 psig (11.7 MPa) HR (option): Max. 3000 psig (20.7 MPa) ¡Flow capacity Standard: to 800 slpm HF (option): to 1000 slpm ¡Ni-Cr-Mo alloy internals available for corrosion resistance ¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

RoHS

How to Order Port Number q

w

e

AK12 PA S 4PL 8 8 0

r

t

0 Option

Delivery pressure Code Delivery pressure PA 7 to 150 psig (0.05 to 1.0 MPa)

Material Code Body B Brass S 316 SS SH

Poppet

Pressure gauge unit *2)

Diaphragm

316 SS

Ni-Cr-Mo alloy

Ni-Cr-Mo alloy

Ports Code

Ports

2P 3P 4PL 5PC

Refer to the following porting configurations.

Material B S, SH V V V V V V

Porting Configuration (Top View) t w

q w

2P t w

3P t

q w

e 4PL

Connections (Inletq, Outletw)

q

r q

Code Connections 4 NPT 1/4 inch 6 NPT 3/8 inch 8 NPT 1/2 inch 4T 1/4 inch compression 6T 3/8 inch compression 8T 1/2 inch compression

e 5PC

qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet)

Specifications

Code Unit No code psig/bar MPA MPa *2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Gauge port (Extra bottom outlete, Inletr, Outlett)

Code Specification No code Standard (Cv: 0.65) HF High flow (Cv: 1.1) *4) High inlet pressure *4) HR (Max. inlet pressure 3000 psig (20.7 MPa)) *4) Full outlet pressure rating may not be achieved at all inlet pressure.

Seat material Code Material No code PCTFE (Standard) VS Polyimide *3) *3) Not available with SH material.

Pressure gauge *1) psig/bar unit MPa unit No code No gauge port No pressure gauge (Gauge port: 1/4 inch NPT) *2) 0 C No pressure gauge (1/4 inch NPT plug is installed before shipment.) V15 -30 in.Hg to 30 psig -0.1 to 0.1 MPa V3 -30 in.Hg to 30 psig -0.1 to 0.2 MPa L -30 in.Hg to 60 psig -0.1 to 0.4 MPa 1 -30 in.Hg to 100 psig -0.1 to 0.7 MPa H -30 in.Hg to 160 psig -0.1 to 1.1 MPa V2 -30 in.Hg to 200 psig -0.1 to 1.4 MPa 2 -30 in.Hg to 160 psig 0 to 1.5 MPa 4 0 to 400 psig 0 to 3 MPa 10 0 to 1000 psig 0 to 7 MPa 30 0 to 3000 psig 0 to 21 MPa 40 0 to 4000 psig 0 to 28 MPa *1) Refer to gauge guide (P.115) for gauge specifications. Select a pressure gauge, which has a larger pressure range than the delivery pressure range of the regulator. *2) 1/4 inch NPT plug is included only for port code 4PL and 5PC. Code

Operating Parameters AK12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) Gas Select compatible materials of construction for the gas Source pressure Vacuum to 1700 psig (11.7 MPa) Proof pressure (Inlet) 2550 psig (17.6 MPa) Burst pressure 8000 psig (55.2 MPa) Maximum control pressure 150 psig (1.0 MPa) Ambient and operating temperature -40 to 71°C (No freezing) *) Cv 0.65 Leak rate 1 x 10-10 Pa·m3/s Connections NPT female, Compression Control pressure port NPT 1/8 inch Bonnet port NPT 1/8 inch Supply pressure effect 3.5 psig (0.024 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Installation Bottom mount Internal volume 1.32 in3 (21.6 cm3) *) Max. 90°C for Polyimide seat. Optional ambient and operating temperature range available. Please contact SMC.

113

Pneumatic Actuation Pressure Regulator High flow (Tied-diaphragm)

Series AK12PA

Flow Characteristics S

SH

316 SS 316 SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy PCTFE (Option: Polyimide) PCTFE

Dimensions CONTROL PRESSURE PORT ø2.74 (ø69.6)

70

0.48

60

0.41

50

0.34

40

0.28

30

0.21

20

0.14

10

0.07 0

Max. 4.9 (124.5)

Input/Output Characteristics

2 x 10-32 UNF depth 0.25 (6.4) (Mounting hole)

Delivery pressure (psig)

ø2.50 (ø63.5)

Inlet pressure:

AK12PA

1700 psig (11.7 MPa) 250 psig (1.7 MPa)

Control pressure (MPa) 0.00 0.07 0.14 0.21 0.28 0.34 0.41 0.48 0.55 0.62 0.69 160 1.10 0.69 (17.5)

0.88 (22.4)

0.00 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2)

Note) slpm, N2: The volumetric flow rate under normal conditions (0°C, 1 atm) when N2 gas is flowing.

IN

OUT

60 psig (0.41 MPa) 1/2 inch connections 0.55

ø1.88 (ø47.6)

ø2.62 (ø66.5)

100 psig (0.69 MPa)

80

0

BONNET VENT PORT

Inlet pressure:

140

0.97

120

0.83

100

0.69

80

0.55

60

0.41

40

0.28

20

0.14

0

0

10

20

30 40 50 60 70 Control pressure (psig)

80

0.00 90 100

Precautions

AK12PA

inch (mm)

AK12PA

Delivery pressure (MPa)

B Brass

Delivery pressure (MPa)

Wetted Parts Body Poppet Diaphragm Seat

Delivery pressure (psig)

Wetted Parts Material

Check Valves

Changes from the standard type are: Option Other Parameters AK12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Source pressure Vacuum to 3000 psig (20.7 MPa) HR Proof pressure (Inlet) 4500 psig (31 MPa) Burst pressure 9000 psig (62 MPa) *) HR and HF options will not achieve rated outlet pressure at all inlet pressures.

Vacuum Generators

2. High inlet pressure

Flow Switches

Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: Option Other Parameters AK12PA Delivery pressure 7 to 150 psig (0.05 to 1.0 MPa) *) Cv 1.1 HF Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop

Technical Data/ Glossary of Terms

1. High flow

Diaphragm Valves BP AK AZ SL AP Regulators

Recommendations

Options

114

Regulator

Pressure Gauges Guide For AP/SL/AZ series (Installed before shipment *1) / Order separately) Model

Specifications Installation Gas Connections Temperature range Accuracy Cleanliness No oil Case Window Material Socket Bourdon tube

Regulator Code *2) gauge port unit V3 L 1 H (No code) 2 4 10 40 V3 L 1 H MPA 2 4 10 40

Lower mount Select compatible materials of construction for the gas 1/4 inch face seal (Female) -40 to 60°C (No freezing) 25% to 75% of the scale: ±1%F.S. Other than above: ±2%F.S. (ASME B40.1 Grade A) ASME B40.1 level IV No oil Stainless steel Polycarbonate 316L SS 316L SS

Unit

-30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig psig/bar *4) 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa

Part number *3) 00-83000023 00-83000026 00-83000021 00-83000116 00-83000020 00-83000007 00-83000022 00-83000024 00-83000304 00-83000305 00-83000300 00-83000297 00-83000299 00-83000301 00-83000302 00-83000303

ø2 (ø50.7)

ø2.28 (ø57.8)

2.13 (54.1)

1.14 (29)

Pressure range

3/4 HEX

9/16-18 UNF

0.73 (18.5)

inch (mm)

For AK/BP series (Installed before shipment / Order separately) Stainless steel / Lower mount Model

Specifications Installation

Lower mount Select compatible materials Gas of construction for the gas Connections NPT 1/4 inch Temperature range -40 to 60°C (No freezing) 25% to 75% of the scale: ±2%F.S. Other than above: ±3%F.S. Accuracy (ASME B40.1 Grade B or better) Cleanliness ASME B40.1 level IV No oil No oil Case Stainless steel Window Polycarbonate Material Socket 316L SS Bourdon tube 316L SS

ø2 (ø50.7)

ø2.28 (ø57.8)

1.94 (49.3)

1.14 (29)

Regulator Code *2) material gauge port unit V15 V3 L 1 H V2 (No code) 2 4 10 30 40 S SH V15 V3 L 1 H V2 MPA 2 4 10 30 40

Pressure range

Unit

-30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig psig/bar *4) 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa

Part number *3) 00-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83000033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289 00-83000290 00-83000291 00-83000292 00-83000286 00-83000285 00-83000284 00-83000283 00-83000282

NPT 1/4 0.73 (18.5) inch (mm)

*1) If one prefers shipment with the pressure gauges installed on the regulator, the material of gasket to be used on the connections will be Nickel (no plated). Please contact SMC for details if one prefers changing this material. *2) When pressure gauge needs to be assembled with regulator when shipment, put this code as gauge port in How to Order.

115

Center back mount Select compatible materials Gas of construction for the gas Connections NPT 1/4 inch Temperature range -40 to 60°C (No freezing) 25% to 75% of the scale: ±2%F.S. Other than above: ±3%F.S. Accuracy (ASME B40.1 Grade B or better) Cleanliness ASME B40.1 level IV No oil No oil Case Stainless steel Window Polycarbonate Material Socket 316L SS Bourdon tube 316L SS

Regulator Code

NPT 1/4

*5)

Pressure range Unit Part number *3) -30 in.Hg to 100 psig 00-83000224 psig/bar *4) -30 in.Hg to 160 psig 00-83000272 -0.1 to 0.7 MPa 00-83000293 MPa -0.1 to 1.1 MPa 00-83000294

ø2 (ø50.7)

ø2.28 (ø57.8)

1.14 (29)

2.169 (55.1) inch (mm)

Brass / Lower mount Model

Installation

Lower mount Select compatible materials Gas of construction for the gas Connections NPT 1/4 inch Temperature range -40 to 60°C (No freezing) 25% to 75% of the scale: ±2%F.S. Other than above: ±3%F.S. Accuracy (ASME B40.1 Grade B or better) Cleanliness ASME B40.1 level IV No oil No oil Case Brass or Stainless steel + ZrN Coating Window Polycarbonate Material Socket Brass Bourdon tube Phosphor bronze

2.1 (53.5)

ø2.28 (ø57.8)

2.12 (54)

1.14 (29)

Regulator Code *2) material gauge port unit V3 L 1 H (No code) 2 4 10 40 B V3 L 1 H MPA 2 4 10 40

Pressure range

Unit

-30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig psig/bar *4) 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa

Part number *3) 00-83000265 00-83000177 00-83000178 00-83000239 00-83000218 00-83000205 00-83000186 00-83000179 00-83000278 00-83000279 00-83000280 00-83000281 00-83000277 00-83000276 00-83000275 00-83000274

Technical Data/ Glossary of Terms

Specifications

Diaphragm Valves BP AK AZ SL AP Regulators

Model

Installation

Check Valves

Specifications

Vacuum Generators

Stainless steel / Center back mount

Flow Switches

For AK/BP series (Installed before shipment / Order separately)

Recommendations

Regulator / Pressure Gauges Guide

NPT 1/4 0.42 (10.5)

Precautions

inch (mm)

*3) Part number of pressure gauge itself. Gauge are shipped separately. *4) Under Japanese regulation, psig/bar unit gauge is not sold in Japan. *5) Available for special order. Please contact SMC.

116

Process Gas Equipment/Regulator Specific Product Precautions Be sure to read this before handling. Refer to the back cover for Safety Instructions and pages 166 and 167 and the Operation Manual for common precautions. http://www.smcworld.com

Selection

Warning

Warning

1. Confirm the specifications. When selecting the product, confirm the operating conditions, such as type of gas, operating pressure (inlet and outlet), flow rate, operating temperature etc., and use within the operating range specified in the catalog. The product may not be suitable for use with specific gases and applications/ environments. Check the compatibility of the product materials with the process gas. Design the equipment and select the product by understanding the characteristics of gas.

2. Confirm allowable pressure of any pressure gauges. When installing a pressure gauge to the product, operating pressure should not exceed the maximum allowable pressure of the pressure gauge.

Mounting

Warning 1. Confirm the mounting direction of the product. The high pressure (inlet) port is labeled with an “HP” mark and the low pressure (outlet) port is labeled with an “LP” mark. In the case of two stage regulator, the monitor port of first stage outlet pressure is labeled with “MP” mark. Make sure to connect the port labeled with “HP” mark, to the high pressure. If any of the ports, other than “HP”, are connected to the high pressure, it may cause damage or gas leakage.

2. After installation, check internal leakage (leakage across seat) of the product. Check internal leakage (leakage across seat) with inert gases such as nitrogen, etc., and select the most appropriate test method depending on the application. The following procedures are an example of how a test may be performed. It is intended as an overview and not as an all inclusive description. 1) Rotate the adjustment wheel counterclockwise (DECR) completely to relieve spring force. Then gradually open the valve at inlet side to supply gas to the regulator. 2) Close the valves on the inlet and outlet side and hold for at least 10 minutes. Then confirm the outlet pressure. 3) Rotate the adjustment wheel clockwise (INCR) until the outlet pressure reaches the outlet pressure setting. Then hold for at least 10 minutes and confirm the outlet pressure. If outlet pressure continues increasing in steps 2) and 3) above, the regulator may have internal leakage (leakage across seat) and you should stop using the regulator immediately and contact SMC or sales representative.

3. Purge hazardous gases from system before removing regulator from system. Before removing regulators from system, fully open regulator by turning adjustment wheel clockwise (INCR), and follow proper procedures to flush system with inert gas such as nitrogen to remove any residual hazardous gases.

Maintenance

Warning 1. If a regulator requires repair, contact SMC. 117

Operation

1. Do not use the regulator as shutoff valve or safety valve. 2. Do not rotate the adjustment wheel counterclockwise (DECR) under no flow conditions. If the adjustment wheel is rotated counterclockwise (DECR) under no flow conditions but there is residual pressure remaining in outlet side, it may cause damage to the regulator. Decreasing of the setting pressure should be done under flow conditions.

3. Do not pressurize the regulator from outlet side. If high pressure, which exceeds the setting pressure, is supplied from outlet side, it may cause damage to the regulator. 4. Supply gas to the regulator. Rotate the adjustment wheel counterclockwise (DECR) completely to relieve spring force. Then, gradually open the valve at inlet side to supply gas to the regulator. When operating the valve, do not stand in front of the regulator and pressure gauge. If the valve at inlet side is opened rapidly, high pressure gas might be supplied into outlet side of the regulator and it may cause severe damage or burst the device.

5. Adjust pressure. When rotating the adjustment wheel clockwise (INCR), outlet pressure will increase. In order to adjust precisely, the wheel should be adjusted at the desired flow conditions.

6. Decreasing the setting pressure under flow conditions. When decreasing the setting pressure, make sure to open the valve at outlet side to keep flow conditions. When rotating the adjustment wheel counterclockwise (DECR) under flow conditions, setting pressure will decrease.

7. Stop using the regulator immediately if resonance occurs. Loud audible noise as well as vibration of device or fluctuation of outlet pressure (resonance) may occur depending on operating conditions etc. If this situation occurs, stop using the regulator immediately and contact SMC or sales representative.

Process Gas Equipment/Back Pressure Regulator Specific Product Precautions

Warning

1. Confirm the specifications. When selecting the product, confirm the operating conditions, such as type of gas, operating pressure (inlet and outlet), flow rate, operating temperature etc., and use within the operating range specified in the catalog. Verify flow capacity of regulator and vent or return line, are large enough to vent off gas source without creating excessive back pressure. The product may not be suitable for use with specific gases and applications/environments. Check the compatibility of the product materials with the process gas. Design the equipment and select the product by understanding the characteristics of gas.

2. Confirm allowable pressure of any pressure gauges. When installing pressure gauges to the product, operating pressure should not exceed the maximum allowable pressure of the pressure gauge.

Mounting

Warning 1. Confirm the mounting direction of the product. The high pressure (inlet) port is labeled with an “IN” mark and the low pressure (outlet) port is labeled with an “OUT” mark. Make sure to connect the port labeled with “IN” mark, to the high pressure. If any of the ports, other than “IN”, is connected to the high pressure, it may cause damage or gas leakage.

1. Do not use the back pressure regulator as shutoff valve or safety valve. 2. Pressure control 1) Rotate the adjustment wheel counterclockwise completely to relieve spring force. 2) Partially open the valve at inlet side to supply gas to the back pressure regulator. 3) Increase the inlet pressure to the setting pressure by rotating the adjustment wheel clockwise. 4) Continue opening the valve at inlet side monitoring the inlet pressure. When the inlet pressure increases above the setting pressure, rotate the adjustment wheel counterclockwise to relieve the inlet pressure to the setting pressure. 5) Open the valve at inlet side completely and confirm that the inlet pressure reaches the setting pressure.

3. Decreasing the setting pressure. When decreasing the setting pressure, make sure to gradually rotate the adjustment wheel counterclockwise until the inlet pressure reaches the setting pressure.

4. Stop using the regulator immediately if resonance occurs. Loud audible noise as well as vibration of device or fluctuation of outlet pressure (resonance) may occur depending on operating conditions, etc. If this situation occurs, stop using the regulator immediately and contact SMC or sales representative.

Maintenance

Vacuum Generators

Warning

Diaphragm Valves BP AK AZ SL AP Regulators

Warning

Operation

Check Valves

Selection

Recommendations

Be sure to read this before handling. Refer to the back cover for Safety Instructions and pages 166 and 167 and the Operation Manual for common precautions. http://www.smcworld.com

Precautions

Technical Data/ Glossary of Terms

Flow Switches

1. If a back pressure regulator requires repair, contact SMC.

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