SC ESD basics paper

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ည‫ޘ‬Ꭷ৙።ৌᔍᒦࡼஸ࢟ह࢟(ESD)‫ڔ‬ཝ ᆐဠඐஸ࢟ह࢟੪ᒮገǛ ஸ࢟ह࢟ᄰ‫ޟ‬᎒߂ESDLjᎌࣶᒬተါă࠭࿑࢟ࡵ߿ේ஘ၢຢဟྔዛଂઃఘ‫ݙ‬୅ࡼ૜ઔLjஸ࢟ह ࢟ᎌࣶᒬ‫ݙ‬ᄴࡼተါLj੪ซ፿ጙᒬऱज୓໚ཝ‫ݝ‬গၤă੪ࣶ༽ౚሆLjஸ࢟ह࢟ถ৊ཽᐆ߅༵ࣞ ࢟ૣࡼঢ௻Ljഎཽঢࡵ‫ݙ‬းLjࡣ‫્ݙ‬ᄅᄼăࡣᏴ࢟ᔇኧਜ਼ည‫ޘ‬ഌᎮLjᑚᒬ༵ࣞ࢟ૣభถᐆ߅ዏ ᒮႼပă

ஸ࢟ह࢟ࡼࢾፃ ࡩஸ࢟੗ᏴೝৈᇕᄏᒄମኸႥࠅ࢕ဟLj௓્खညஸ࢟ह࢟ăೝৈ࢟੗ᆡ‫ތ‬መᓎ‫ݙ‬ᄴࡼᇕᄏሤઑ ୻߿ဟLjᄰ‫્ޟ‬ᐆ߅ஸ࢟੗ࠅ࢕ăࡣဵLjࡩೝৈሤઑ୻தࡼᇕᄏᒄମተ߅঱༓ࣞࡒ࢟ஸ࢟‫ޝ‬ ဟLjጐ્खညஸ࢟ह࢟ă! Ᏼဣଔह࢟ᒄ༄Ljᎅ᎖ᇕᄏ‫ܭ‬ෂࡼ࢟ᔇ‫ݙ‬ຳੰLjஸ࢟੗્ᓆ୍ಝ૩ă੪ࣶᒬऱज࣒భጲተ߅ह ࢟Ljಿྙ቎ᔇᎧᄂࢾ‫ܭ‬ෂ෠‫ݟ‬Lj૞፿෭ቋ‫ݢ‬೯ሤઑ෠‫ݟ‬ă࢟੗ಝ૩ࡴᒘጙৈ‫ܭ‬ෂ૝ࡻ࢟ᔇDŽঌ ࢟੗DžLj໚჈‫ܭ‬ෂပབྷ࢟ᔇDŽᑵ࢟੗Džăஸ࢟ह࢟ᄰਭ࢟ഗࠅ࢕࢟ᔇLjဧ࢟੗ૂআຳੰă

ஸ࢟ह࢟ࡼᆉ਴ Ᏼည‫ޘ‬ਭ߈ᒦLjଂઃྀੜ୿્࣒ࣤಝ૩ஸ࢟੗ăྀੜऻಯሯࡴᄏࡼᇕᄏᏴጤࣅဟᔢྏጵಝ૩ஸ ࢟੗ăಿྙLjଣ࿸ည‫ޘ‬ਭ߈ᒦLjည‫ޘ‬ሣ࿟ᎌጙ೰‫ݝ‬ୈᑵளਭႨ೯ࠊăႲᓹ‫ݝ‬ୈጤࣅLjႨ೯ࠊ࿟ ્ಝ૩ஸ࢟੗ăࡩ࢟੗ࡉࡵጙࢾၺຳဟLj௓્ተ߅࢟ઍLjዘ୻࢐࢛ह࢟ăྙਫ࢟ઍ੪༓Ljభถ ્ႼડᏄୈăDŽ୅ᅄ1 ăDž!

Ⴈ೯ࠊ

ஸ࢟ಝ૩

‫ݝ‬ୈࡼጤࣅ

‫ݝ‬ୈ

ᅄ1ǖഗࣅည‫ޘ‬ਭ߈ᒦ‫ޘ‬ညࡼஸ࢟

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ཽᄏᄂܰྏጵಝ૩ஸ࢟੗ăᑚಱᎌࣶᒬፐႤLjણஹဘࣞฅᒗཽඣჅࠃ቎ᔇࡼಢቯ࣒భถᐆ߅ஸ࢟ ಝ૩ăᑚቋቃ࢟੗‫્ݙ‬࿛਴ཽᄏLjࡣ࣪᎖࢟ᔇᏄୈLjጙࠨஸ࢟ह࢟௓ᔗጲᐆ߅Ⴜ਴ă࣪᎖ැঢᏄ ୈLj૾ဧᒑᎌ20॰ࡼह࢟ጐ્ᐆ߅Ⴜ਴ăැঢቶ୷ࢅࡼᏄୈጐྏጵ၊ࡵႼ਴Lj࢟੗ಝ૩્ᐆ߅‫ޠ‬ ໐ᆰᄌLj፬ሰ࢟ᔇᏄୈࡼ৖ถᎧቶถă ऴஸ࢟ࡅဗᏴ࢟ᔇਜ਼‫ࡴۍ‬ᄏቲጓ૵ᆐᒮገăႲᓹૹ߅࢟വਜ਼‫ࡴۍ‬ᄏଆၣࡼखᐱLjஸ࢟ह࢟ࡼज़ሙ Ꮧ౶Ꮧ঱ăጙ‫ۅ‬ऎዔLj࢟വࡼᄏ૩ᏗቃLjႥࣞᏗ౐Ljᐌ࣪ஸ࢟ह࢟ࡼැঢቶጐᏗ঱Lj၁Ⴥ፿‫ݢ‬೯ ऎࢾă ஸ࢟ह࢟‫ݙ‬ஞ્ႼડဣᇕLjથ્፛໦ઁ༮ᆰᄌăஸ࢟ह࢟భถᐆ߅ည‫ޘ‬ਜ਼ୣૡዓᇙLj໚፬ሰభ݆ ૺ৉ৈऱෂLj۞౪࿸۸Ăણஹฅᒗሤਈ৔ᔫཽᏋă࣪ည‫ޘ‬࿜ऎዔLjऴஸ࢟ࡅဗဵऴᒏଆၣĂள፦ Ⴜပጲૺᒮࡍ‫ݤ‬ᇗႼပࡼᒮገ၄ࣤă!

ऴஸ࢟૥‫۾‬ᒀဤ ऴஸ࢟၅ሌኊገᑵཀྵࡼ࿸۸ăྦছ૥‫ࡼ۾‬ऴஸ࢟৔௥ᎌǖ !•

! • ! • ! • • • • !

ཽᄏ୻࢐ᅻࡒǖభࢯါᅻࡒဧ፿‫ܪ‬ᓰ࢟ᔜLjᄰ‫ޟ‬፿₏ᔠଚᎧభ࿼Ⴡࡼ࢟ሣೌ୻Ljభ! ! ࿼Ⴡ࢟ሣᐌᎧ୻࢐࢛ሤೌă ऴஸ࢟ࡖǖऴஸ࢟ࡖጙ‫ۅ‬Ᏼ۞ᓤૹ߅࢟വૺ໚჈ැঢ࢟ᔇ‫ޘ‬ອဟဧ፿ăऴஸ࢟ᔇࡖᎌೝ‫!!ށ‬ Ⴈ೯‫ށ‬Ljᒦମဵ஘ၢຢLjభऴᒏஸ࢟ह࢟ă ‫ڔ‬ཝॲǖऴஸ࢟‫ڔ‬ཝॲᄰ‫ޟ‬፿ღሏᎧ໚჈‫ݢ‬೯૘सऎ߅LjభᏴ‫ݷ‬ᔫཽᏋᎧഃ‫ݝ‬ୈᒄମተ߅!! ज౯࢔ഝ቉።Ljଢ଼ࢅஸ࢟ह࢟ࡼ૦ൈă ‫ࡒ‏‬ǖ‫ࡼࡒ‏‬৔ᔫᏇಯᎧᅻࡒಢ႒ă ᅇ೯ᒓǖᅇ೯ᒓభᏴ৔ᔫგᎧᔝᓤཌᒄମተ߅‫ܭ࢟ࡴݙ‬ෂă ऴஸ࢟ᓒ‫ݶ‬ረǖऴஸ࢟ᓒ‫ݶ‬ረಽ፿ૹ߅ࡴ࢟߀࢞Ljభ‫ڔ‬ཝࡀहஸ࢟ැঢ࿸۸ă ৔௥୻࢐ሣǖᎅ᎖ࡍࣶၫ৔௥௿۞਺ሴୢĂႨ೯ਜ਼஘ၢLjፐࠥཀྵۣ৔௥୻࢐૵ᆐᒮገăဧ!! ፿୻࢐ሣဵ৔௥୻࢐ࡼऱजᒄጙLjభጲ‫ڔ‬ཝ࢐୓ஸ࢟੗ࠅ႙ࡵ࢐ෂă

࿟ၤۣઐࡅဗభᏴࣶᒬည‫ޘ‬ણஹᒦᆐැঢ࢟ᔇ࿸۸ᄋ৙ۣઐă!

Ᏼஸ࢟ह࢟ણஹᒦৌᔍၫ௣ ည‫ޘ‬࿜ෂ೹ࡼᓍገซᄌᒄጙဵᐏዹᏴ‫ݙ‬Ⴜ਴ஸ࢟‫ڔ‬ཝࡼ༄ᄋሆৌᔍెࡀਜ਼ᇕ೯ă૾ဧဵཽᄏ૞໚ ჈ᇕᄏࡼ଼࡝ጤࣅLjጐభถ‫ޘ‬ညஸ࢟੗ăᏴ࡝ৈᏄୈࡼᔝᓤਭ߈ᒦLj੪ࣶऱါ્࣒ᐆ߅࢟੗ಝ ૩Ljಿྙǖ •

• • • •

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ెࡀ‫ݗ‬ૡဟᏄୈᒄମࡼ୻߿ă ᎌൔ‫ݝ‬ୈᏴ‫ޱ‬ମ࢐ෂਦࣅဟă ৔ཽᆚ๽ࡑ૞ဧ፿ऴஸ࢟࿸۸ऎནहᏄୈဟă ᏄୈᎧࠅ႙ࡒᒄମࡼ෠‫ݟ‬ă ည‫ޘ‬ဟᏄୈᎧ໚჈‫ݝ‬ୈᒄମ୻߿ă

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ጲ࿟ᒑဵభถࡴᒘஸ࢟ಝ૩ࡼଂৈಿᔇăႲᓹஸ࢟ಝ૩Ljᐆ߅Ⴜ਴ࡼज़ሙጐ્ᐐଝă‫ܕ‬੝ࠅࡴ ࢟വభဧ࢟੗ૂআࡵຳੰᓨౚLj॥ᐌ࢟੗୓ဪᒫۣߒ૚Ꮨăऴஸ࢟ࡖᒑถି࿩࢟੗Ljࡣ‫ݙ‬ถᅲ ཝऴᒏஸ࢟ಝ૩ă ᄟተ൩ྸහጥဵᄋ঱ည‫ޘ‬቉ൈࡼᒮገ৔௥ăᆐ‫ܣ‬᎖ࠀಯਜ਼ৌᔍెࡀLjᏄୈభᄣ࿟ᄟተ൩DŽ୅ ᅄ2 DžLj཭ઁ࣪ᄟተ൩஠ቲஊࣗਜ਼଑ഺLjဣሚᔈࣅৎቤă፝ၮ࢟വ‫ۇ‬Ăૹ߅࢟വૺ໚჈࢟ᔇැ ঢᏄୈࡼᄟተ൩ਜ਼‫ܪ‬໽ᄰ‫ޟ‬੪ቃLjྸහጥᏴᏐࠀ੪ซஊࣗăᎅ᎖Ꮠ௦ಭஊࣗᄟተ൩ซጲဣሚLj ፐࠥ‫ޘ‬ည೫ጙሲቤࡼऴஸ࢟࿸۸ăྸහጥள‫ޟ‬௡ૹஸ࢟੗LjྙਫᎧැঢᏄୈ୻தLjᐌభถखည ஸ࢟ह࢟Ljᐆ߅ᏄୈႼડă !

ᅄ2ǖᄟተ൩Ꭷ९੓ာಿ

ᎌቋည‫ޘ‬ણஹ‫ݧ‬ནᑓᒪ‫ێ‬जLjᏴ‫ڔ‬ᓤྸහጥᒄ༄๿ྩᄂᒜऴஸ࢟ᇓଋLjጲဣሚۣઐăࡣᑚᒬஊ ௼ऱ‫ښ‬ᎌೝৈᆰᄌǖᇓଋ‫ܘށ‬ኍᅲཝ঄ঙ৔ᔫཌ‫ݣ‬ถखિᔢࡍ቉ೆਜ਼ऴᒏज़ሙLj݀༦ऴஸ࢟ᇓ ଋ્Ⴒဟମပ቉Ljள‫ޟ‬ኊገᒮቤ๿ྩăᎅ᎖ᇄजறཀྵ‫ࢾހ‬ᇓଋࡼ቉ೆߒኚဟମLjྙਫ๿ࡻვ ࣶLj৛ႊ્಍ॅ‫ݤ‬ೆǗྙਫ๿ࡻვ࿩Lj࣪৔ᔫણஹۣઐ‫ݙ‬ᔗLjᏄୈ᎒્ෂ೹Ⴜડज़ሙă

ᅲᑳࡼऴஸ࢟ᅄስࠀಯৌᔍஊ௼ऱ‫ښ‬ Microscan Quadrus® ᆈቯऴஸ࢟ᅄስࠀಯ໭ ஙᄖLjᆸඣᅎ߲ጙᒬ଼࡝Ăࢅ߅‫ࡼ۾‬ஊ௼ऱ‫ښ‬Ljဧ৛ႊభहቦဧ፿ᄟተ൩ৌᔍଆၣLjऎ‫࡛ܘݙ‬ ቦஸ࢟ह࢟ăMicroscan Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭)MINI ESD*ဵጙ౒৖ถ༓ࡍࡼ঱ॊ‫ܦ‬ൈ ྸහጥLjభ‫ږ‬৉ᒬ௦ಭਜ਼Ⴅࣞஊࣗ11ᒬሣቶਜ਼औᆒ९੓Lj݀‫ݧ‬፿ऴஸ࢟ॖᓤă! Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭ᎌࣖᄂࡼาᅇ‫ށ‬ਜ਼ऴஸ࢟‫ܪ‬໽Ljభᔢࡍሢࣞऴᒏஸ࢟ह࢟ăক ࿸۸ࡼऄࢾह࢟࢟ኹᆐ4໻॰Lj໚‫ܭ‬ෂ࢟ᔜࢅ᎖10 * 10-9๏0ຳऱ፞ࡁLjభᎌ቉ऴᒏஸ࢟ह࢟ă Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭ᄰਭISOྯ଀DŽೊ‫ܪې‬ᓰ209Eጙ଀Džு၀ཱྀᑺLj૾ဧᏴኊገᔢቤ

ಭᔇखည໭ጲ఼ᒜஸ࢟ࡼு၀ણஹᒦጐถᑍ‫ޟ‬ဧ፿ă

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ဧ፿Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭! Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭ጵ᎖ဧ፿Lj৖ถࣶዹLjး

፿᎖ྀੜည‫ޘ‬ણஹăক࿸۸ᄰਭ଼࡝ࡼ૾‫૾ރ‬፿ᓤᒙLj ᎧᓤᎌMicroscan ESPྟୈࡼ࢟ฎᓍ૦ೌ୻Lj଼࡝ࡼ࢛ૣ ‫ݷ‬ᔫ૾భᅲ߅๼ᒙă࿸۸۳ෂࡼEZ‫ږ‬฽భᔈࣅ࣪ୡਜ਼ቅ ᓰྸහጥLjጲࡉࡵᔢଛஊࣗቶถă

ᔢ‫ڔ‬ཝࡼኡᐋ ஸ࢟ह࢟ඛᄖ࣒Ᏼखညăࡌఎ‫ޱ‬ඡဟ‫ޘ‬ညࡼ༵ᆈ࢟ૣఘ ႒ᇄᔗ༵ᒮLjࡣᏴည‫ޘ‬ણஹᒦLj૾ဧᔢ༵ᆈࡼह࢟ጐ્ ႼડᏄୈLjᐆ߅߲ૡዓߕĂည‫۾߅ޘ‬࿟ဍጲૺࡍ೟໚჈ ઁਫă Ᏼည‫ޘ‬ഗ߈఼ᒜਜ਼ెࡀᓫᔍᒦLjሚᎌࡼऴஸ࢟ᑓᒪऱ‫ࡀښ‬Ᏼ੪ࡍज़ሙăᔢభణࡼஊ௼ऱ‫ဵښ‬ Microscan Quadrusᆈቯऴஸ࢟ᅄስࠀಯ໭Lj჈ဵᆏጙ௥ᎌऴஸ࢟৖ถࡼৼࢾါᄟተ൩ஊࣗ໭ă࣪ ᎖ྀੜ࿶ૺஸ࢟ज़ሙࡼᄟተ൩ৌᔍഗ߈LjQuadrusᆈቯऴஸ࢟ᅄስࠀಯ໭௿ဵᔢ‫ڔ‬ཝࡼኡᐋă

ᓾ೯౶Ꮞ Resurrecion, CarlᎧVemillion, Bob)2005ฤ6Ꮬ*ăĖு၀ऴஸ࢟ᓖፀူሲė)ESD Considerations For Cleanrooms*ăĖ၊఼ણஹė)Controlled Environments*ă2006ฤ4Ꮬ2྇ଶჃᔈhttp://www.cemag. us/articles.asp?pid=530 Smallwood, Jeremy݇ိăĖஸ࢟ह࢟߅‫ࡼ۾‬ଐႯė)Counting the Cost of ESD*ăĖஸ࢟ஊ௼ऱ‫ښ‬ė )ESD Solutions*ă2006ฤ4Ꮬ1྇ଶჃᔈhttp://www.static-sol.com/ESD_Solutions/Cost_of_ESD.htm Smallwood, Jeremy݇ိăĖᆐဠඐ࢟ᔇቲጓࡼஸ࢟ह࢟എཽ࡛ᎃǛė)Why Worry About ESD in Electronics?*ăĖஸ࢟ஊ௼ऱ‫ښ‬ė)ESD Solutions*ă2006ฤ4Ꮬ1྇ଶჃᔈhttp://www.static-sol.com/ ESD_Solutions/ESD_Solutions.htm

໚჈ᓾᏎ ஸ࢟ह࢟ऴઐ቏્)ESD Association*ǖwww.esda.org

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