Si-Si Bonding Using RF and Microwave Radiation - Semantic Scholar

SI-SI BONDING USING RF AND MICROWAVE RADIATION Keith Thompson, Yogesh B. Gianchandani1, John Booske, Reid Cooper* Department of Electrical and Computer Engineering, University of Wisconsin, Madison, USA *Department of Materials Science and Engineering, University of Wisconsin, Madison, USA ABSTRACT Electromagnetic radiation ranging in frequency from a few MHz to tens of GHz has been used to volumetrically heat silicon above 1000°C in only a few seconds. Typical power is