Supporting Information Vapor Pressure of
Supporting Information Vapor Pressure of Dichlorosilane, Trichlorosilane and Tetrachlorosilane from 300 K to 420 K Kenneth N. Marsh,* Tony K. Morris, ¥ G. P. Peterson, # Thomas J. Hughes,* Quentin Ran† and James C. Holste§ * Fluid Science & Resources Division, School of Mechanical & Chemical Engineering, University of Western Australia, Crawley, WA, Australia 6009 and Department of Chemical and Process Engineering, University of Canterbury, Christchurch, New Zealand. ¥ 5216 Sun Meadow Dr., Flower Mound, TX , 75022 # Office of President, Georgia Institute of Technology, Atlanta, GA 30332 † LINN Energy Llc, 600 Travis St, Suite 5100, Houston, TX 77002 § Department of Chemical Engineering, Texas A&M University, College Station TX 778433123.
DESCRIPTION Log p vs 1/T plot showing calculation of extrapolated critical pressure for dichlorosilane
Table of estimated critical pressures and temperatures of dichlorosilane.
Tables of literature vapor pressure data for dichlorosilane, trichlorosilane and tetrachlorosilane and their estimated uncertainties used in this work.
Tables of vapor pressure and boiling temperatures of dichlorosilane, trichlorosilane and tetrachlorosilane data not contained with the NIST ThermoData Engine (TDE).1 Note: temperatures have been corrected to ITS-90 using the polynomial expressions of Goldberg and Weir.2
p/kPa
10000
1000 2.15
2.25
2.35 1000/(T/K)
2.45
2.55
Figure S1. Dichlorosilane extrapolated critical pressure at the predicted critical temperature of 451.5 K:3 ○, this work, ●, extrapolated critical pressure (4950 kPa); ●, predicted critical pressure in DIPPR database.3
Table S1. Predicted critical temperature and pressures for dichlorosilane Tc/K
Pc/kPa
Reference
452
4550
Chen et al.4
470
4530
Yungman et al.5
449
4720
Britton6
459
4590
Myers7
451.5
-
Lyderson8
449
-
Kirk et al.9
-
4599
Ambrose10
449
4680
Air Products11
449.5
4378
Air Liquide12
Table S2. References of vapor pressure and boiling temperature data for dichlorosilane Shorthand source Reference 1919 sto som 0 Stock and Somieski13 1919 win Wintgen14 1954 gle loh Glemser and Lohmann15 1986 vor bal Vorotyntsev et al.16 1989 ols 0 Olson17 mat datasheet Matheson datasheet18 a NIST ThermoData Engine1
In TDEa Y N N N Y N
Table S3. References of vapor pressure and boiling temperature data for trichlorosilane Shorthand source Reference 1857 buf wöh Buff and Wöhler19 1867 fri lad Friedel and Ladenburg20 1884 pap Pape21 1889 gat Gattermann22 1891 bes Besson23 1905 ruf alb Ruff and Albert24 1923 sto zei Stock and Zeidler25 1934 boo sti Booth and Stillwell26 1939 pir Pirenne27 1954 jen cha 0 Jenkins and Chambers 28 1960 sha lel Shakhparonov et al.29 1965 nis lap Nisel'son and Lapidus30 1984 dow cor Dow Corning3,31 1989 ols 0 Olson17 1992 kor maz Korablina et al.32 a NIST ThermoData Engine1
In TDEa N N N N N N N N N Y Y, but some data missing N N Y N
Table S1. References for Sources of Additional Vapor Pressure and Boiling Temperature Data for Tetrachlorosilane (SiCl4). Source 1862 reg 1867 haa 1904 sch 1905 bec mey 1908 kah koe 1917 sto som 0 1919 win 1923 bli 1925 rab 1926 mal 1926 rob smi 1929 bon ste 1933 nas 1936 kea 1940 bow mor 1954 jen cha 0 1960 kor shar 0 1960 nis ser 1962 kin can 0 1963 cro can 0 1964 cap fri 0 1965 nis lap 1973 jai yad 0 1973 wei keh 0 1977 toc you 0 1984 dow cor
Reference Regnault33 Haagen34 Schlundt35 Becker and Meyer36 Kahlenberg and Koenig37 Stock et al.13 Wintgen14 Blitz38 Rabinowitsch39 Maluquer Cueto40 Robinson and Smith41 Bond and Stephens42 Nasu43 Kearby44 Bowden and Morgan45 Jenkins and Chambers 28 Korchemskaya et al.46 Nisel'son and Seryakov47 King and Canjar48 Crookston and Canjar49 Capkova and Fried50 Nisel'son and Lapidus30 Jain and Yadav51 Weiwad et al. 52 Toczylkin and Young53 Dow Corning3,31
In TDE N N N N N Y N N N N N N N Y N Y Y N Y Y N N Y Y Y N
Table S5. Vapor Pressure and Boiling Temperature Data for Dichlorosilane (SiH2Cl2) with Estimated Uncertainties (references for the sources are contained in Table S2) Source 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1954 gle loh 1954 gle loh 1954 gle loh 1954 gle loh 1986 vor bal 1986 vor bal
T K 163.076 172.685 177.688 182.891 188.593 193.195 199.195 203.095 207.695 212.596 218.692 222.688 227.685 232.682 237.678 242.674 247.87 252.966 258.062 263.058 268.054 273.15 278.147 281.345 193.20 222.69 257.96 268.05 273.15 281.34 206.70 226.19 236.18 237.18 183.013 193.013
p kPa 0.0267 0.067 0.13 0.23 0.4 0.6 1.0 1.4 2 2.8 4.4 5.73 7.73 10.5 13.9 18.1 23.7 30.3 37.9 47.3 58.9 73.2 88.5 101 0.60 5.69 37.9 59.0 73.2 100 1.7 7.1 12.1 12.8 0.884 1.78
u(p) u(p)/p kPa 0.0053 20 0.013 20 0.03 20 0.05 20 0.08 20 0.120 20 0.10 10 0.14 10 0.2 10 0.28 10 0.44 10 0.57 10 0.77 10 1.0 10 1.4 10 1.8 10 2.4 10 3.0 10 3.8 10 4.7 10 5.9 10 7.3 10 8.9 10 10 10 0.06 10 0.57 10 3.8 10 5.9 10 7.3 10 10 10 0.17 10 0.71 10 1.2 10 1.3 10 Excluded from fit, not estimated Excluded from fit, not estimated
1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1989 ols 0 1989 ols 0 1989 ols 0 mat datasheet mat datasheet mat datasheet mat datasheet mat datasheet This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1)
203.012 213.011 223.010 233.008 243.006 253.004 263.002 273.000 280.998 289.996 299.993 309.991 319.988 329.985 339.983 349.980 344.732 375.774 396.72 273.15 288.64 294.14 305.33 316.43 299.988 299.993 299.993 299.994 299.999 299.999 300.001 309.992 319.983 319.993 319.995 319.996 319.998 329.994 330.017 339.991 339.991
3.33 5.89 9.90 15.9 24.6 36.7 53.1 74.9 93.5 158 215 287 376 484 614 768 703 1386 2064 73.1 131 161 226 314 213.3 214.4 216.5 214.5 212.0 214.2 216.5 284.3 377.6 377.9 381.4 377.3 380.4 485.8 492.2 625.3 626.4
Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated 7 1.0 14 1.0 21 1.0 7.3 10 13 10 16 10 23 10 31 10 2.1 1 2.1 1 2.2 1 2.2 1 2.1 1 2.1 1 2.2 1 2.8 1 3.8 1 3.8 1 3.8 1 3.8 1 3.8 1 4.9 1 4.9 1 6.3 1 6.3 1
This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 2) This work (sample 2) This work (sample 2)
339.991 339.992 339.998 349.989 349.99 349.992 349.996 359.983 359.988 359.991 359.991 359.992 369.984 369.992 369.992 379.985 379.989 379.99 379.99 379.992 389.99 389.991 389.994 399.989 399.992 409.984 410.004 419.991 323.006 343.007 362.99
631.6 625.6 628.6 789.0 784.7 786.4 785.0 981.9 978.0 985.9 990.3 982.2 1205 1205 1209 1469 1474 1476 1477 1484 1781 1784 1779 2099 2138 2559 2534 3016 407.8 672.6 1052.1
6.3 6.3 6.3 7.9 7.9 7.9 7.9 9.8 9.8 9.9 9.9 9.8 12 12 12 15 15 15 15 15 18 18 18 21 21 26 25 30 4.1 6.7 10.5
1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1
Table S6. Vapor Pressure and boiling temperature data for Trichlorosilane (SiHCl3) with estimated uncertainties (references for the sources are contained in Table ) Source
1857 buf wöh 1867 fri lad 1884 pap 1889 gat 1891 bes 1905 ruf alb 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei
T
p
K 315.13 309.13 306.13 309.13 307.13 306.13 188.19 188.19 193.10 198.20 202.90 203.10 208.00 212.70 218.99 223.19 223.29 228.29 232.98 237.78 237.88 242.68 247.87 252.87 252.97 257.96 262.66 267.15 267.25 273.15 273.15 278.55 283.64 283.64 288.44 293.34
kPa 101.33 101.33 101.33 101.33 101.33 101.06 0.09 0.11 0.17 0.25 0.36 0.37 0.55 0.80 1.25 1.73 1.73 2.53 3.37 4.60 4.65 6.07 8.07 10.67 10.67 13.87 17.60 21.9 22.3 29.1 29.1 36.7 45.1 45.3 54.9 66.8
u(p) kPa Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated 0.02 0.02 0.03 0.05 0.04 0.04 0.05 0.08 0.13 0.17 0.17 0.25 0.34 0.46 0.47 0.61 0.40 0.53 0.53 0.69 0.88 1.1 1.1 1.5 1.5 1.8 2.3 2.3 2.8 3.3
u(p)/p
20 20 20 20 10 10 10 10 10 10 10 10 10 10 10 10 5 5 5 5 5 5 5 5 5 5 5 5 5 5
1923 sto zei 1923 sto zei 1923 sto zei 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1939 pir
298.14 303.23 305.13 273.15 278.75 282.65 287.72 292.50 297.82 302.61 307.55 312.12 305.21
79.7 95.6 102.0 29.9 37.7 44.4 54.2 65.2 79.4 93.9 111.8 129.5 107.8
4.0 4.8 5.1 1.5 1.9 2.2 2.7 3.3 4.0 4.7 5.6 6.5 7.5
5 5 5 5 5 5 5 5 5 5 5 5 7
1939 pir
313.27
146
10
7
a
1939 pir
318.25
165
11
7
a
1939 pir
323.27
190
13
7
a
1939 pir
328.21
218
15
7
a
1939 pir
333.19
253
18
7
a
1939 pir
338.17
284
20
7
a
1939 pir
343.19
329
23
7
a
1939 pir
347.92
370
26
7
a
1939 pir
351.22
398
28
7
a
1939 pir
353.08
436
31
7
a
1939 pir
356.13
466
33
7
a
1939 pir
358.13
489
34
7
a
1939 pir
360.21
512
36
7
a
1939 pir
363.15
551
39
7
a
1954 jen cha 0
275.249
31.57
0.63
2
1954 jen cha 0
283.244
44.45
0.89
2
1954 jen cha 0
291.839
62.25
1.24
2
1954 jen cha 0
295.637
72.38
1.45
2
1954 jen cha 0
300.135
85.18
1.70
2
1954 jen cha 0 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel
304.733 290.839 293.438 295.437 297.336
100.1 59.9 66.51 71.3 76.53
2.0 1.2 1.3 1.4 1.5
2 2 2 2 2
a
1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1984 dow cor 1984 dow cor 1984 dow cor 1984 dow cor 1992 kor maz 1989 ols 0 1989 ols 0 1989 ols 0 This work This work This work This work This work This work This work This work This work This work This work
299.535 301.635 303.034 304.433 305.033 305.533 306.633 325.0 322.6 319.0 316.2 314.3 308.8 305.5 303.5 302.984 304.983 309.981 312.98 314.979 319.978 324.976 395.510 409.617 423.675 437.673 304.80 375.674 410.067 432.913 310 320 329.996 340 350 359.995 369.996 379.995 380.499 384.998 390
83.1 89.8 94.3 98.8 101.3 102.7 106.5 189.7 176.5 157.4 143.1 133.0 110.7 100.5 92.6 92.4433 98.63 115.546 126.751 134.685 156.244 180.428 1075 1396 1794 2258 100.00 700 1393 2064 121.9 167.5 225.4 297.4 385.6 492.1 619.6 770.2 778.2 854.6 946.0
1.7 2 1.8 2 1.9 2 2.0 2 2.0 2 2.1 2 2.1 2 Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated 22 2 28 2 36 2 45 2 Not estimated 7 1 14 1 21 1 1.2 1 1.7 1 2.3 1 3.0 1 3.9 1 4.9 1 6.2 1 7.7 1 7.8 1 8.6 1 9.5 1
a a a a a a a a a a a a a a a
a
This work 394.995 1044 10 1 Values estimated from a pixel map of a figure in this reference.
Table S7. Additional Vapor Pressure and boiling temperature data for Tetrachlorosilane (SiCl4) not included in NIST TDE (references for the sources are contained in Table S1) Source
1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1867 haa 1904 sch 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey
T
p
K 246.95 248.16 251.11 253.7 256.88 261.55 268.8 271.24 273.15 275.72 281.18 291.24 294.39 295.62 298.4 301.15 306.03 309.19 309.72 315.22 317.83 322.61 327.15 330.09 333.19 336.42 331.12 330.62 273.2 273.2 278.1 278.1 283.1 283.1 288.1 288.1
kPa 2.46 2.60 3.09 3.62 4.34 5.69 8.23 9.36 10.23 11.65 15.13 24.01 28.02 28.63 32.74 35.9 43.5 48.9 50.7 61.2 67.6 79.5 92.4 101.8 112.2 123.6 100.8 99.9 15.3 15.6 17.6 18.0 19.9 20.1 23.2 23.5
u(p)
u(p)/p
kPa 0.07 3 0.08 3 0.09 3 0.11 3 0.13 3 0.17 3 0.25 3 0.28 3 0.31 3 0.35 3 0.45 3 0.72 3 0.84 3 0.86 3 0.98 3 1.1 3 1.3 3 1.5 3 1.5 3 1.8 3 2.0 3 2.4 3 2.8 3 3.1 3 3.4 3 3.7 3 Not estimated Not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated
1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1908 kah koe 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win
293.1 293.1 298.1 298.1 330.02 330.02 330.12 203.195 208.196 213.196 218.192 223.188 228.185 233.182 238.178 243.174 248.17 253.166 258.162 263.158 268.154 273.15 278.147 283.144 288.141 293.138 298.136 303.134 308.132 313.13 318.128 323.127 328.125 329.925 205.20 209.20 213.19 216.69 222.19 226.19 230.68
28.7 28.9 34.8 34.9 101.3 101.3 98.7 0.13 0.20 0.27 0.33 0.53 0.73 1.00 1.31 1.87 2.53 3.45 4.67 6.07 7.93 10.3 13.1 16.7 20.8 25.7 32.1 39.5 48.0 57.3 68.7 80.7 94.7 1013 0.13 0.20 0.27 0.33 0.47 0.67 0.87
Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Not estimated 20 0.03 20 0.04 20 0.05 10 0.03 10 0.05 10 0.07 10 0.10 10 0.13 10 0.19 10 0.25 10 0.35 10 0.47 10 0.61 10 0.79 10 1.0 10 1.3 10 1.7 10 2.1 10 2.6 10 3.2 10 4.0 10 4.8 10 5.7 10 6.9 10 8.1 10 9.5 10 10.1 10 0.01 10 0.02 10 0.03 10 0.03 10 0.05 10 0.07 10 0.09
1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1923 bli 1925 rab 1926 mal 1926 rob smi 1926 rob smi 1926 rob smi 1926 rob smi 1926 rob smi 1929 bon ste 1933 nas 1940 bow mor 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0
236.58 240.48 246.17 248.17 252.17 257.86 263.16 267.85 273.15 278.15 283.14 288.14 293.14 294.24 303.13 313.13 323.13 330.12 330.62 329.78 330.06 329.95 330.03 330.07 330.22 330.24 329.92 329.73 330.52 273.15 278.147 283.094 288.141 293.138 298.136 303.134 308.132 313.13 318.128 323.127 328.125
1.27 1.53 2.27 2.53 3.27 4.60 6.07 7.73 10.3 13.1 16.7 20.8 25.7 27.6 39.5 57.1 80.7 101 102 101 99.7 100 101 101 102 102 100 99.5 103 10.27 13.07 16.53 20.4 25.5 31.3 38.3 46.1 55.9 66.8 79.9 94.5
10 0.13 10 0.15 10 0.23 10 0.25 10 0.34 10 0.46 10 0.61 10 0.78 10 1.0 10 1.3 10 1.7 10 2.1 10 2.6 10 2.8 10 4.0 10 5.7 10 8.1 10 10 Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated 0.51 5 0.65 5 0.83 5 1.0 5 1.3 5 1.6 5 1.9 5 2.3 5 2.8 5 3.3 5 4.0 5 4.7 5
1936 kea 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0
333.124 275.349 298.236 307.332 313.73 319.628 330.025 293.038 298.636 303.334 308.032 313.43 318.528 322.827 325.326 327.526 329.725 329.925 298.24 307.03 311.13 316.13 320.93 324.63 328.13 330.32 332.62 335.92 338.42 340.92 303.134 303.134 313.13 313.13 323.127 323.127 303.134 303.134 313.13 313.13 323.127
111.9 11.51 31.86 45.4 57.6 70.8 100.9 25.3 32.0 38.8 46.3 56.4 67.8 78.9 85.7 92.2 96.5 101 31.9 44.9 52.5 63.1 74.7 85.1 94.4 101.3 108.7 118.7 130.3 140.4 40.3 40.5 58.5 58.5 81.3 81.6 38.81 38.88 56.49 56.54 80.07
5.6 0.35 0.96 1.4 1.7 2.1 3.0 2.5 3.2 3.9 4.7 5.7 6.8 7.9 8.6 9.3 9.7 10 1.6 2.3 2.6 3.2 3.7 4.3 4.7 5.1 5.4 5.9 6.5 7.0 4.0 4.1 5.9 5.9 8.2 8.2 0.29 0.29 0.39 0.39 0.53
5 3 3 3 3 3 3 10 10 10 10 10 10 10 10 10 10 10 5 5 5 5 5 5 5 5 5 5 5 5 10 10 10 10 10 10 0.75 0.75 0.70 0.70 0.66
1963 cro can 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1973 jai yad 0 1973 jai yad 0 1973 jai yad 0 1973 jai yad 0 1973 wei keh 0 1973 wei keh 0 1973 wei keh 0 1973 wei keh 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0
323.127 273.700 278.426 285.513 292.958 302.663 307.542 313.450 325.656 330.625 307.82 309.84 314.71 320.78 325.81 326.86 328.65 330.14 334.56 337.92 341.18 344.68 346.07 298.144 303.143 308.142 313.14 293.145 303.143 313.14 323.137 455.361 459.861 464.761 469.06 473.56 475.26 482.26 486.56 488.46 490.46
80.27 10.4 13.2 18.2 25.3 37.5 45.4 56.5 86.1 101.3 46.2 49.8 58.3 73.7 86.1 89.6 96.1 100.3 115.3 127.2 141.2 160.7 166.22 31.769 38.722 46.979 56.58 25.68 38.64 56.34 79.9 1728 1859 1979 2130 2441 2360 2631 2761 2811 2912
0.53 0.5 0.7 0.9 1.3 1.9 2.3 2.8 4.3 5.1 2.3 2.5 2.9 3.7 4.3 4.5 4.8 5.0 5.8 6.4 7.1 8.0 8.31 0.061 0.072 0.085 0.10 0.25 0.39 0.56 0.8 52 56 59 64 200 71 79 83 84 87
0.66 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 0.19 0.19 0.2 0.2 1.0 1.0 1.0 1.0 3.0 3.0 3.0 3.0 8.2 3.0 3.0 3.0 3.0 3.0
a a a a a a a a a a a a a
1977 toc you 0 493.56 2982 89 1977 toc you 0 495.66 3082 92 1977 toc you 0 497.76 3212 96 1977 toc you 0 500.56 3333 100 1977 toc you 0 504.86 3524 106 1984 dow cor 381.51 413.0 8.3 1984 dow cor 395.51 562.6 11.3 1984 dow cor 409.62 750.8 15.0 1984 dow cor 423.67 984.6 19.7 1984 dow cor 437.67 1265.2 25.3 This work 332.991 113.0 1.1 This work 339.996 139.2 1.4 This work 340.001 139.0 1.4 This work 350.015 185.0 1.9 This work 359.999 241.6 2.4 This work 370.001 311.5 3.1 This work 379.998 395.7 4.0 This work 389.995 495.9 5.0 This work 399.996 614.0 6.1 a Values estimated from a pixel map of a figure in this reference.
3.0 3.0 3.0 3.0 3.0 2 2 2 2 2 1 1 1 1 1 1 1 1 1
References (1)
(2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14) (15) (16) (17)
Frenkel, M.; Chirico, R. D.; Diky, V.; Kroenlein, K.; Muzny, C. D.; Kazakov, A. F.; Magee, J. W.; Abdulagatov, I. M.; Lemmon, E. W. ThermoData Engine (TDE) Version 8.0 (Pure Compounds, Binary Mixtures, Ternary Mixtures and Chemical Reactions) NIST Standard Reference Database #103b. Thermodynamics Research Center (TRC), Thermophysical Properties Division, National Institute of Standards and Technology: Boulder, CO, 2013. Goldberg, R. N.; Weir, R. D. Conversion of Temperatures and Thermodynamic Properties to the Basis of the International Temperature Scale of 1990 (Technical Report). Pure Appl. Chem. 1992, 64, 1545-1562. Design Institute for Physical Properties (DIPPR) 801 Database. https://app.knovel.com/web/toc.v/cid:kpDIPPRPF7/ (accessed 09-Feb-2016); AICHE Cheng, J. S.; Yaws, C. L.; Dickens, L. L.; Hopper, J. R.; Hsu, G.; Lutwack, R. Physical and Thermodynamic Properties of Dichlorosilane. Ind. Eng. Chem. Proc. Des. Dev. 1984, 23, 48-52. Yungman, V. S.; Medvedev, V. A.; Glushko, V. P.; Gurvich, L. V., Eds., Thermal Constants of Compounds. Begell House: New York, 1999. Britton, L. G. Combustion hazards of silane and its chlorides. Plant/Operations Progress 1990, 9, 16-38. Myers, K. H. Thermodynamic and Transport Property Prediction Methods for Organometallic Compounds. Master's Thesis, Pennsylvania State University, State College, PA, 1990. Lyderson, A. Estimation of critical properties of organic compounds by the method of group contributions; 3; University of Wisconsin: Madison, WI, 1955; p 22. Kirk, R. E.; Othmer, D. F.; Grayson, M.; Eckroth, D. Encyclopedia of Chemical Technology. Wiley: New York, 1978. Ambrose, D. Correlation and Estimation of Vapor-Liquid Critical Properties. II. Critical Pressures and Critical Volumes of Organic Compounds; Chem. 98; National Physics Laboratory: Teddington, U.K., 1979; p 45. Air Products. Physical Properties for Dichlorosilane http://www.airproducts.com/products/Gases/gas-facts/physical-properties/physicalproperties-dichlorosilane.aspx; (accessed 10-Feb-16). Air Liquide. Gas Encyclopedia: Dichlorosilane. http://encyclopedia.airliquide.com/Encyclopedia.asp?GasID=23#GeneralData; (accessed 10-Feb-16). Stock, A.; Somieski, C.; Wintgen, R. Silicon Hydrides. III. Disiloxane (SiH 3)2O; Tetrachloromonosilane, SiCl4; Hexachlorodisiloxane (SiCl3)2O. Ber. Dtsch. Chem. Ges. 1917, 50, 1754-1764. Wintgen, R. Dampfdrucke und Verdampfungswärmen von Siliciumwasserstoffen und deren einfachen Abkömmlingen. Ber. Dtsch. Chem. Ges. 1919, 52, 724-731. Glemser, O.; Lohmann, W. Neues Verfahren zur Darstellung von SiH3Cl und SiH2Cl2. Z. Anorg. Allg. Chem. 1954, 275, 260-266. Vorotyntsev, V. M.; Balabanov, V. V.; Shamrakov, D. A. Temperature Dependence of the Vapour Pressure of Dichlorosilane at 290-250 K. Russ. J. Phys. Chem. 1986, 60, 138. Olson, J. D. Measurement of Vapor-Liquid Equilibria by Ebulliometry. Fluid Phase Equilib. 1989, 52, 209-218.
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(30) (31) (32) (33) (34) (35) (36) (37) (38)
Matheson. Dichlorosilane. https://www.mathesongas.com/pdfs/products/EGG/dichlorosilane.pdf; (accessed 10-Feb16). Buff, H.; Wöhler, F. Ueber neue Verbindungen des Siliciums. Justus Liebigs Ann. Chem. 1857, 104, 94-109. Friedel, C.; Ladenburg, A. Ueber das Siliciumchloroform und dessen Derivate. Justus Liebigs Ann. Chem. 1867, 143, 118-128. Pape, C. Ueber Siliciumpropylverbindungen. Justus Liebigs Ann. Chem. 1884, 222, 354374. Gattermann, L. Untersuchungen über Silicium und Bor. Ber. Dtsch. Chem. Ges. 1889, 22, 186-197. Besson, M. A. Sur l'Action de l'Acide Iodhydride sur le Chlorure de Silicium. C. R. Acad. Sci. 1891, 112, 611-614. Ruff, O.; Albert, K. Ueber das Siliciumchloroform. Ber. Dtsch. Chem. Ges. 1905, 38, 2222-2243. Stock, A.; Zeidler, F. Siliciumwasserstoffe XIV.: Zur Kenntnis des Trichlor- und Tetrachlor-monosilans, SiHCl3 und SiCl4. Ber. Dtsch. Chem. Ges. 1923, 56, 986-997. Booth, H. S.; Stillwell, W. D. Trichlorosilane. J. Am. Chem. Soc. 1934, 56, 1529-1530. Pirenne, M. H. Untersuchung des moleküls SiHCl3 mit Röntgeninterferenz. Phys. Z. 1939, 40, 145-148. Jenkins, A. C.; Chambers, G. F. Vapor Pressures of Silicon Compounds. Ind. Eng. Chem. 1954, 46, 2367-2369. Shakhparonov, M. I.; Lel'chuk, S. L.; Korchemskaya, K. M.; Martynova, M. E.; Baburina, I. I. Investigation of Vapor Pressure and Density in the Binary Systems Methyldichlorosilane +Trimethylchlorosilane and Silicochloroform + Benzene. Zh. Prikl. Khim. (Leningrad) 1960, 33, 2699-2703. Nisel'son, L. A.; Lapidus, I. I. Liquid-Vapour Equilibrium in Systems Formed by Silicon Tetrachloride and Trichlorosilane with Dibutyl Ether and Various Impurities. Russ. J. Phys. Chem. 1965, 39, 80-83. Dow Corning, Private Communication in Design Institute for Physical Properties (DIPPR) 801 Database, 1984. Korablina, T. P.; Mazurina, N. I.; Sokolov, N. M. Manufacture of Pure Tetramethylsilane. Khim. Prom-st. (Moscow) 1992, 68, 513-515. Regnault, H. V. Forces Élastiques des Vapeurs à Saturation Dans le Vide. Mem. Acad. Sci. Inst. France 1862, 26, 339-664. Haagen, A. Bestimmung der Brechungsexponenten und specifischen Gewichte einiger flüssigen Haloidverbindungen. Ann. Phys. (Berlin) 1867, 207, 117-128. Schlundt, H. The Dielectric Constants of Some Inorganic Solvents. J. Phys. Chem. 1903, 8, 122-130. Becker, W.; Meyer, J. Das Atomgewicht des Siliciums. Z. Anorg. Chem. 1905, 43, 251266. Kahlenberg, L.; Koenig, R. Latent Heat of Vaporization and Specific Heat of Methyl Silicate. J. Phys. Chem. 1907, 12, 290-292. Biltz, W. Beiträge zur Systematischen Verwandtschaftslehre XXIV. Über das Vermögen Kristallisierter Salze, Ammoniak zu Binden. Z. Anorg. Allg. Chem. 1923, 130, 93-139.
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(47) (48) (49) (50) (51) (52) (53)
Rabinowitsch, E. Über die Additivität der Molekularvolumina flüchtiger anorganischer Verbindungen. Ber. Dtsch. Chem. Ges. 1925, 58, 2790-2798. Maluquer Cueto, J. Estudios Sobre Disolventes: Determinación de la Constante Ebullioscópica del Tetracloruro de Silicio. Quim. E. Ind. 1926, 3, 85-86. Robinson, P. L.; Smith, H. C. CLXIV.-A Comparison of the Atomic Weights of Silicon from Different Sources. J. Chem. Soc 1926, 129, 1262-1282. Bond, P. A.; Stephens, W. R. Systems Formed by Certain Tetrahalides. J. Am. Chem. Soc. 1929, 51, 2910-2922. Nasu, N. Boiling Point Curves of the Binary Systems, TiCl4-CCl4, TiCl4-SiCl4 and TiCl4SnCl4. Bull. Chem. Soc. Jpn. 1933, 8, 392-399. Kearby, K. The Vapor Pressure of Silicon Tetrachloride. J. Am. Chem. Soc. 1936, 58, 374-375. Bowden, S. T.; Morgan, A. E. XXXVII. The Temperature Variation of Viscosity in NonPolar and Dipolar Inorganic Liquids. Philos. Mag. 1940, 29, 367-378. Korchemskaya, K. M.; Shakhparonov, M. I.; Lel'chuk, S. L.; Martynova, M. E.; Baburina, I. I.; Voronina, R. D. Vapor Pressure and Density of Saturated Vapors of Binary Solutions of Chlorosilane Derivatives. Zh. Prikl. Khim. (Leningrad) 1960, 33, 2703-2708. Nisel'son, L. A.; Seryakov, G. V. The SiCl4-PCl3, SiCl4-POCl4, and SiCl4-PCl5 Systems. Zh. Neorg. Khim. 1960, 5, 1139-1145. King, W. R.; Canjar, L. N. Vapor Pressures of Silicon Tetrachloride-Carbon Tetrachloride Mixtures. J. Chem. Eng. Data 1962, 7, 351-352. Crookston, R. B.; Canjar, L. N. Vapor Pressures of Silicon Tetrachloride-Titanium Tetrachloride Mixtures. J. Chem. Eng. Data 1963, 8, 544-547. Capkova, A.; Fried, V. Vapor-Liquid Equilibrium in the System TetrachlorosilaneTrimethylchlorosilane. Collect. Czech. Chem. Commun. 1964, 29, 336-340. Jain, D. V. S.; Yadav, O. P. Thermodynamics of n-Alkane Solutions. VIII. Vapor Pressures and Excess Free Energies for the Silicon Tetrachloride/n-Hexane System. Indian J. Chem. 1973, 11, 28-30. Weiwad, F.; Kehlen, H.; Kuschel, F.; Sackmann, H. Behavior of Binary Liquid Mixed Phases. 7. Free Excess Enthalpies in Tetrachloride Systems. Z. Phys. Chem. (Leipzig) 1973, 253, 114-124. Toczylkin, L. S.; Young, C. L. Vapor Pressures of some Liquids of Quasi-Spherical Molecules Near their Critical Points and the Applicability of the Principle of Corresponding States. Aust. J. Chem. 1977, 30, 1591-1593.
DESCRIPTION Log p vs 1/T plot showing calculation of extrapolated critical pressure for dichlorosilane
Table of estimated critical pressures and temperatures of dichlorosilane.
Tables of literature vapor pressure data for dichlorosilane, trichlorosilane and tetrachlorosilane and their estimated uncertainties used in this work.
Tables of vapor pressure and boiling temperatures of dichlorosilane, trichlorosilane and tetrachlorosilane data not contained with the NIST ThermoData Engine (TDE).1 Note: temperatures have been corrected to ITS-90 using the polynomial expressions of Goldberg and Weir.2
p/kPa
10000
1000 2.15
2.25
2.35 1000/(T/K)
2.45
2.55
Figure S1. Dichlorosilane extrapolated critical pressure at the predicted critical temperature of 451.5 K:3 ○, this work, ●, extrapolated critical pressure (4950 kPa); ●, predicted critical pressure in DIPPR database.3
Table S1. Predicted critical temperature and pressures for dichlorosilane Tc/K
Pc/kPa
Reference
452
4550
Chen et al.4
470
4530
Yungman et al.5
449
4720
Britton6
459
4590
Myers7
451.5
-
Lyderson8
449
-
Kirk et al.9
-
4599
Ambrose10
449
4680
Air Products11
449.5
4378
Air Liquide12
Table S2. References of vapor pressure and boiling temperature data for dichlorosilane Shorthand source Reference 1919 sto som 0 Stock and Somieski13 1919 win Wintgen14 1954 gle loh Glemser and Lohmann15 1986 vor bal Vorotyntsev et al.16 1989 ols 0 Olson17 mat datasheet Matheson datasheet18 a NIST ThermoData Engine1
In TDEa Y N N N Y N
Table S3. References of vapor pressure and boiling temperature data for trichlorosilane Shorthand source Reference 1857 buf wöh Buff and Wöhler19 1867 fri lad Friedel and Ladenburg20 1884 pap Pape21 1889 gat Gattermann22 1891 bes Besson23 1905 ruf alb Ruff and Albert24 1923 sto zei Stock and Zeidler25 1934 boo sti Booth and Stillwell26 1939 pir Pirenne27 1954 jen cha 0 Jenkins and Chambers 28 1960 sha lel Shakhparonov et al.29 1965 nis lap Nisel'son and Lapidus30 1984 dow cor Dow Corning3,31 1989 ols 0 Olson17 1992 kor maz Korablina et al.32 a NIST ThermoData Engine1
In TDEa N N N N N N N N N Y Y, but some data missing N N Y N
Table S1. References for Sources of Additional Vapor Pressure and Boiling Temperature Data for Tetrachlorosilane (SiCl4). Source 1862 reg 1867 haa 1904 sch 1905 bec mey 1908 kah koe 1917 sto som 0 1919 win 1923 bli 1925 rab 1926 mal 1926 rob smi 1929 bon ste 1933 nas 1936 kea 1940 bow mor 1954 jen cha 0 1960 kor shar 0 1960 nis ser 1962 kin can 0 1963 cro can 0 1964 cap fri 0 1965 nis lap 1973 jai yad 0 1973 wei keh 0 1977 toc you 0 1984 dow cor
Reference Regnault33 Haagen34 Schlundt35 Becker and Meyer36 Kahlenberg and Koenig37 Stock et al.13 Wintgen14 Blitz38 Rabinowitsch39 Maluquer Cueto40 Robinson and Smith41 Bond and Stephens42 Nasu43 Kearby44 Bowden and Morgan45 Jenkins and Chambers 28 Korchemskaya et al.46 Nisel'son and Seryakov47 King and Canjar48 Crookston and Canjar49 Capkova and Fried50 Nisel'son and Lapidus30 Jain and Yadav51 Weiwad et al. 52 Toczylkin and Young53 Dow Corning3,31
In TDE N N N N N Y N N N N N N N Y N Y Y N Y Y N N Y Y Y N
Table S5. Vapor Pressure and Boiling Temperature Data for Dichlorosilane (SiH2Cl2) with Estimated Uncertainties (references for the sources are contained in Table S2) Source 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 sto som 0 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1954 gle loh 1954 gle loh 1954 gle loh 1954 gle loh 1986 vor bal 1986 vor bal
T K 163.076 172.685 177.688 182.891 188.593 193.195 199.195 203.095 207.695 212.596 218.692 222.688 227.685 232.682 237.678 242.674 247.87 252.966 258.062 263.058 268.054 273.15 278.147 281.345 193.20 222.69 257.96 268.05 273.15 281.34 206.70 226.19 236.18 237.18 183.013 193.013
p kPa 0.0267 0.067 0.13 0.23 0.4 0.6 1.0 1.4 2 2.8 4.4 5.73 7.73 10.5 13.9 18.1 23.7 30.3 37.9 47.3 58.9 73.2 88.5 101 0.60 5.69 37.9 59.0 73.2 100 1.7 7.1 12.1 12.8 0.884 1.78
u(p) u(p)/p kPa 0.0053 20 0.013 20 0.03 20 0.05 20 0.08 20 0.120 20 0.10 10 0.14 10 0.2 10 0.28 10 0.44 10 0.57 10 0.77 10 1.0 10 1.4 10 1.8 10 2.4 10 3.0 10 3.8 10 4.7 10 5.9 10 7.3 10 8.9 10 10 10 0.06 10 0.57 10 3.8 10 5.9 10 7.3 10 10 10 0.17 10 0.71 10 1.2 10 1.3 10 Excluded from fit, not estimated Excluded from fit, not estimated
1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1986 vor bal 1989 ols 0 1989 ols 0 1989 ols 0 mat datasheet mat datasheet mat datasheet mat datasheet mat datasheet This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1)
203.012 213.011 223.010 233.008 243.006 253.004 263.002 273.000 280.998 289.996 299.993 309.991 319.988 329.985 339.983 349.980 344.732 375.774 396.72 273.15 288.64 294.14 305.33 316.43 299.988 299.993 299.993 299.994 299.999 299.999 300.001 309.992 319.983 319.993 319.995 319.996 319.998 329.994 330.017 339.991 339.991
3.33 5.89 9.90 15.9 24.6 36.7 53.1 74.9 93.5 158 215 287 376 484 614 768 703 1386 2064 73.1 131 161 226 314 213.3 214.4 216.5 214.5 212.0 214.2 216.5 284.3 377.6 377.9 381.4 377.3 380.4 485.8 492.2 625.3 626.4
Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated 7 1.0 14 1.0 21 1.0 7.3 10 13 10 16 10 23 10 31 10 2.1 1 2.1 1 2.2 1 2.2 1 2.1 1 2.1 1 2.2 1 2.8 1 3.8 1 3.8 1 3.8 1 3.8 1 3.8 1 4.9 1 4.9 1 6.3 1 6.3 1
This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 1) This work (sample 2) This work (sample 2) This work (sample 2)
339.991 339.992 339.998 349.989 349.99 349.992 349.996 359.983 359.988 359.991 359.991 359.992 369.984 369.992 369.992 379.985 379.989 379.99 379.99 379.992 389.99 389.991 389.994 399.989 399.992 409.984 410.004 419.991 323.006 343.007 362.99
631.6 625.6 628.6 789.0 784.7 786.4 785.0 981.9 978.0 985.9 990.3 982.2 1205 1205 1209 1469 1474 1476 1477 1484 1781 1784 1779 2099 2138 2559 2534 3016 407.8 672.6 1052.1
6.3 6.3 6.3 7.9 7.9 7.9 7.9 9.8 9.8 9.9 9.9 9.8 12 12 12 15 15 15 15 15 18 18 18 21 21 26 25 30 4.1 6.7 10.5
1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1
Table S6. Vapor Pressure and boiling temperature data for Trichlorosilane (SiHCl3) with estimated uncertainties (references for the sources are contained in Table ) Source
1857 buf wöh 1867 fri lad 1884 pap 1889 gat 1891 bes 1905 ruf alb 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei 1923 sto zei
T
p
K 315.13 309.13 306.13 309.13 307.13 306.13 188.19 188.19 193.10 198.20 202.90 203.10 208.00 212.70 218.99 223.19 223.29 228.29 232.98 237.78 237.88 242.68 247.87 252.87 252.97 257.96 262.66 267.15 267.25 273.15 273.15 278.55 283.64 283.64 288.44 293.34
kPa 101.33 101.33 101.33 101.33 101.33 101.06 0.09 0.11 0.17 0.25 0.36 0.37 0.55 0.80 1.25 1.73 1.73 2.53 3.37 4.60 4.65 6.07 8.07 10.67 10.67 13.87 17.60 21.9 22.3 29.1 29.1 36.7 45.1 45.3 54.9 66.8
u(p) kPa Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated 0.02 0.02 0.03 0.05 0.04 0.04 0.05 0.08 0.13 0.17 0.17 0.25 0.34 0.46 0.47 0.61 0.40 0.53 0.53 0.69 0.88 1.1 1.1 1.5 1.5 1.8 2.3 2.3 2.8 3.3
u(p)/p
20 20 20 20 10 10 10 10 10 10 10 10 10 10 10 10 5 5 5 5 5 5 5 5 5 5 5 5 5 5
1923 sto zei 1923 sto zei 1923 sto zei 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1934 boo sti 1939 pir
298.14 303.23 305.13 273.15 278.75 282.65 287.72 292.50 297.82 302.61 307.55 312.12 305.21
79.7 95.6 102.0 29.9 37.7 44.4 54.2 65.2 79.4 93.9 111.8 129.5 107.8
4.0 4.8 5.1 1.5 1.9 2.2 2.7 3.3 4.0 4.7 5.6 6.5 7.5
5 5 5 5 5 5 5 5 5 5 5 5 7
1939 pir
313.27
146
10
7
a
1939 pir
318.25
165
11
7
a
1939 pir
323.27
190
13
7
a
1939 pir
328.21
218
15
7
a
1939 pir
333.19
253
18
7
a
1939 pir
338.17
284
20
7
a
1939 pir
343.19
329
23
7
a
1939 pir
347.92
370
26
7
a
1939 pir
351.22
398
28
7
a
1939 pir
353.08
436
31
7
a
1939 pir
356.13
466
33
7
a
1939 pir
358.13
489
34
7
a
1939 pir
360.21
512
36
7
a
1939 pir
363.15
551
39
7
a
1954 jen cha 0
275.249
31.57
0.63
2
1954 jen cha 0
283.244
44.45
0.89
2
1954 jen cha 0
291.839
62.25
1.24
2
1954 jen cha 0
295.637
72.38
1.45
2
1954 jen cha 0
300.135
85.18
1.70
2
1954 jen cha 0 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel
304.733 290.839 293.438 295.437 297.336
100.1 59.9 66.51 71.3 76.53
2.0 1.2 1.3 1.4 1.5
2 2 2 2 2
a
1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1960 sha lel 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1966 lap nis 1 1984 dow cor 1984 dow cor 1984 dow cor 1984 dow cor 1992 kor maz 1989 ols 0 1989 ols 0 1989 ols 0 This work This work This work This work This work This work This work This work This work This work This work
299.535 301.635 303.034 304.433 305.033 305.533 306.633 325.0 322.6 319.0 316.2 314.3 308.8 305.5 303.5 302.984 304.983 309.981 312.98 314.979 319.978 324.976 395.510 409.617 423.675 437.673 304.80 375.674 410.067 432.913 310 320 329.996 340 350 359.995 369.996 379.995 380.499 384.998 390
83.1 89.8 94.3 98.8 101.3 102.7 106.5 189.7 176.5 157.4 143.1 133.0 110.7 100.5 92.6 92.4433 98.63 115.546 126.751 134.685 156.244 180.428 1075 1396 1794 2258 100.00 700 1393 2064 121.9 167.5 225.4 297.4 385.6 492.1 619.6 770.2 778.2 854.6 946.0
1.7 2 1.8 2 1.9 2 2.0 2 2.0 2 2.1 2 2.1 2 Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated 22 2 28 2 36 2 45 2 Not estimated 7 1 14 1 21 1 1.2 1 1.7 1 2.3 1 3.0 1 3.9 1 4.9 1 6.2 1 7.7 1 7.8 1 8.6 1 9.5 1
a a a a a a a a a a a a a a a
a
This work 394.995 1044 10 1 Values estimated from a pixel map of a figure in this reference.
Table S7. Additional Vapor Pressure and boiling temperature data for Tetrachlorosilane (SiCl4) not included in NIST TDE (references for the sources are contained in Table S1) Source
1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1862 reg 1867 haa 1904 sch 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey
T
p
K 246.95 248.16 251.11 253.7 256.88 261.55 268.8 271.24 273.15 275.72 281.18 291.24 294.39 295.62 298.4 301.15 306.03 309.19 309.72 315.22 317.83 322.61 327.15 330.09 333.19 336.42 331.12 330.62 273.2 273.2 278.1 278.1 283.1 283.1 288.1 288.1
kPa 2.46 2.60 3.09 3.62 4.34 5.69 8.23 9.36 10.23 11.65 15.13 24.01 28.02 28.63 32.74 35.9 43.5 48.9 50.7 61.2 67.6 79.5 92.4 101.8 112.2 123.6 100.8 99.9 15.3 15.6 17.6 18.0 19.9 20.1 23.2 23.5
u(p)
u(p)/p
kPa 0.07 3 0.08 3 0.09 3 0.11 3 0.13 3 0.17 3 0.25 3 0.28 3 0.31 3 0.35 3 0.45 3 0.72 3 0.84 3 0.86 3 0.98 3 1.1 3 1.3 3 1.5 3 1.5 3 1.8 3 2.0 3 2.4 3 2.8 3 3.1 3 3.4 3 3.7 3 Not estimated Not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated
1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1905 bec mey 1908 kah koe 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1917 sto som 0 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win
293.1 293.1 298.1 298.1 330.02 330.02 330.12 203.195 208.196 213.196 218.192 223.188 228.185 233.182 238.178 243.174 248.17 253.166 258.162 263.158 268.154 273.15 278.147 283.144 288.141 293.138 298.136 303.134 308.132 313.13 318.128 323.127 328.125 329.925 205.20 209.20 213.19 216.69 222.19 226.19 230.68
28.7 28.9 34.8 34.9 101.3 101.3 98.7 0.13 0.20 0.27 0.33 0.53 0.73 1.00 1.31 1.87 2.53 3.45 4.67 6.07 7.93 10.3 13.1 16.7 20.8 25.7 32.1 39.5 48.0 57.3 68.7 80.7 94.7 1013 0.13 0.20 0.27 0.33 0.47 0.67 0.87
Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Excluded from fit, not estimated Not estimated 20 0.03 20 0.04 20 0.05 10 0.03 10 0.05 10 0.07 10 0.10 10 0.13 10 0.19 10 0.25 10 0.35 10 0.47 10 0.61 10 0.79 10 1.0 10 1.3 10 1.7 10 2.1 10 2.6 10 3.2 10 4.0 10 4.8 10 5.7 10 6.9 10 8.1 10 9.5 10 10.1 10 0.01 10 0.02 10 0.03 10 0.03 10 0.05 10 0.07 10 0.09
1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1919 win 1923 bli 1925 rab 1926 mal 1926 rob smi 1926 rob smi 1926 rob smi 1926 rob smi 1926 rob smi 1929 bon ste 1933 nas 1940 bow mor 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0 1936 kea 0
236.58 240.48 246.17 248.17 252.17 257.86 263.16 267.85 273.15 278.15 283.14 288.14 293.14 294.24 303.13 313.13 323.13 330.12 330.62 329.78 330.06 329.95 330.03 330.07 330.22 330.24 329.92 329.73 330.52 273.15 278.147 283.094 288.141 293.138 298.136 303.134 308.132 313.13 318.128 323.127 328.125
1.27 1.53 2.27 2.53 3.27 4.60 6.07 7.73 10.3 13.1 16.7 20.8 25.7 27.6 39.5 57.1 80.7 101 102 101 99.7 100 101 101 102 102 100 99.5 103 10.27 13.07 16.53 20.4 25.5 31.3 38.3 46.1 55.9 66.8 79.9 94.5
10 0.13 10 0.15 10 0.23 10 0.25 10 0.34 10 0.46 10 0.61 10 0.78 10 1.0 10 1.3 10 1.7 10 2.1 10 2.6 10 2.8 10 4.0 10 5.7 10 8.1 10 10 Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated Not estimated 0.51 5 0.65 5 0.83 5 1.0 5 1.3 5 1.6 5 1.9 5 2.3 5 2.8 5 3.3 5 4.0 5 4.7 5
1936 kea 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1954 jen cha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 kor sha 0 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1960 nis ser 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1962 kin can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0 1963 cro can 0
333.124 275.349 298.236 307.332 313.73 319.628 330.025 293.038 298.636 303.334 308.032 313.43 318.528 322.827 325.326 327.526 329.725 329.925 298.24 307.03 311.13 316.13 320.93 324.63 328.13 330.32 332.62 335.92 338.42 340.92 303.134 303.134 313.13 313.13 323.127 323.127 303.134 303.134 313.13 313.13 323.127
111.9 11.51 31.86 45.4 57.6 70.8 100.9 25.3 32.0 38.8 46.3 56.4 67.8 78.9 85.7 92.2 96.5 101 31.9 44.9 52.5 63.1 74.7 85.1 94.4 101.3 108.7 118.7 130.3 140.4 40.3 40.5 58.5 58.5 81.3 81.6 38.81 38.88 56.49 56.54 80.07
5.6 0.35 0.96 1.4 1.7 2.1 3.0 2.5 3.2 3.9 4.7 5.7 6.8 7.9 8.6 9.3 9.7 10 1.6 2.3 2.6 3.2 3.7 4.3 4.7 5.1 5.4 5.9 6.5 7.0 4.0 4.1 5.9 5.9 8.2 8.2 0.29 0.29 0.39 0.39 0.53
5 3 3 3 3 3 3 10 10 10 10 10 10 10 10 10 10 10 5 5 5 5 5 5 5 5 5 5 5 5 10 10 10 10 10 10 0.75 0.75 0.70 0.70 0.66
1963 cro can 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1964 cap fri 0 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1965 nis lap 1973 jai yad 0 1973 jai yad 0 1973 jai yad 0 1973 jai yad 0 1973 wei keh 0 1973 wei keh 0 1973 wei keh 0 1973 wei keh 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0 1977 toc you 0
323.127 273.700 278.426 285.513 292.958 302.663 307.542 313.450 325.656 330.625 307.82 309.84 314.71 320.78 325.81 326.86 328.65 330.14 334.56 337.92 341.18 344.68 346.07 298.144 303.143 308.142 313.14 293.145 303.143 313.14 323.137 455.361 459.861 464.761 469.06 473.56 475.26 482.26 486.56 488.46 490.46
80.27 10.4 13.2 18.2 25.3 37.5 45.4 56.5 86.1 101.3 46.2 49.8 58.3 73.7 86.1 89.6 96.1 100.3 115.3 127.2 141.2 160.7 166.22 31.769 38.722 46.979 56.58 25.68 38.64 56.34 79.9 1728 1859 1979 2130 2441 2360 2631 2761 2811 2912
0.53 0.5 0.7 0.9 1.3 1.9 2.3 2.8 4.3 5.1 2.3 2.5 2.9 3.7 4.3 4.5 4.8 5.0 5.8 6.4 7.1 8.0 8.31 0.061 0.072 0.085 0.10 0.25 0.39 0.56 0.8 52 56 59 64 200 71 79 83 84 87
0.66 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 0.19 0.19 0.2 0.2 1.0 1.0 1.0 1.0 3.0 3.0 3.0 3.0 8.2 3.0 3.0 3.0 3.0 3.0
a a a a a a a a a a a a a
1977 toc you 0 493.56 2982 89 1977 toc you 0 495.66 3082 92 1977 toc you 0 497.76 3212 96 1977 toc you 0 500.56 3333 100 1977 toc you 0 504.86 3524 106 1984 dow cor 381.51 413.0 8.3 1984 dow cor 395.51 562.6 11.3 1984 dow cor 409.62 750.8 15.0 1984 dow cor 423.67 984.6 19.7 1984 dow cor 437.67 1265.2 25.3 This work 332.991 113.0 1.1 This work 339.996 139.2 1.4 This work 340.001 139.0 1.4 This work 350.015 185.0 1.9 This work 359.999 241.6 2.4 This work 370.001 311.5 3.1 This work 379.998 395.7 4.0 This work 389.995 495.9 5.0 This work 399.996 614.0 6.1 a Values estimated from a pixel map of a figure in this reference.
3.0 3.0 3.0 3.0 3.0 2 2 2 2 2 1 1 1 1 1 1 1 1 1
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