Vacuum Components Catalog
Components Division, ULVAC, Inc.
Electron Beam Evaporation Source/Power Supply
Electron Beam Evaporation Source
EGL-35/EGL-35M External Dimension Diagram
(unit: mm)
EGL-35 EGL-35 108 108
110 110
65.5 65.5
130 130 122 122
Electron Beam Evaporation Source/ Power Supply
BASE BASE
6 40 40
20 20 7
7
36
INLET INLET
23
23
36
OUTLET OUTLET
79 79
50° 50°
dia. 10.5 dia. 10.5
6
dia. 50 dia. 50 R5 R5
10° 10°
25 25
206 206
98 98
94 94
93.5 93.5
External Dimension Diagram
77 50 77 50
R3
° dia. 32 3 32 dia. °R 15 R2 3 R R2
15
88
15
88
144 144 170 170
dia. 50 ° R4 RR34
10
15
dia. 50
°
10
dia. dia. 10 10
35.535.5 35.535.5
dia. dia. 10.210.2
77
25
77
25
EGL-35M EGL-35M
(unit: mm)
BASE
BASE
dia. 10.2
28
56
56
156
97 18 17
85
17
85
155
18
23.5 23.5
110 110
97
88
28
dia. 10.2
156
88
155
177
177
Specifications Item Maximum input power Beam deflection angle Crucible
Model
Quantity Dimensions
Effective evaporation angle (this value or greater in degrees) Evaporation rate Cooling water Water temperature External dimensions (except for projection) Weight Applicable power supply
230
Capacity
direct AL 250mm Crucible Coil WxDxH
VACUUM COMPONENTS
EGL-35 1 dia.50mm x dia.41mm x 25H mm
10kW 270°
EGL-35M
40cc
a2, b2 a: dia.50mm x dia.41mm x 25H mm b: dia.32mm x dia.24mm x 15H mm a40cc, b10cc
120° or more
90° or more
18000Å/min (using 10kW) 10L/min —
16000Å/min (using 8kW) 10L/min 2L/min
15-25°C 110mm x 206mm x 79mm 170mm x 240mm x 156mm 10kg 18kg HPS-1000S (HPS-510S)
Electron Beam Evaporation Source/Power Supply
Electron Beam Evaporation Source
EGL-35/EGL-35M External Dimension Diagram
(unit: mm)
EGL-35 EGL-35 108 108
110 110
65.5 65.5
130 130 122 122
Electron Beam Evaporation Source/ Power Supply
BASE BASE
6 40 40
20 20 7
7
36
INLET INLET
23
23
36
OUTLET OUTLET
79 79
50° 50°
dia. 10.5 dia. 10.5
6
dia. 50 dia. 50 R5 R5
10° 10°
25 25
206 206
98 98
94 94
93.5 93.5
External Dimension Diagram
77 50 77 50
R3
° dia. 32 3 32 dia. °R 15 R2 3 R R2
15
88
15
88
144 144 170 170
dia. 50 ° R4 RR34
10
15
dia. 50
°
10
dia. dia. 10 10
35.535.5 35.535.5
dia. dia. 10.210.2
77
25
77
25
EGL-35M EGL-35M
(unit: mm)
BASE
BASE
dia. 10.2
28
56
56
156
97 18 17
85
17
85
155
18
23.5 23.5
110 110
97
88
28
dia. 10.2
156
88
155
177
177
Specifications Item Maximum input power Beam deflection angle Crucible
Model
Quantity Dimensions
Effective evaporation angle (this value or greater in degrees) Evaporation rate Cooling water Water temperature External dimensions (except for projection) Weight Applicable power supply
230
Capacity
direct AL 250mm Crucible Coil WxDxH
VACUUM COMPONENTS
EGL-35 1 dia.50mm x dia.41mm x 25H mm
10kW 270°
EGL-35M
40cc
a2, b2 a: dia.50mm x dia.41mm x 25H mm b: dia.32mm x dia.24mm x 15H mm a40cc, b10cc
120° or more
90° or more
18000Å/min (using 10kW) 10L/min —
16000Å/min (using 8kW) 10L/min 2L/min
15-25°C 110mm x 206mm x 79mm 170mm x 240mm x 156mm 10kg 18kg HPS-1000S (HPS-510S)
