Laser Thermal Processing of Nanoparticle Inks on ...
Laser Thermal Processing of Nanoparticle Inks on Flexible Substrates for Biological Sensing Michael H. Willemann, Michael O. Thompson Department of Materials Science and Engineering, Cornell University
Introduction High performance electronics compatible with biological systems Current Challenges: • • • •
Organic monomers generally incompatible with in‐vivo applications Degradation in adverse environments, resulting in short lifetimes. Low to moderate performance (μ 100 nm/min Green films over 300 nm thick with RMS roughness 1600oC possible Scanning • Control of thermodynamics and Anneal kinetics with time scales over six orders of magnitude in time CO2 laser annealing
200
0.1
• Explored a novel nanoparticle deposition method compatible with roll‐to‐ roll processes • Demonstrated a two‐step transient laser annealing process for nanoparticle inks, consisting of a calcining step and high‐temperature sintering step • Fabricated electrically conductive ZnO thin films from a nanoparticle precursor
Future Work
0.01 200
225
250
Excimer Fluence (mJ/cm2)
300
• Expand sintering conditions to optimize electronic properties • Fabricate TFTs on flexible substrates and characterize their performance
Introduction High performance electronics compatible with biological systems Current Challenges: • • • •
Organic monomers generally incompatible with in‐vivo applications Degradation in adverse environments, resulting in short lifetimes. Low to moderate performance (μ 100 nm/min Green films over 300 nm thick with RMS roughness 1600oC possible Scanning • Control of thermodynamics and Anneal kinetics with time scales over six orders of magnitude in time CO2 laser annealing
200
0.1
• Explored a novel nanoparticle deposition method compatible with roll‐to‐ roll processes • Demonstrated a two‐step transient laser annealing process for nanoparticle inks, consisting of a calcining step and high‐temperature sintering step • Fabricated electrically conductive ZnO thin films from a nanoparticle precursor
Future Work
0.01 200
225
250
Excimer Fluence (mJ/cm2)
300
• Expand sintering conditions to optimize electronic properties • Fabricate TFTs on flexible substrates and characterize their performance
