Rudolph Technologies

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Investor Presentation Sidoti & Company, LLC Fifteenth Annual Emerging Growth Institutional Investor Forum March 22, 2011

Paul F. McLaughlin

Safe Harbor Statement The following material contains forward-looking statements relating to at least the following matters: industry projections and the company’s long

term operating model. Other forward-looking statements may be preceded by words such as “expects”, “anticipates” and “intends.” These forwardlooking statements are based on our current expectations and projections. However, they are subject to various risks and uncertainties that could cause actual results to differ materially from those projected in such statements, including the following: cyclicality of the semiconductor industry, customer concentration, introduction of new products by our competitors, and sole or limited sources of supply. Other risks and uncertainties are detailed in our respective Annual Reports on Form 10-K for the year ended December 31, 2009 filed with the Securities and Exchange Commission (SEC).

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Rudolph Technologies Evolution

2010: RTEC Business 10% Inspection

30%

60%

Software

1999: IPO

100%

Metrology

 2010: $195M Revenue 2010: RTEC Markets

 Front-end Metrology  $38M Revenue Back-end

Front-end

40%

60%

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Evolution - Building, Diversifying & Growing Inspection

Proven track record with synergistic and valueadded partnerships

Metrology 2010- Yield Dynamics (MKSI) Parametric analysis and Data Mining Software

Software

2009 - Adventa Control Technologies Inc. Process control software complements RTEC’s existing process analysis software = total solution

2008 - RSVI Inspection Industry-leading 3D technology, complements RTEC’s industry-leading 2D technology

2007- Applied Precision-Semiconductor Division Expanded reach across test floor-- #1 in probe card test & analysis

2006 - August Technology Expanded front-end macro presence and entered back-end inspection

2002- ISOA Entered macro defect inspection market

1999

Successful M&A a core competence

100% Metrology

4

Rudolph Technologies Evolution Importance…  Balanced portfolio for all cycles

 High margins through share leadership  Above average growth markets Inspection

Metrology Software

2010 60% Front-end

40% Back-end

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Rudolph Technologies “Hitting on all cylinders”! 150% growth overall in 2010….firmly positioned to out-perform in 2011 B.E. Macro Defect Inspection

40 30

20 10

Data Analysis Software Solutions

0 2010

• 221% revenue growth

RTEC Revenue

Transparent Film Metrology

RTEC Revenue

2009

RTEC Revenue

50

2009

10

Opaque Film Metrology

5

2009

20 15

2010

• 100% revenue growth

10 5 0

2010

• 110% revenue growth

15

0

25

60 50 40 30 20 10 0

20

RTEC Revenue

RTEC Revenue

F.E. Macro Defect Inspection

25 20 15

10 5 0

2009

• 365% revenue growth

2010

2009

2010

• 279% revenue growth Gartner data, 2010; Rudolph estimates.

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60 50 40 30 20 10 0 2010

RTEC % Market Share

#1 in market share

Transparent Thin Film Metrology

Data Analysis Software Solutions

10 0

2009

2010

10 0 2010

#2 in market share

30 20

10 0 2009

2010

20

#1 in market share

2009

40

#1 in market share

30

30 20

B.E. Macro Defect Inspection

40

Gartner data, 2010; Rudolph estimates.

RTEC % Market Share

2009

RTEC % Market Share

F.E. Macro Defect Inspection

RTEC % Market Share

RTEC % Market Share

Rudolph Technologies “Hitting on all cylinders”! Winning and protecting market share on all fronts

Opaque Film Metrology 80 60 40 20 0 2009

2010

#1 in market share

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Inspection Market (2010) - $1,913M Front-end market

Back-end market Macro

$204M

Macro-pattern $84M

AMAT KLAC Hitachi

#1 RTEC 50% KLAC Nikon

#1 RTEC 30% CAMT Toray

Bare Wafer

Micro-pattern

SEM Review

$186M

$1279M

KLAC Hitachi Topcon

KLAC AMAT Hitachi

$160M

RTEC 2010 Estimated Market $244M Front-end

Back-end CAGR (09-14)

CAGR (09-14) Macro Defect Inspection

29.6%

Wafer Fab Equipment

Gartner data, 2010; Rudolph estimates.

0.0%

Semiconductor Revenue

9.6%

20.0%

24.1%

Pkg. & Assembly Equip.

17.5%

Semiconductor Revenue

Wafer Level Inspection

40.0%

0.0%

13.4% 9.6%

10.0%

20.0%

30.0%

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Growth at Rudolph Technologies Out-performed in 2010….firmly positioned for 2011 B.E. Macro Defect Inspection • 221% revenue growth • Penetrating fringe of “micro” market

RTEC Revenue

50 40

30 20 10

RTEC Revenue

F.E. Macro Defect Inspection

0 2009

60 50 40 30 20 10 0

2010

• 110% revenue growth • Ensuring participation in all applications of new WLP market segment

2009

2010

F.E. Macro Defect Inspection 60 50 40 30 20 10 0 2009

2010

• #1 in market share • ~ 20 point share gain in 2010 • ~ 50% market share • New F30 product

RTEC % Market Share

RTEC % Market Share

Winning and protecting market share on all fronts! B.E. Macro Defect Inspection 40 30 20 10

• #1 in market share • Advanced packaging market projected to be fastest growing in ’11 • New NSX320 product • New applications • New partnerships

0 2009

2010 Gartner data, 2010; Rudolph estimates.

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Optical Film Metrology 2010 TAM ≈ $409M

Overlay $94M KLAC NANO ASML

Thin Film $180M

Optical CD $135M NANO KLAC Nova

Transparent Film $125M KLAC

RTEC #2 …16% Nova

2010 market-share projections, based on Gartner data, released Sept.2010, and RTEC estimates.

Opaque Film $55M #1 RTEC ..….60% Jordan Valley ReVera

Rudolph’s 2010 Projected Metrology TAM $180M 10

Growth at Rudolph Technologies Out-performed in 2010….firmly positioned for 2011 Transparent Film Metrology • 365% revenue growth • Newly established with key NAND and foundry customers.

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15 10 5

0 2009

RTEC Revenue

RTEC Revenue

25

Opaque Film Metrology 25

• 279% revenue growth • Supplier to 90% of the top-tier manufacturers

20 15

10 5 0

2010

2009

2010

Transparent Film Metrology • #2 in market share • Doubled market share • New S3000S product

30 20 10 0 2009

2010

RTEC % Market Share

RTEC % Market Share

Winning and protecting market share on all fronts ! Opaque Film Metrology

• #1 in market share • Expanding into new metal applications • New MetaPULSE G product

70 60 50 40 30 20 10 0 2009

2010 Gartner data, 2010; Rudolph estimates.

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Data Analysis and Review Business Unit (DARBU) Over 20 years of supplying defect and yield management solutions

Process Control Software Market Share Estimate 2010

Over 15 years supplying APC software to high volume semiconductor manufacturers >14,000 systems installed worldwide

Rudolph, 26% Other, 37% KLA, 10%

Broad product portfolio: Front-end: FDC, APC/R2R, Discover® Back-end: FDC, APC/R2R, Discover/Genesis® Fabless: YMS/Genesis

Magma/ Synopsys,Knights, 15% 12%

Rudolph is #1 in Process Control Software

Global Sales and Support (Direct) Margins > 90%, highest operating margins in RTEC

Build once / sell many times business model Gartner data, 2010; Rudolph estimates.

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Growth at Rudolph Technologies Out-performed in 2010….firmly positioned for 2011

RTEC Revenue

Data Analysis Software Solutions 20

• 100% revenue growth • Widest portfolio of products in the market

15 10 5 0 2009

2010

RTEC % Market Share

Winning and protecting market share on all fronts! Data Analysis Software Solutions • #1 in market share

• Double the share of next competitor • Consolidating technologies – creating new solutions

40 30 20 10 0 2009

2010 Gartner data, 2010; Rudolph estimates.

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Rudolph’s Public Launch into LED Market!  To date, Rudolph has been collaborating with a number of LED manufacturers in order to secure a technology leadership prior to “launch”      

Six different customers Forty systems in operation Hundreds of software system licenses Both R&D and High Volume Manufacturing Both Front-end process control and OQA Installations in US, Europe, and SE Asia

 Timing of Launch:  The industry has matured to focus beyond simply capacity. It is now investing in yield-performance improvement.  Rudolph is leveraging its #1 market-share in semiconductor products, along with its early entry into the LED space, to ensure a market leadership position is achieved in this market as well.

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Rudolph Technologies’ Potential Fab Penetration: A 20,000 wpm HB-LED Manufacturing Fab

Emerging in 2014:

Front-End Wafer Processing (six lithography levels)

OQA (100% inspection)

Wafer-Level Packaging (100% inspection) -post lens deposition -post bump -final OQA

MetaPULSE - LED (Post-epitaxy metrology) 10% sampling

NSX 320 - LED

NSX xxx - LED

F30 LED -ADI -Post-epi -Post laser lift-off 25% sample inspection Discover Enterprise - LED ARTIST - LED AutoShell - LED ProcessWORKS - LED

2011-2014: Rudolph TAM per fab ~ $11M X 15 new fabs required per year = $165M

2014 - - : Rudolph TAM per fab ~ $18M X 15 new fabs required per year = $270M

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Rudolph Technologies TAM (Semi and LED) 800 700 600 500 400 300

200 100 0

Packaging Software LED OQA Process Control B.E. Inspection F.E. Inspection Data Analysis Transparent Metrology Metals Metrology Probe Card Analysis

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Financial Summary

Rudolph Technologies Confidential 17

2010 Outstanding… 2011 Forecast Even Better $60.0

$0.36

$0.40 $0.35

$50.0

$0.34

$0.30

$0.29

$40.0

$0.25

$30.0

$0.20 $0.15

$20.0 $0.11

$0.10

$10.0

$0.05

$-

$Q1

Q2

Q3

 2010 Revenue: $195.3

Q4

Drivers  Market share gains across all product lines and capacity buys in FEOL and BEOL  Technology buys for new applications: TSVs, eWLB, wafer level processing, bump

 High-growth potential in adjacent markets: Solar, LED  Strong ASPs in areas where RTEC maintains solid leadership positions

EPS Non-GAAP $1.10, GAAP $0.86

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Balance Sheet - Highlights Cash & Investments ($ IN MILLIONS)

December 31, 2010

$80 $60

Cash and Investments

$ 71.8M

Working Capital

$159.7M

$20

Fixed Assets

$13.7M

$0

Total Assets

$219.0M

$40

Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 2009

Long-Term Debt Shareholders’ Equity

$0 $ 185.0M

2010

Track record of positive cash flow History of cash funded M&A Demonstrated ability to fund R&D through cycles

Strong Debt Free Balance Sheet - Minimizes Impact of Downturns

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Structured for Operating and Earnings Leverage Q4' 10 Quarterly Revenue ($M) Gross Margin

$54.0

Target Model $40.0

$50.0

$60.0

$70.0

54%

54%

56%

58%

59%

54%

58%

59%

59%

60%

98%

92%

94%

95%

96%

33%

33%

33%

33%

33%

Operating Expense

34%

49%

39%

33%

29%

Operating Income

20%

5%

17%

25%

30%

Non-GAAP Operating Income

24%

11%

22%

29%

33%

Systems GM Software GM Service and Upgrades GM

Non-GAAP Operating Income excludes restructuring, stock-based compensation and other non-recurring charges.

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1Q 2011 – Guidance  Q1Revenue  Q1 revenue flat to down 10% ($48.6M to $54.0 M)  1H2011 revenue to be flat +/- 5% with the Q3 and Q4 2010 levels ($101.0M to $111.6 M)

 Q1 Earnings  Q1 GAAP EPS of $0.18 to $0.24 per share compared with $0.30 in Q4’10  Doubling of tax rate and higher operating expenses impacts earnings by $0.06 per share in Q1

 Full Year  Expect double digit revenue growth and commensurate growth in EPS resulting in all time revenue and operating earnings records Guidance set forth January 31, 2011. Company assumes no obligation to update guidance

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Rudolph Technologies (RTEC) as an Investment • Performance Characteristics – – – – – –

Revenue of $195 M; up 148% from 2009 FY earnings of $27 M Q4 18% income after taxes of $9.6 M hit all time Rudolph high Market-share gains in every market segment of participation New products + leveraged business model for 2011 Entering new high-growth markets RTEC - a GROWTH stock

• Value Characteristics (stock price of $9.47 on 3/17/11) – – – –

Cash per share ≈ $2.30 Current P/E of 8.6 Forward P/E of 9.6 (using Sidoti 2011 estimate) P/S of 1.5 P/Book of 1.6 RTEC - a VALUE stock Return on Equity of 16.1%

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Current status in Japan • March 16, 2011 CEO letter on web site • www.Rudolphtech.com

Investor Relations

• Rudolph Technologies Japan, KK 1. 2. 3. 4. 5.

Status of Japanese staff and families Status at Takatsu facility Program for customer support in Japan Status of supply chain Forecast

Rudolph Technologies Confidential

Thank You

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