Specialty Graphites for the Semiconductor Industry - SGL Group
Graphite Materials and Systems
Specialty Graphites for the Semiconductor Industry
2
Specialty Graphite and Process Solutions – made by SGL Group. ̤̤ Advanced material, equipment, and process solutions ̤̤ Engineered for customers from more than 35 industries ̤̤ Tailor-made from the most comprehensive product portfolio ̤̤ In-depth production and material knowledge ̤̤ Consistent high quality, performance, and service ̤̤ Attractive total cost of ownership
Broad Base. Best Solutions.
Business Unit Graphite Materials and Systems
3
Advanced solutions enable our customers to get ahead. SGL Group offers advanced solutions – even for challenging applications. We understand the specific requirements of our customers and combine in-depth production, material, and engineering knowledge with the most comprehensive specialty graphite portfolio. This makes us the partner of choice to leading companies in many different industries.
Exceptional resistance to heat and corrosion, high
SGL Group covers the entire value chain of
purity and mechanical strength are just a few of
specialty graphite production, including raw
the outstanding properties which our materials
material processing, semi-finished product
offer. Specialty graphite products from SGL Group
manufacture, precision machining, purification,
achieve optimal results where other materials fail.
and coating. When it comes to engineering of
No matter what your specific requirements might
equipment and process solutions our service
be, we will identify the best solution from the most
range makes the difference: We offer mechanical
comprehensive range of specialty graphites.
and process design, production, assembly, commissioning, and service – all from a one-stop shop.
̤̤ Fine grain graphite: isostatic, vibrationmolded, die-molded, extruded
This is how we control and ensure the consistent
̤̤ Expanded natural graphite
high quality, reliability, and performance of our
̤̤ Carbon fiber-reinforced carbon (C/C)
products – and enable our customers to become
̤̤ Soft and rigid graphite felts
more competitive. Challenge us. We are there for
̤̤ Silicon carbide-coated graphite materials
you worldwide.
Additionally we use other materials like PTFE, silicon carbide, and specialty metals.
Specialty graphite solutions for the semiconductor industry
With our portfolio and technical know-how
Innovative specialty graphite solutions play a key
spanning more than 35 different industries,
role in the challenging processes of the semicon-
we engineer tailor-made solutions in close
ductor industry. With optimized plant components
partnership with our customers.
and high-performance materials, we are a partner
b Machining a wafer carrier
of choice to leading original equipment manu facturers (OEMs) and semiconductor producers.
4
Specialty graphites – made by SGL Group. Solutions for the semiconductor and LED industries.
Base material
Al2O3 single crystal growing
Sapphire (Al2O3)
SiC sublimation growing
Silicon carbide (SiC)
Si monocrystal pulling (CZ process)
Silicon (Si) Converter
substrate wafer
substrate wafer semiconductor wafer
substrate wafer semiconductor wafer
Siemens reactor
Value chain
Polysilicon
Growing single crystals
Wafer slicing
Products of the SGL Group
Heaters Heat shields Insulation Electrodes (polychucks)
Heaters Crucibles Heat shields Insulation
Slicing beams
Materials made of carbon and graphite
SIGRAFINE® extruded, isostatic and vibration molded graphites SIGRABOND® carbon fiber-reinforced carbon (C/C) SIGRATHERM® carbon and graphite felts SIGRAFINE® SiC Coating
SIGRAFINE® extruded, isostatic graphites SIGRABOND® carbon fiber-reinforced carbon (C/C) SIGRATHERM® carbon and graphite felts SIGRAFINE® SiC Coating
SIGRAFINE® isostatic graphites
SPECIALTY GRAPHITE solutions FOR THE SEMICONDUCTOR INDUSTRY
5
For many processes in semiconductor production, compo-
Our portfolio includes heaters, support crucibles, heat shields,
nents made from specialty graphites are indispensable, e.g.
and insulating components for many single crystal growing
in crystal growing or subsequent finishing by epitaxy, ion
processes, such as the Czochralski (CZ) process, the sublima-
implantation or plasma etching, and also in the production
tion or physical vapor transport method (PVT), and the heat
of LED chips. This is because the processes usually operate at
exchange method (HEM). We also supply susceptors for silicon
very high temperatures and in an extremely corrosive envi-
epitaxy and MOCVD (metal organic chemical vapor depositi-
ronment: at the same time, high purity and absolute precision
on) reactors. Our components are normally manufactured to
are required.
individual requirements. In addition, we assist our customers in planning, design, and operational optimization.
For the challenging processes of semiconductor production, we offer reliable solutions with specialty graphites.
+ SIGRAFINE® is the new brand name for our fine-grain graphites, previously known under the names RINGSDORFF®, SIGRAFORM®, SIGRAMENT® and CRYSTA-SIL®.
MOCVD
Silicon epitaxy
Epitaxy
Further stages in wafer processing
Susceptors
Components for ion implantation
SIGRAFINE® isostatic graphites SIGRAFINE® SiC Coating
SIGRAFINE® isostatic graphites
6
Products for the semiconductor industry As a reliable supplier and partner to our customers, we offer optimum solutions and process reliability for every application. What differentiates us: ̤̤ Most comprehensive selection of highpurity specialty graphites ̤̤ Consistently high material and product quality ̤̤ Long-standing experience and material know-how ̤̤ Individualized production tailored exactly to customer requirements ̤̤ Application-specific finishing by cleaning, mechanical processing or coating
SPECIALTY GRAPHITES FOR THE semiconductor INDUSTRY
7
Specialty graphites for polysilicon production
c Electrodes (polychucks) for Siemens reactors b Meander heater for CZ units
c Graphite rigid felt cylinder for insulation of converters
In Siemens reactors and STC-TCS converters for recycling
Our experts select the best materials for the specific require-
process gases, temperatures up to 1000 °C (1800 °F) and a highly
ments and operating conditions and manufacture tailored
corrosive environment prevail. Our graphite components
products from them. With our newly developed shaping and
perform impressively well here because they are extremely
connecting solutions, for example, we can supply converter
resistant to heat and corrosion.
insulation in virtually any length and diameter. To increase the service life of highly stressed components – like those in
For many years now, we have been supplying polysilicon
converters – we offer special silicon carbide (SiC) coatings.
manufacturers with a range of plant components. These include purified electrodes for polysilicon deposition, heaters, gas ducts for STC-TCS converters, heat shields and thermal insulation components.
Application-specific specialty graphites for polysilicon production Graphite Applications
Products
Fluidized-bed reactors (FBR)
Reactors
Siemens CVD process
Converters (STC-TCS)
isostatic
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
○
Polychucks
○
Gas distributors
○
Heating elements
○
Heat shields
○
Insulating cylinders
extruded
○ ○
○
○ ○ ○
○
○
○
○
8
Specialty graphites for growing semiconductor and sapphire single crystals
c Support crucible made from C/C
c Rigid felt cylinder for insulation
c Graphite components for CZ units
Whichever process is used for growing single crystals (HEM
These include heaters, crucibles, reflectors, and heat shields
for sapphire, CZ for silicon or PVT for SiC), it always operates
made from high-strength, homogeneous fine-grain graph-
at very high temperatures in an aggressive environment. To
ite or carbon fiber-reinforced carbon, as well as insulating
meet these challenges, the high-temperature zone (“hot zone”)
components produced from graphite felts. We select the best
in the furnace consists almost entirely of heat- and corrosion-
materials in the highest purity (ash value < 5 ppm) to suit
resistant graphite components.
the particular type of crystal growing unit. To extend the service life of highly stressed components, we supply special
SGL Group produces all the graphite components for crystal
SiC coatings. For these, we use the specially suitable isostatic
growing units of every kind – either individually or as a set.
graphites R6510 and R6810.
Application-specific specialty graphites for crystal growing units Graphite Applications
Monocrystal pulling
Products
isostatic
Crucibles
○
Heaters
○
Heat shields
○
Reflectors
○
extruded
Rigid felt
C/C
SiC coated
○ ○
Heaters
○
○
Heat shields
○
○
Insulation
Soft felt
○
Insulation Sapphire monocrystal growing
vibrationmolded
○
○
○
○
○
SPECIALTY GRAPHITES FOR THE SEMICONDUCTOR INDUSTRY
9
Specialty graphites for silicon epitaxy Before becoming a finished semiconductor product, a wafer passes through numerous steps. One increasingly important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the end product. Our SiC-coated graphite susceptors offer the particular advantages of extremely high purity, homogeneous coating, and an excellent service life. In addition, they have high chemical resistance and thermal stability. The SiC coating is applied homogeneously to very close tolerances. High-precision machining ensures a uniform susceptor profile. For inductively heated systems, we also produce material with optimum electrical resistance. The finished components are supplied with a purity and dimensional compliance certificate. SGL Group supplies susceptors and graphite components for all current epitaxy reactors. Our portfolio includes barrel susceptors for Applied Materials, Moore and LPE reactors, pancake susceptors for LPE, CSD,
c Susceptors for epitaxy reactors
and Gemini units, and single-wafer susceptors for Applied Materials and ASM units. All our susceptors are produced from high-strength, isosatic graphite. In addition, we manu facture components for ion implantation from specially suitable high-purity isostatic graphite. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable. We are also continually developing our materials and products further in close collaboration with manufacturers and operators of epitaxy units. Application-specific specialty graphites for silicon epitaxy Graphite Application
Silicon epitaxy
Products
isostatic
extruded
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
Barrel susceptors
○
○
Pancake susceptors
○
○
Single Wafer susceptors
○
○
10
Specialty graphites for LED chip production in MOCVD reactors During the extensive coating process in the MOCVD reactor, the substrate wafers are supported by rotating susceptors or carriers. The properties of the susceptor material have a key influence on coating quality and therefore on the chip reject rate. Our SiC-coated susceptors help ensure efficient manufacture of high-quality LED wafers with low wavelength deviation. Many important factors contribute to this, such as the very high purity and uniform thermal conductivity of both our isostatic graphite and the SiC coating. We use specially selected graphite grades for our susceptors and carriers. High-precision machining and homogeneous coating ensure that the wafer carrier pockets have a uniform profile and minimum flatness deviation. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable.
c Wafer carrier for LED chip production in MOCVD reactors
We are also continually developing our materials and components further in close collaboration with manufacturers and operators of MOCVD units. Together we want to increase chip yield in the production of LED wafers and further minimize wavelength deviation. In addition to susceptors and carriers, we also supply other graphite components for all current MOCVD reactors. Nearly every component can be SiC-coated, even with diameters exeeding 1 m (3').
a Pre-assembly of a high-temperature furnace at SGL Group
Application-specific specialty graphites for MOCVD reactors Graphite Application MOCVD (metalorganic chemical vapor phase deposition)
Products
isostatic
extruded
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
Susceptors/carriers
○
○
Lids, rings, satellites
○
○
11
Full service partner to manufacturers of furnace equipment A furnace manufacturer previously used to buy “hot zone” components individually, assemble them at his factory, then deliver the finished product. This process extended beyond core competencies, was complex, and delayed lead times. Together we have optimized this process. Today, we manufacture the required products, assemble them, and often supply direct to end customers all over the world This saves our customer time and money. This is just one example of an application specific optimized solution from the SGL Group.
12
Fine-grain graphites for the semiconductor industry Many applications in the semiconductor production benefit from our wide range of isostatic, extruded, and vibration-molded fine-grain graphites and their outstanding properties: ̤̤ High mechanical strength ̤̤ Consistently high quality ̤̤ High purity ̤̤ Large range of dimensions ̤̤ High corrosion resistance ̤̤ Excellent heat resistance
FINE-GRAIN GRAPHITES
13
SIGRAFINE® fine-grain graphites Isostatic, extruded, vibration-molded.
Our SIGRAFINE materials span the complete range of fine-
All components produced from the above-mentioned materials
grain graphites from isostatic and extruded to vibration-
can be supplied, if necessary, in extremely high purity and
molded graphites.
generally also with a SiC coating. We generally use isostatic
For the many different applications in the semiconductor
graphites with a suitable thermal expansion coefficient as
industry, we supply the optimum material in the usual
a substrate for SiC coating, but can use other graphites or
market sizes.
carbon/carbon materials as well to satisfy specific customer
For heater systems, certain of our isostatic and extruded
requirements.
graphite grades are suitable. Very long tubes can be produced in one piece with excellent results from extruded graphite. For extra-large components, we offer special vibration-molded
+ More information under: www.sglgoup.com/ProductionprocessFine-graingraphites
and isostatic graphite grades. Material data of our isostatic SIGRAFINE® fine-grain graphite Typical properties
Units
Average grain size
Isostatic graphite R6300
R6340
R6500
R6510
R6650
µm (µin)
20 (800)
15 (600)
10 (400)
10 (400)
7 (300)
g/cm3
1.73
1.72
1.77
1.83
1.84
µΩm
16
12
14
13
14
Flexural strength
MPa
40
45
50
60
65
Compressive strength
MPa
85
90
110
130
150
Bulk density Resistivity
Thermal expansion 20 – 200 °C (68 – 392 °F)
10-6 K-1
2.7
3.2
4.2
4.2
4.1
≤ 200
≤ 200
≤ 200
≤ 200
≤ 200
Ash content (purified, P30) 1)
ppm ppm
≤ 10
≤ 10
≤ 10
≤ 10
≤ 10
Ash content (high-purity, P5) 2)
ppm
≤ 2
≤ 2
≤ 2
≤ 2
≤ 2
Ash content
Material data of our extruded and vibration-molded SIGRAFINE® fine-grain graphite Typical properties
Units
Average grain size
mm (in)
Bulk density Resistivity Flexural strength Compressive strength
Extruded graphite
Vibration-molded graphite
HLM3)
SDR
MKUN
MKUS4)
0.8 (0.03)
0.2 (0.008)
0.8 (0.03)
0.8 (0.03)
g/cm3
1.72
1.75
1.67
1.79
µΩm
7.8/9.5
9.0
10/12
8/9
MPa
19/19
33
10/10
18/17
MPa
40/39
-
25/25
41/39
10-6 K-1
3.0/3.5
2.2
2.3/3.2
2.7/3.3
ppm ppm
≤ 800
≤ 500
≤ 700
≤ 700
Ash content (purified, P30) 1)
≤ 10
≤ 10
≤ 10
≤ 10
Ash content (high-purity, P5) 2)
ppm
≤ 2
≤ 2
≤ 2
≤ 2
Thermal expansion 20 – 200 °C (68 – 392 °F) Ash content
1) Specifiction limit for ash values: < 30 ppm
2) Specifiction limit for ash values: < 5 ppm
3) Ø 400 ... 780 mm (Ø 16 ... 31 in); ¨ 500 x 500, ... 610 x 760 mm (¨ 20 x 20, ... 24 x 30 in) 4) Ø 760 ... 1360 mm (Ø 30 ... 54 in); ¨ 630 x 1300 x 1420 mm (¨ 25 x 51 x 56 in)
14
SIGRATHERM® graphite soft felts For optimum thermal insulation.
c SIGRATHERM soft felt Our soft felts offer a unique combination of thermal, chemical and textile properties. This makes them highly suitable for
Thermal conductivity of SIGRATHERM GFA as a function of temperature (vacuum/inert gas atmosphere)
insulation of Czochralski crystal growing units. 0.6
SIGRATHERM graphite soft felts have very low thermal conductivity. They also have the unique advantage of an extremely homogeneous thickness and density distribution throughout the roll length. As a result, our soft felts guarantee a uniform and consistently high insulating effect. Our SIGRATHERM graphite soft felts are also supplied in ultra-high purity and special customer-tailored dimensions.
Thermal conductivity [Wm-1K-1]
Thanks to their special manufacturing process, our
0.5 0.4 Inert gas
0.3 0.2
Vakuum
0.1 0 200/390
1000/1800
2000/3600
Temperature [°C/°F] Material data of our SIGRATHERM® graphite soft felt Typical properties Thickness Area weight Width
Units
GFA5
GFA10
mm (in)
6 (1/4)
11.5 (1/2)
g /m2
500
1000
mm (in)
1220 (48)
1270 (50)
m (ft)
25 – 30 (82 – 98)
25 – 30 (82 – 98)
Ash content
ppm
≤ 400
≤ 400
Ash content (purified)
ppm
≤ 20
≤ 20
Length
Maximum application temperature
°C (°F)
2000 (3600) in vacuum or inert gas
CARBON AND GRAPHITE FELTS
15
SIGRATHERM® graphite rigid felts For mechanically stable thermal insulation.
Thermal conductivity [Wm-1K-1]
Thermal conductivity of SIGRATHERM MFA as a function of temperature (inert gas atmosphere) 1.0 0.8 0.6 0.4 0.2 0
c SIGRATHERM rigid felt with different surface layers
1000/1830
0
2000/3600
Temperature [°C/°F]
Sheets and cylinders produced from SIGRATHERM graphite
With our innovative connection solutions, we can, for example,
rigid felts are particularly valued for their consistently good
supply tailor-made cylinders in virtually any size, which is
thermal insulating properties. In addition, they are corrosion-
particularly beneficial to polysilicon manufacturers. We also
resistant, easy to process, and allow self-supporting structures
supply rigid felts in ultrapure quality for semiconductor
for insulating even relatively large components.
applications.
Besides SIGRATHERM insulating sheets as semi-finished
One or more layers of graphite foil inseparably attached to the
products, we also supply ready-to-use components to
insulating felt can be applied as a convection barrier and re-
customer-specific requirements.
flective coating. For mechanical surface protection, we supply an insulating composite comprising felt covered on both sides with C/C fabric.
Material data of our SIGRATHERM® graphite rigid felt Typical properties
Units
Bulk density
Boards
Cylinder
MFA
RFA
MFA
RFA
g/cm3
0.2
0.2
0.2
0.2
Compressive strength
MPa
1
1
1
1
Flexural strength
MPa
1
1
1
1
%
Specialty Graphites for the Semiconductor Industry
2
Specialty Graphite and Process Solutions – made by SGL Group. ̤̤ Advanced material, equipment, and process solutions ̤̤ Engineered for customers from more than 35 industries ̤̤ Tailor-made from the most comprehensive product portfolio ̤̤ In-depth production and material knowledge ̤̤ Consistent high quality, performance, and service ̤̤ Attractive total cost of ownership
Broad Base. Best Solutions.
Business Unit Graphite Materials and Systems
3
Advanced solutions enable our customers to get ahead. SGL Group offers advanced solutions – even for challenging applications. We understand the specific requirements of our customers and combine in-depth production, material, and engineering knowledge with the most comprehensive specialty graphite portfolio. This makes us the partner of choice to leading companies in many different industries.
Exceptional resistance to heat and corrosion, high
SGL Group covers the entire value chain of
purity and mechanical strength are just a few of
specialty graphite production, including raw
the outstanding properties which our materials
material processing, semi-finished product
offer. Specialty graphite products from SGL Group
manufacture, precision machining, purification,
achieve optimal results where other materials fail.
and coating. When it comes to engineering of
No matter what your specific requirements might
equipment and process solutions our service
be, we will identify the best solution from the most
range makes the difference: We offer mechanical
comprehensive range of specialty graphites.
and process design, production, assembly, commissioning, and service – all from a one-stop shop.
̤̤ Fine grain graphite: isostatic, vibrationmolded, die-molded, extruded
This is how we control and ensure the consistent
̤̤ Expanded natural graphite
high quality, reliability, and performance of our
̤̤ Carbon fiber-reinforced carbon (C/C)
products – and enable our customers to become
̤̤ Soft and rigid graphite felts
more competitive. Challenge us. We are there for
̤̤ Silicon carbide-coated graphite materials
you worldwide.
Additionally we use other materials like PTFE, silicon carbide, and specialty metals.
Specialty graphite solutions for the semiconductor industry
With our portfolio and technical know-how
Innovative specialty graphite solutions play a key
spanning more than 35 different industries,
role in the challenging processes of the semicon-
we engineer tailor-made solutions in close
ductor industry. With optimized plant components
partnership with our customers.
and high-performance materials, we are a partner
b Machining a wafer carrier
of choice to leading original equipment manu facturers (OEMs) and semiconductor producers.
4
Specialty graphites – made by SGL Group. Solutions for the semiconductor and LED industries.
Base material
Al2O3 single crystal growing
Sapphire (Al2O3)
SiC sublimation growing
Silicon carbide (SiC)
Si monocrystal pulling (CZ process)
Silicon (Si) Converter
substrate wafer
substrate wafer semiconductor wafer
substrate wafer semiconductor wafer
Siemens reactor
Value chain
Polysilicon
Growing single crystals
Wafer slicing
Products of the SGL Group
Heaters Heat shields Insulation Electrodes (polychucks)
Heaters Crucibles Heat shields Insulation
Slicing beams
Materials made of carbon and graphite
SIGRAFINE® extruded, isostatic and vibration molded graphites SIGRABOND® carbon fiber-reinforced carbon (C/C) SIGRATHERM® carbon and graphite felts SIGRAFINE® SiC Coating
SIGRAFINE® extruded, isostatic graphites SIGRABOND® carbon fiber-reinforced carbon (C/C) SIGRATHERM® carbon and graphite felts SIGRAFINE® SiC Coating
SIGRAFINE® isostatic graphites
SPECIALTY GRAPHITE solutions FOR THE SEMICONDUCTOR INDUSTRY
5
For many processes in semiconductor production, compo-
Our portfolio includes heaters, support crucibles, heat shields,
nents made from specialty graphites are indispensable, e.g.
and insulating components for many single crystal growing
in crystal growing or subsequent finishing by epitaxy, ion
processes, such as the Czochralski (CZ) process, the sublima-
implantation or plasma etching, and also in the production
tion or physical vapor transport method (PVT), and the heat
of LED chips. This is because the processes usually operate at
exchange method (HEM). We also supply susceptors for silicon
very high temperatures and in an extremely corrosive envi-
epitaxy and MOCVD (metal organic chemical vapor depositi-
ronment: at the same time, high purity and absolute precision
on) reactors. Our components are normally manufactured to
are required.
individual requirements. In addition, we assist our customers in planning, design, and operational optimization.
For the challenging processes of semiconductor production, we offer reliable solutions with specialty graphites.
+ SIGRAFINE® is the new brand name for our fine-grain graphites, previously known under the names RINGSDORFF®, SIGRAFORM®, SIGRAMENT® and CRYSTA-SIL®.
MOCVD
Silicon epitaxy
Epitaxy
Further stages in wafer processing
Susceptors
Components for ion implantation
SIGRAFINE® isostatic graphites SIGRAFINE® SiC Coating
SIGRAFINE® isostatic graphites
6
Products for the semiconductor industry As a reliable supplier and partner to our customers, we offer optimum solutions and process reliability for every application. What differentiates us: ̤̤ Most comprehensive selection of highpurity specialty graphites ̤̤ Consistently high material and product quality ̤̤ Long-standing experience and material know-how ̤̤ Individualized production tailored exactly to customer requirements ̤̤ Application-specific finishing by cleaning, mechanical processing or coating
SPECIALTY GRAPHITES FOR THE semiconductor INDUSTRY
7
Specialty graphites for polysilicon production
c Electrodes (polychucks) for Siemens reactors b Meander heater for CZ units
c Graphite rigid felt cylinder for insulation of converters
In Siemens reactors and STC-TCS converters for recycling
Our experts select the best materials for the specific require-
process gases, temperatures up to 1000 °C (1800 °F) and a highly
ments and operating conditions and manufacture tailored
corrosive environment prevail. Our graphite components
products from them. With our newly developed shaping and
perform impressively well here because they are extremely
connecting solutions, for example, we can supply converter
resistant to heat and corrosion.
insulation in virtually any length and diameter. To increase the service life of highly stressed components – like those in
For many years now, we have been supplying polysilicon
converters – we offer special silicon carbide (SiC) coatings.
manufacturers with a range of plant components. These include purified electrodes for polysilicon deposition, heaters, gas ducts for STC-TCS converters, heat shields and thermal insulation components.
Application-specific specialty graphites for polysilicon production Graphite Applications
Products
Fluidized-bed reactors (FBR)
Reactors
Siemens CVD process
Converters (STC-TCS)
isostatic
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
○
Polychucks
○
Gas distributors
○
Heating elements
○
Heat shields
○
Insulating cylinders
extruded
○ ○
○
○ ○ ○
○
○
○
○
8
Specialty graphites for growing semiconductor and sapphire single crystals
c Support crucible made from C/C
c Rigid felt cylinder for insulation
c Graphite components for CZ units
Whichever process is used for growing single crystals (HEM
These include heaters, crucibles, reflectors, and heat shields
for sapphire, CZ for silicon or PVT for SiC), it always operates
made from high-strength, homogeneous fine-grain graph-
at very high temperatures in an aggressive environment. To
ite or carbon fiber-reinforced carbon, as well as insulating
meet these challenges, the high-temperature zone (“hot zone”)
components produced from graphite felts. We select the best
in the furnace consists almost entirely of heat- and corrosion-
materials in the highest purity (ash value < 5 ppm) to suit
resistant graphite components.
the particular type of crystal growing unit. To extend the service life of highly stressed components, we supply special
SGL Group produces all the graphite components for crystal
SiC coatings. For these, we use the specially suitable isostatic
growing units of every kind – either individually or as a set.
graphites R6510 and R6810.
Application-specific specialty graphites for crystal growing units Graphite Applications
Monocrystal pulling
Products
isostatic
Crucibles
○
Heaters
○
Heat shields
○
Reflectors
○
extruded
Rigid felt
C/C
SiC coated
○ ○
Heaters
○
○
Heat shields
○
○
Insulation
Soft felt
○
Insulation Sapphire monocrystal growing
vibrationmolded
○
○
○
○
○
SPECIALTY GRAPHITES FOR THE SEMICONDUCTOR INDUSTRY
9
Specialty graphites for silicon epitaxy Before becoming a finished semiconductor product, a wafer passes through numerous steps. One increasingly important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the end product. Our SiC-coated graphite susceptors offer the particular advantages of extremely high purity, homogeneous coating, and an excellent service life. In addition, they have high chemical resistance and thermal stability. The SiC coating is applied homogeneously to very close tolerances. High-precision machining ensures a uniform susceptor profile. For inductively heated systems, we also produce material with optimum electrical resistance. The finished components are supplied with a purity and dimensional compliance certificate. SGL Group supplies susceptors and graphite components for all current epitaxy reactors. Our portfolio includes barrel susceptors for Applied Materials, Moore and LPE reactors, pancake susceptors for LPE, CSD,
c Susceptors for epitaxy reactors
and Gemini units, and single-wafer susceptors for Applied Materials and ASM units. All our susceptors are produced from high-strength, isosatic graphite. In addition, we manu facture components for ion implantation from specially suitable high-purity isostatic graphite. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable. We are also continually developing our materials and products further in close collaboration with manufacturers and operators of epitaxy units. Application-specific specialty graphites for silicon epitaxy Graphite Application
Silicon epitaxy
Products
isostatic
extruded
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
Barrel susceptors
○
○
Pancake susceptors
○
○
Single Wafer susceptors
○
○
10
Specialty graphites for LED chip production in MOCVD reactors During the extensive coating process in the MOCVD reactor, the substrate wafers are supported by rotating susceptors or carriers. The properties of the susceptor material have a key influence on coating quality and therefore on the chip reject rate. Our SiC-coated susceptors help ensure efficient manufacture of high-quality LED wafers with low wavelength deviation. Many important factors contribute to this, such as the very high purity and uniform thermal conductivity of both our isostatic graphite and the SiC coating. We use specially selected graphite grades for our susceptors and carriers. High-precision machining and homogeneous coating ensure that the wafer carrier pockets have a uniform profile and minimum flatness deviation. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable.
c Wafer carrier for LED chip production in MOCVD reactors
We are also continually developing our materials and components further in close collaboration with manufacturers and operators of MOCVD units. Together we want to increase chip yield in the production of LED wafers and further minimize wavelength deviation. In addition to susceptors and carriers, we also supply other graphite components for all current MOCVD reactors. Nearly every component can be SiC-coated, even with diameters exeeding 1 m (3').
a Pre-assembly of a high-temperature furnace at SGL Group
Application-specific specialty graphites for MOCVD reactors Graphite Application MOCVD (metalorganic chemical vapor phase deposition)
Products
isostatic
extruded
vibrationmolded
Soft felt
Rigid felt
C/C
SiC coated
Susceptors/carriers
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Lids, rings, satellites
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Full service partner to manufacturers of furnace equipment A furnace manufacturer previously used to buy “hot zone” components individually, assemble them at his factory, then deliver the finished product. This process extended beyond core competencies, was complex, and delayed lead times. Together we have optimized this process. Today, we manufacture the required products, assemble them, and often supply direct to end customers all over the world This saves our customer time and money. This is just one example of an application specific optimized solution from the SGL Group.
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Fine-grain graphites for the semiconductor industry Many applications in the semiconductor production benefit from our wide range of isostatic, extruded, and vibration-molded fine-grain graphites and their outstanding properties: ̤̤ High mechanical strength ̤̤ Consistently high quality ̤̤ High purity ̤̤ Large range of dimensions ̤̤ High corrosion resistance ̤̤ Excellent heat resistance
FINE-GRAIN GRAPHITES
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SIGRAFINE® fine-grain graphites Isostatic, extruded, vibration-molded.
Our SIGRAFINE materials span the complete range of fine-
All components produced from the above-mentioned materials
grain graphites from isostatic and extruded to vibration-
can be supplied, if necessary, in extremely high purity and
molded graphites.
generally also with a SiC coating. We generally use isostatic
For the many different applications in the semiconductor
graphites with a suitable thermal expansion coefficient as
industry, we supply the optimum material in the usual
a substrate for SiC coating, but can use other graphites or
market sizes.
carbon/carbon materials as well to satisfy specific customer
For heater systems, certain of our isostatic and extruded
requirements.
graphite grades are suitable. Very long tubes can be produced in one piece with excellent results from extruded graphite. For extra-large components, we offer special vibration-molded
+ More information under: www.sglgoup.com/ProductionprocessFine-graingraphites
and isostatic graphite grades. Material data of our isostatic SIGRAFINE® fine-grain graphite Typical properties
Units
Average grain size
Isostatic graphite R6300
R6340
R6500
R6510
R6650
µm (µin)
20 (800)
15 (600)
10 (400)
10 (400)
7 (300)
g/cm3
1.73
1.72
1.77
1.83
1.84
µΩm
16
12
14
13
14
Flexural strength
MPa
40
45
50
60
65
Compressive strength
MPa
85
90
110
130
150
Bulk density Resistivity
Thermal expansion 20 – 200 °C (68 – 392 °F)
10-6 K-1
2.7
3.2
4.2
4.2
4.1
≤ 200
≤ 200
≤ 200
≤ 200
≤ 200
Ash content (purified, P30) 1)
ppm ppm
≤ 10
≤ 10
≤ 10
≤ 10
≤ 10
Ash content (high-purity, P5) 2)
ppm
≤ 2
≤ 2
≤ 2
≤ 2
≤ 2
Ash content
Material data of our extruded and vibration-molded SIGRAFINE® fine-grain graphite Typical properties
Units
Average grain size
mm (in)
Bulk density Resistivity Flexural strength Compressive strength
Extruded graphite
Vibration-molded graphite
HLM3)
SDR
MKUN
MKUS4)
0.8 (0.03)
0.2 (0.008)
0.8 (0.03)
0.8 (0.03)
g/cm3
1.72
1.75
1.67
1.79
µΩm
7.8/9.5
9.0
10/12
8/9
MPa
19/19
33
10/10
18/17
MPa
40/39
-
25/25
41/39
10-6 K-1
3.0/3.5
2.2
2.3/3.2
2.7/3.3
ppm ppm
≤ 800
≤ 500
≤ 700
≤ 700
Ash content (purified, P30) 1)
≤ 10
≤ 10
≤ 10
≤ 10
Ash content (high-purity, P5) 2)
ppm
≤ 2
≤ 2
≤ 2
≤ 2
Thermal expansion 20 – 200 °C (68 – 392 °F) Ash content
1) Specifiction limit for ash values: < 30 ppm
2) Specifiction limit for ash values: < 5 ppm
3) Ø 400 ... 780 mm (Ø 16 ... 31 in); ¨ 500 x 500, ... 610 x 760 mm (¨ 20 x 20, ... 24 x 30 in) 4) Ø 760 ... 1360 mm (Ø 30 ... 54 in); ¨ 630 x 1300 x 1420 mm (¨ 25 x 51 x 56 in)
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SIGRATHERM® graphite soft felts For optimum thermal insulation.
c SIGRATHERM soft felt Our soft felts offer a unique combination of thermal, chemical and textile properties. This makes them highly suitable for
Thermal conductivity of SIGRATHERM GFA as a function of temperature (vacuum/inert gas atmosphere)
insulation of Czochralski crystal growing units. 0.6
SIGRATHERM graphite soft felts have very low thermal conductivity. They also have the unique advantage of an extremely homogeneous thickness and density distribution throughout the roll length. As a result, our soft felts guarantee a uniform and consistently high insulating effect. Our SIGRATHERM graphite soft felts are also supplied in ultra-high purity and special customer-tailored dimensions.
Thermal conductivity [Wm-1K-1]
Thanks to their special manufacturing process, our
0.5 0.4 Inert gas
0.3 0.2
Vakuum
0.1 0 200/390
1000/1800
2000/3600
Temperature [°C/°F] Material data of our SIGRATHERM® graphite soft felt Typical properties Thickness Area weight Width
Units
GFA5
GFA10
mm (in)
6 (1/4)
11.5 (1/2)
g /m2
500
1000
mm (in)
1220 (48)
1270 (50)
m (ft)
25 – 30 (82 – 98)
25 – 30 (82 – 98)
Ash content
ppm
≤ 400
≤ 400
Ash content (purified)
ppm
≤ 20
≤ 20
Length
Maximum application temperature
°C (°F)
2000 (3600) in vacuum or inert gas
CARBON AND GRAPHITE FELTS
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SIGRATHERM® graphite rigid felts For mechanically stable thermal insulation.
Thermal conductivity [Wm-1K-1]
Thermal conductivity of SIGRATHERM MFA as a function of temperature (inert gas atmosphere) 1.0 0.8 0.6 0.4 0.2 0
c SIGRATHERM rigid felt with different surface layers
1000/1830
0
2000/3600
Temperature [°C/°F]
Sheets and cylinders produced from SIGRATHERM graphite
With our innovative connection solutions, we can, for example,
rigid felts are particularly valued for their consistently good
supply tailor-made cylinders in virtually any size, which is
thermal insulating properties. In addition, they are corrosion-
particularly beneficial to polysilicon manufacturers. We also
resistant, easy to process, and allow self-supporting structures
supply rigid felts in ultrapure quality for semiconductor
for insulating even relatively large components.
applications.
Besides SIGRATHERM insulating sheets as semi-finished
One or more layers of graphite foil inseparably attached to the
products, we also supply ready-to-use components to
insulating felt can be applied as a convection barrier and re-
customer-specific requirements.
flective coating. For mechanical surface protection, we supply an insulating composite comprising felt covered on both sides with C/C fabric.
Material data of our SIGRATHERM® graphite rigid felt Typical properties
Units
Bulk density
Boards
Cylinder
MFA
RFA
MFA
RFA
g/cm3
0.2
0.2
0.2
0.2
Compressive strength
MPa
1
1
1
1
Flexural strength
MPa
1
1
1
1
%
